HRX-OM-W060 Refer to Table 5.4-11 Offset setting for details. (1) (2) Offset setting Table 5.4-11 Offset setting No. Indication Item Explanation Setting range (1) Offset Temp.
How to Order Specifications 11 MSQ 10 B A90 A S Particle generation grade Grade 1 Note 1) Suction flow rate (example) 1 l/min (ANR) 11-MSQA is identical to the high precision type and 11-MSQB is identical to the basic type. Clean series Vacuum type Number of auto switches Note) Please refer to Pneumatic Clean Series catalog for further details.
10 D-B5/B64 8 9 10 10 11 11 11 10 D-B59W 13 14 14 14 17 16 18 13 D-H7/H7NF/H7W/H7BAL 4 4.5 5 6 6.5 6.5 7 4 D-H7C 7 9 10 9.5 10.5 10.5 11 8.5 D-A3/A44 9 9 10 10 11 11 11 10 D-G39/K39 8 9 9 9 10 10 11 9 4 D-G5/K59/G5W D-K59W/G5BAL/G5NTL Since this is a guideline including hysteresis, not meant to be guaranteed.
Location where vacuum pressure is measured Piping length (m) Vacuum source Adjust the measured vacuum pressure using a regulator to be the value in the graphs below. 0 -0.001 -0.002 -0.003 -0.004 -0.005 -0.006 -0.007 -0.008 -0.009 -0.010 -0.011 -0.012 11-CJ2 11-CM2 11-CQ -0.027 13-MXS16 Vacuum pressure (MPa) Vacuum pressure (MPa) -0.028 13-MJP 13-MXS20 -0.029 11-CU -0.030 13-MXS25 -0.031
HRZ Series 5.3 Operation Screen 5-11 5-11 HRX-OM-X010 Chapter 5 System Operation Unit of PUMP SP can be selected on Initial Setting screen 1.
OUTPUT 35 9-3-5. 36 10 3744 11 11-1. 11-1-1. 45 11-1-2. 4548 11-1-3. 48 11-2. 11-2-1. 4952 11-2-2. 53 11-3. 11-3-1. 53 12 12-1. 54 12-2. 54 13 13-1. 5557 13-2. () 5758 14 14-1. 5960 - 1 1 1 1 (ISO/IEC)(JIS) 1) 2) *1) ISO 4414:Pneumatic fluid powerGeneral rules relating to systems ISO 10218-1:2006Robots for industrial environments-Safety requirements-part1
CH2 TEMP SP 4 3 6 3 2 1 Figure 5-11 Ten-key Screen Table 5-8 Ten-key Screen No.
Description Qty. 4 4 4 4 1 1 1 1 Seal Seal Seal Seal 11 11 11 11 1 1 1 1 Gasket Gasket Gasket Gasket Parts included in seal kit 12 12 12 12 1 1 1 1 Gasket Gasket Gasket Gasket 16 16 16 16 Wear ring Wear ring Wear ring Wear ring 4 4 4 4 17 17 17 17 Piston seal Piston seal Piston seal Piston seal 4 4 4 4 26 26 26 26 Seal washer Seal washer Seal washer Seal washer 2 2 2 2 A set includes all
Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 16, Motor Type: Step Motor (Servo/24 VDC), Lead: B (LEFS16, 5mm; LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm), Stroke: 100mm
Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 16, Motor Type: Step Motor (Servo/24 VDC), Lead: B (LEFS16, 5mm; LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm), Stroke: 200mm, Motor Option: B (w/Lock)
Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 16, Motor Type: Step Motor (Servo/24 VDC), Lead: B (LEFS16, 5mm; LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm), Stroke: 150mm, Motor Option: B (w/Lock)
Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 16, Motor Type: Step Motor (Servo/24 VDC), Lead: B (LEFS16, 5mm; LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm), Stroke: 50mm
Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 16, Motor Type: Step Motor (Servo/24 VDC), Lead: B (LEFS16, 5mm; LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm), Stroke: 250mm
Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 16, Motor Type: Step Motor (Servo/24 VDC), Lead: B (LEFS16, 5mm; LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm), Stroke: 300mm
Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 16, Motor Type: Step Motor (Servo/24 VDC), Lead: B (LEFS16, 5mm; LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm), Stroke: 350mm
Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 16, Motor Type: Step Motor (Servo/24 VDC), Lead: LEFS16, 5mm; LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm, Stroke: 100mm, Motor Option: -, Vacuum Port: -, Positioning Pin Hole: -, Actuator Cable Type: -, Actuator Cable Length: -, Controller Type: -, I/O Cable Length: -, Protocol: -, Suffix: -, Controller Mounting: -, Communication
Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 16, Motor Type: Step Motor (Servo/24 VDC), Lead: LEFS16, 5mm; LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm, Stroke: 200mm, Motor Option: w/Lock, Vacuum Port: -, Positioning Pin Hole: -, Actuator Cable Type: -, Actuator Cable Length: -, Controller Type: -, I/O Cable Length: -, Protocol: -, Suffix: -, Controller Mounting: -, Communication
Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 16, Motor Type: Step Motor (Servo/24 VDC), Lead: LEFS16, 5mm; LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm, Stroke: 150mm, Motor Option: w/Lock, Vacuum Port: -, Positioning Pin Hole: -, Actuator Cable Type: -, Actuator Cable Length: -, Controller Type: -, I/O Cable Length: -, Protocol: -, Suffix: -, Controller Mounting: -, Communication
Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 16, Motor Type: Step Motor (Servo/24 VDC), Lead: LEFS16, 5mm; LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm, Stroke: 50mm, Motor Option: -, Vacuum Port: -, Positioning Pin Hole: -, Actuator Cable Type: -, Actuator Cable Length: -, Controller Type: -, I/O Cable Length: -, Protocol: -, Suffix: -, Controller Mounting: -, Communication
Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 16, Motor Type: Step Motor (Servo/24 VDC), Lead: LEFS16, 5mm; LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm, Stroke: 250mm, Motor Option: -, Vacuum Port: -, Positioning Pin Hole: -, Actuator Cable Type: -, Actuator Cable Length: -, Controller Type: -, I/O Cable Length: -, Protocol: -, Suffix: -, Controller Mounting: -, Communication