Series PF2D Digital Flow Switch For Deionized Water and Chemicals Output specification Port size: (inch) Symbol Nil 1 2 Specification Series PF2D300 Series PF2D200/300 Series PF2D300 Applicable display unit (monitor) model 11 13 19 3/8 1/2 3/4 PF2D504 PF2D520 PF2D540 Output for display unit Output for display unit + analog output (1 to 5 V) Output for display unit + analog output (4 to 20 mA) Specifications for Sensor Unit Model PF2D504 PF2D520 PF2D540
/301 11 13 19 3/8 1/2 3/4 PF2D504 PF2D520 PF2D540 Specifications for Sensor Unit Model PF2D504 PF2D520 PF2D540 Measured fluid Liquid not to corrode nor erode deionized water and/or Teflon.
For LEFSH25RH-300, enter "LEFS25RH-300" and select LEFS25RH-300. For clean type (11-) or secondary battery (25A-) type actuator Search without entering 11or 25A-, and select the actuator for which the part number after 11or 25Amatches. e.g.) For 11-LEFSH16A-100BR, enter "LEFS16A-100" and select LEFS16A-100.
Grommet: G Conduit: C 300 V D D F Q F Q 280 300 VC Class H coil Broken line section C C G1/2 R R VDW VQ E E VX2 A H A H B B 2-P Port size 2-P Port size VX 2-M, thread depth N 2-M, thread depth N Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VX3 L L VXA K K VN
Suction cover 1 9 PVF Sound absorbing material B ZL112-SP01 Front cover Without valve 2 10 PVF Sound absorbing material A (set no. for 9, 10 &11) End cover 3 11 PE Suction filter Body When ordering a vacuum pressure gauge or a digital vacuum pressure switch separately, use the part numbers shown in the option specifications on pages 5 & 6. 4 Vacuum sensor unit 5 Nozzle 6 Diffuser 7 Detent
Refer to LECYM Operation Manual,section 3.3.1. and 3.3.2. 11 - 2.3.1 I/O Signal (CN1) Names and Functions The following table shows the names and functions of I/O signals (CN1). (1) Input Signals Signal Pin No.
) () a b P1P2 2(A) 1(P) -13No.VEX-OMY0001 (7) (1) (2) (3) (4) (5) (6) (12) (7) (8) () (9) (5) (6) (14) (10) (P2) (5) (4) (11) (4) (13) DCAC (7) 14 No.VEX-OMY0001 o. (1) (2) (3) (4) (5) 1 ISO VG 32 (6) (7) (8) (9) (10) (11) (12) () (13) (14) ()() 15 No.VEX-OMY0001 C 2020.6 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81
Supply pressure (MPa) Suction flow (l /min (ANR)) 13-3-11 11 Series ZR Ejector exhaust Ejector supply P port Vacuum pad connection V port Ejector Unit Nozzle Dia./1.0, 1.3, 1.5, 1.8, 2.0 mm Circuit diagram 2 2 Adapter B Silencer Ejector indication Nozzle dia./1.0, 1.3, 1.5 mm ZR1-W 1 10 13 15 2 Ejector 1 1 1 1 (Mounting hole) 1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San
The tightening torque should be approximately 0.05 to 0.1 Nm. 8-17-11 11 Series CYP Specific Product Precautions 1 Be sure to read before handing. Operation Handling Caution Caution 1. Open the inner package of the double packaged clean series inside a clean room or other clean environment. 2.
Since M1 & M3 are not generated, review is unnecessary. = 0.96 [Nm] 2 = M2/M2 max = 0.96/4 = 0.24 M Guide shaft mounting surface L1 B We = 5 x 103 m g U = 5 x 103 1 9.8 300 = 14.7 [N] Me3 = 1/3 We (L2 + A) 103 3.
Since M1 & M3 are not generated, review is unnecessary. = 0.96 [Nm] 2 = M2/M2 max = 0.96/4 = 0.24 M Guide shaft mounting surface L1 B We = 5 x 103 m g U = 5 x 103 1 9.8 300 = 14.7 [N] Me3 = 1/3 We (L2 + A) 103 3.
