Compact Electro-pneumatic Regulator Series ITV0000

Return 0.5 0.4 0.2 0 0 Out -0.2 -0.4 -0.5 -0.6 -0.8 0 25 50 75 -1 1 2 3 4 -1 100 5 Input signal % F.S.

Series AK1000

psig (0.52 MPa) 25 psig (0.17 MPa) Inlet pressure: 50 psig (0.34 MPa) AK1300 150 psig (1.0 MPa) 75 psig (0.52 MPa) Inlet pressure: 100 psig (0.69 MPa) 40 0.28 140 0.97 35 0.24 120 0.83 Delivery pressure (MPa) Delivery pressure (MPa) Delivery pressure (psig) Delivery pressure (psig) 30 0.21 100 0.69 25 0.17 80 0.55 20 0.14 60 0.41 15 0.10 40 0.28 10 0.07 20 0.14 5 0.03 0 0.00 0 0.00 0 100

CEU1

No.CE*-OMP0002-A 3 CEU1 SMC FG 0~50 35~85%RH 3 CEU1CE10.1mm 3 CE1-R** CE1** 3 CEU1** FG 3 DIN 3 2m/s 3 (100ms) 2 2 2 2-1 1 1 1 CEU1 4 2 2 2 2-2 2 2 2 3 3 3 3-1 1 1 1 : : 1 1 (mm) (mm) 25 25 25 25 50 50 50 50 75 75 75 75 100 100 100 100 125 125 125 125 150 150 150 150 175 175 175 175 200 200 200 200 250 250 250 250 300 300 300 300 400 400 400 400 500 500 500 500 12 12 12 12

I

Arntient and tluid temperatureMax .120'F(Max. 50'C) Respon time 2 poitl'| slngle/doubb 20ms or less at 75 PSI (skg/cm'?) 3 pcition 40ms or less at 75 PSI (skgf/cm'?)

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Bore size(mfn) Standard stroke(mm) MGOftl Slide bearing MGor12, rc 10, 20, 30, 40, 50 MGOr2o,2s 20, 30, 40, 50, 75, 100 25, 50, 75, 100 MGOL Ball bush bearing MGOr32,40, 50, 63, 80,1OO . intermediate stroke As to intermediate stroke (5, 10, 15, 20, 30, 35 )' spacer of 5, 10' 15,20mm width will be used (Example) MGOM50-10 is produced by installing 1smm spacel in MGQM50'25 Consult factory when

3M/SMseries

) Ambient and fluid temperatureMax' 120'F(Max. 50'C) Response time 2 pooition single/double 20ms or less at 75 PSI (Skgf/cm'?) 3 position 40ms or less at 75 PSI (Skgf/cm'?)

Smooth Cylinder Series CA2Y ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CA2 .

, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 Replacement Parts: Seal Kits 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit No. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40-PS Rod seal 1 pc.

Air Cylinder MGQ Series Compact Guide Cylinder

, 100 MGOL /tO, 50, 63, 80, 1OO 25, 50, 75, 100 As to inremedrale slroke (5, 10, 15,20,30 35.. .. ), spacer ol5, 10, 15 20mm wdth wllbe used (EEmple) MGQM5o lO s produced by instaling 15mn spacer in MGQ'!

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Shock absorbers are not available with the microspeed version of the MGGM cylinder. 13 Related Products Speed Controller for Low Speed Operation The effective area of controlled flow is approximately 1/10 of the standard type. These controllers are suitable for controlling the speed of microspeed cylinders.

Digital Flow Switches, Series PF2A, Series PF2W

69 1 DC(+) 2 Analog output 3 DC() Accumulated pulse output wiring examples 4 OUT1 4-I thread with depth J 40 Max. 30V 80mA or less OUT1 Black Load H 0V Blue 50msec PF2A7H-(-M) 28 29 B C D E F G H I J A Model Brown PF2A703H PF2A706H PF2A712H 55 160 40 92 67 55 Rc 1, NPT 1, G 1 36 M5 x 0.8 8 OUT1 80mA Load Black 65 180 45 104 79 65 Rc 11/2, NPT 11/2, G 11/2 Rc 2, NPT 2, G 2 46 M6 x 1 9 0V 75

