Specification: Clean Type, Vacuum Suction, Bore Size: Ø16, Stroke: 30mm, Adjuster: Metal Stopper, Magnet: W/Magnet and Rail, Auto Switch: Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 3m, Number: -

Clean Series: Vacuum Suction Type, Magnet: Built-in, Mounting: Axial Foot Style, Bore Size: 32mm, Port Thread: NPT, Stroke: 175mm, Cushion: Rubber Bumper, Rod End Thread: Male Rod End, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -

Clean Series: Vacuum Suction Type, Magnet: Built-in, Bore Size: 12mm, Stroke: 15mm, Rod End Thread: Female, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -

Clean Series: Vacuum Suction Type, Magnet: Built-in, Bore Size: 6mm, Stroke: 20mm, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -

Clean Series: Clean Series, Vacuum Suction Type, Magnet: None, Size: 10, Connecting Port: Body Side, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -

Clean Series: Clean Series, Vacuum Suction Type, Magnet: Built-in, Size: 10, Connecting Port: Body Side, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -

Clean Series: Clean Series, Vacuum Suction Type, Magnet: Built-in, Size: 15, Connecting Port: Body Side, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -

Clean Series: Vacuum Suction Type, Bore Size: 20mm, Finger Option: Flat Type Fingers, Standard or Narrow Type, Auto Switch: Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 3m, Number: -

Clean Series: Vacuum Suction Type, Bore Size: 20mm, Finger Option: Basic Style (Standard Type), Auto Switch: Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 3m, Number: -

Clean Series: Vacuum Suction Type, Bore Size: 10mm, Finger Option: Basic Style (Standard Type), Auto Switch: Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 3m, Number: -

Clean Series: Vacuum Suction Type, Bore Size: 20mm, Finger Option: Basic Style, Narrow Type, Auto Switch: Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 3m, Number: -

Clean Series: Vacuum Suction Type, Bore Size: 10mm, Finger Option: Side Tapped Mounting, Standard Type, Auto Switch: Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 3m, Number: -

Clean Series: Vacuum Suction Type, Bore Size: 16mm, Finger Option: Basic Style (Standard Type), Auto Switch: Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 3m, Number: -

Clean Series: 11 (Vacuum Suction Type), Bore Size: 20mm, Finger Option: 2 (Through-holes in Opening/Closing Direction, Standard Type), Auto Switch: M9N (Solid State, Gen. Purpose, 3 Wire NPN, Horizontal), Lead Wire: L (3m)

Clean Series: 11 (Vacuum Suction Type), Magnet: D (Built-in), Bore Size: 12mm, Stroke: 30mm, Rod End Thread: Female, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: L (3m)

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

L 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 VP7 285.5 21 273 No.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

12 B A B 1.5(0) 1.5(0) B 0(0) 0(0) 1(0) 6 B 5(3) 5(3) 6(4) 11 A 7(5) 7(5) 8(6) 13 A B 6(4) 6(4) 7(5) 12 A 4(2) 4(2) 5(3) 10 B 3(1) 3(1) 4(2) 9 A 0.5(0) 0.5(0) 1.5(0) 6.5 Hs 22.5 25 28.5 32.5 Hs 25 27.5 31 35 Hs 60 62.5 66 70 Hs 69.5 72 75.5 79.5 Bore (mm) 20 25 32 40 4.5(2.5) 3.5(1.5) 2.5(0.5) 4.5(2.5) 3.5(1.5) 2.5(0.5) MGF 2.5(0.5) 7.5 5.5(3.5) 10.5 4.5(2.5) 9.5 3.5(1.5) 8.5 CY1 Factors

DOC1003626

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Abnormal low tank fluid level 1 Low tank fluid level 2 None 3 None 4 None 5 Fan failure Alarm flag 1 6 None 7 None 8 Abnormal rise of circulating fluid temperature 9 Circulating fluid temperature rise 10 Circulating fluid temperature drop 11 TEMP READY

Nozzle Type Ionizer

9.5 12 Variable nozzle direction 46 3.5 A 18.5 6 11 6 A 12.4 8 5 6 A-A 27.7 40 M3 x 0.5 thread depth 4 (Ground terminal) 86.4 Air blow port 8 6 2 x M3 x 0.5 thread depth 10 26 34.7 11 High flow rate nozzle IZN10E-02-X367 (103) 16 92.5 5 5.5 Variable nozzle direction 12 46 18.5 Air blow port 8 4 22 IZN10E Series Made to Order 2 This product is an individually applicable product.

MHF2

4 1.3 15 26 12 4 Accessory option: Hexagon socket head screw (special screws) 3 2-2H9 +0.025 0 depth 2 3 8 5 8 5 Groove for auto switch mounting 2-M3 x 0.5 thread depth 4 Mounting thread 11 58 11 Low Profile Air Gripper Series MHF2 Dimensions MHF2-12D Scale: 65% 3H9 +0.025 0 depth 3 26 3H9 +0.030 0 depth 3 2-M4 x 0.7 thread depth 10 Mounting thread 4 42 4 40 52 2-M4 x 0.7 thread depth 5