Since M1 & M3 are not generated, review is unnecessary. = 0.96 [Nm] 2 = M2/M2 max = 0.96/4 = 0.24 M Guide shaft mounting surface L1 B We = 5 x 103 m g U = 5 x 103 1 9.8 300 = 14.7 [N] Me3 = 1/3 We (L2 + A) 103 3.
Since M1 and M3 are not generated, review is unnecessary. = 0.96 [Nm] 2 = M2/M2 max = 0.96/4 = 0.24 M Guide shaft mounting surface L1 B We = 5 x 103m g U = 5 x 103 1 9.8 300 = 14.7 [N] Me3 = 1/3 We(L2 + A) 103 3.
ON OFF Time 16-3-42 11 Series PSE Specific Product Precautions 1 Be sure to read before handling. Pressure Sensor Handling Handling Warning Make sure that the air tubing is firmly inserted to avoid possible disconnection. (Tensile strength is approx. 25 N when being inserted 8 mm.)
Lead wire length Series 300 mm 600 mm 1000 mm 1500 mm 3000 mm Nil L1 L2 L3 L4 20 30 40 Class 2 Class 3 Class 4 Clip Voltage Electrical entry 1 2 3 4 36 100 VAC 200 VAC 110 VAC 220 VAC 230 VAC G C T Grommet Conduit Conduit terminal Flat head screwdriver Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800
/4" x 11/10" 11/4" 31.75 11/10" 27.95 KQB2 O.D. 3.18 1/16" 1.58 0.086" 2.18 KS KX I.D.
OUT ~ 1-' ffi q=:J L ~I W ~ Drain (mm) Drain Model Port size A B AMH150 1/8,1/4,3/8 239 80 AMH250 1/4,3/8 252 80 1/2 258 284 AMH350 3/8,1 /2 290 80 (mm) 3/4 Connection Model AMH450 1/2,3/4 1 305 312 80 A 240 B AMH450 AMH550 AMH650 AMH850 3/4B,FF,10K lB,FF,10K 256 AMH550 3/4 ,1 339 80 260 300 349 1 1/2B,FF, 1 OK 2B,FF,10K AMH650 1,11/2 391 80 300 AMH850 11/2,2 540.5 80 380 496.5 SMC CORPORATION
AW2001 AW3001 AW4001 6) Valve ass'y Brass NBR 1349160 131521 6A 13 16212A e Filter element Bronze 11 294-5B 11 1511-5B 11 104-5B Baffle ABS resin 11295 111522 111622 0 Diaphragm ass'y NBR 131445A 131 52 15A 1316211A Deflector ABS resin 112961 11158 11167 Ci) Bowl ass'y 1'<0'., Polycarbonate C200F C300F C400F 0 Valve spring Stainless steel 13491 58 131525 131625 C!!)
SeriesNCQ8 Air Cylinder: Standard Type Double Acting, Single Rod Maintenance Parts 056 to 400 Construction Double Acting, Single Rod 10 11 9 Seal Kit Parts List No. 9 10 11 Description Piston Seal Rod Seal Tube Gasket Material NBR NBR NBR *BLUE links will lead to purchase pages. Repair Parts: Standard Seal Kit for Double Acting, Single Rod Remarks Bore size Kit no.
leakage [cm3/min] 5000 4000 MQR8 3000 MQR4 2000 MQR2 MQR1 e.g.: If adjacent ports are connected to positive vacuum pressure of -0.1 MPa and 0.1 MPa in MQR12, then differential pressure is 0.2 MPa, and leakage is 300 (cm3/min). 1000 (300) 0 0 0 . 1 0 . 2 0 . 3 0 . 4 0 . 5 0 . 6 0 . 7 0 . 8 0 . 9 1 Differential pressure [MPa] Change in rotational torque with rotation speed Temperature rise