Digital Flow Switches Series PF2A

PF2A703H--28 PF2A703H--68 PF2A706H--28 PF2A706H--68 PF2A703H--29 PF2A703H--69 PF2A706H--29 PF2A706H--69 3000 150 3000 150 6000 300 6000 300 PF2A712H--28 PF2A712H--68 PF2A712H--29 PF2A712H--69 12000 600 12000 600 13

Digital Flow Switches

Note 7) The display unit is comformed to CE mark. 4 Series PF2A Flow Characteristics (Pressure Loss) PF2A710,510 PF2A750,550 PF2A711,511 3.0 1.0 10 Pressure loss (kPa) Pressure loss (kPa) Pressure loss (kPa) 2.5 0.8 8 2.0 6 0.6 1.5 0.4 4 1.0 0.2 2 0.5 Flow rate (l/min) 0 100 10 25 50 75 5 2.5 7.5 0 5 10 15 20 25 30 40 35 45 50 0 1 10 Flow rate (l/min) Flow rate (l/min) PF2A721,521 PF2A751,551

ISG

Cable gland Max. diameter of an electric cord 20a 20b 20c 12 13 15 How to Order 3. Terminal thread type is M4. ISG 1 03 1 0 0 W Mounting/Piping Caution Multipurpose pressure switch 1. Mounting is possible in either horizontal or vertical orientations.

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5) 3 . 1 5 tBo\ 5.43 '135) 7 9 9 t203) E t 1 1 6 1 3.62 1 . 1 8 2.05 152\ o55 0.83 121\ Ml2x1 75 0.43 1 1 1 ) M26x1 5 1.57 (40) 4.S6 {126) 1.97 6.38 i162) 5.35 t136) 8.74 t222) 2.83 <72) 5.31 1135) 4 . 1 1 1206) 2.55 (65) 0.55 N4.0) 1 . 1 9 (41) 5 6 7 1215t 'Min.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

6 3.2, 4 6, 8, 10 8, 10 4 6 6 8 10 12 10, 12 Tubing O.D. 1/8", 5/32" 1/8" 3/16", 1/4" 1/4", 5/16" 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 5/32" 5/16" 3/8" 3/16", 1/4" Controlled flow (Free flow) Flow rate (l/min (ANR)) 100 180 230 260 390 660 790 1580 1710 460 920 Effective area (mm 2) 1.5 2.7 3.5 4 6 7 10 12 14 24 26 Note) Flow rate values are measured at 0.5 MPa and 20C. 15-9-75

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

VG Applicable cable 6 to 12 Light position (For DL, DZ) VP3 VP3 G1/2 NO NO [221] 215.6 219 206.5 PE PE 191 26 26 108 108 45 45 36 36 95 95 [ ]: With indicator light (TL, TZ) 1311 VP3185 Series Dimensions: VP3185 Grommet: VP3185-G A B 140 87.4 54 35 81 106 G1/2 1/4 (PA port) [External pilot specification] Lead wire length 200 mm Manual override 1/4 (PE port) 2 (EXH port) NO NC PE PA 2 x 13

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

DXT083-13-1 Qty. 1 pc. Hexagon socket head screw DXT083-19-1 2 pcs.

Ionizer Nozzle type IZN10 Series IZS

IZN10-ES2 IZN10-ES3 IZN10-ES4 Number of spacers Shield sheet/IZN10-A004 37 40 4 This is an individual shield sheet for the manifold mounting parts set/IZN10-ES. 54 60 6 71 75 8 Ionizer (Order it separately.)

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

(Refer to Section 6 Parts Replacement Procedure (pages 10 to 13) for details.) Piping Caution Maintenance Warning Caution 4 XL-OMO0001-A 2. Product Specific Precautions 2 Common Precautions 2 Be sure to read before handling Maintenance Parts Caution The bonnet assembly should also be replaced when changing the seal material.

CG1-SMV13_en

The compatibility of the product is the responsibility of the 25 0.02 0.03 0.06 0.10 0.15 0.26 0.41 person who designs the equipment or decides its specifications. 50 0.03 0.05 0.09 0.14 0.23 0.39 0.61 Since the product specified here is used under various operating 75 0.04 0.07 0.12 0.19 0.31 0.51 0.80 conditions, its compatibility with specific equipment must be decided by the person who