Short Stroke Electric Actuator Series LX

20 5.1 2.6 0.6 0.1 5.1 2.6 0.6 0.1 30 30 3.4 1.7 0.4 0.1 3.4 1.7 0.4 0.1 For transfer load of 1kg For transfer load of 3kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 100 50 10 1 100 50 10 1 10 10 10.1 5.1 1.1 0.2 10.1 5.1 1.1 0.2 Speed (mm/s) Speed (mm/s) 20 20 5.1 2.6 0.6 0.1 5.1 2.6 0.6 0.1 30 30 3.4 1.7 0.4 0.1 3.4 1.7 0.4 0.1 Refer

Pneumatic Transfer System Series MF

Z76 5V 12V 5V, 12V Yes Reed switch Solid state switch Relay, PLC Page 20 Grommet No Z73 100V 100V or less 2 wire 24V IC circuit Z80 3 wire (NPN) 3 wire (PNP) Y59A Y69A 5V, 12V IC circuit Page 21 Y7P Y7PV Relay, PLC 12V 24V Yes 2 wire Y59B Y69B Grommet Diagnostic indication (2 color indicator) 3 wire (NPN) Y7NW Y7NWV 5V, 12V IC circuit Page 22 3 wire (PNP) 2 wire Y7PW Y7PWV 12V Y7BW Y7BWV

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Fittings & Tubing Air Cylinders Rotary Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting

CEx-OMQ0013

No.1 OFF ON P2 No.2 OFF ON P3 No.3 OFF ON P4 No.4 OFF ON P5 P6 P7 P8 7 8 1 2 3 4 5 6 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 50 13 14 15 16 9 10 11 12 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 51 F : 2019 1 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +

Self-seal Fittings Series KC

Nylon Urethane Effective orifice(mm 2) Weight (g) T (M) L Mounting hole M1 M2 KCE04-00 KCE06-00 KCE08-00 KCE10-00 KCE12-00 4 6 8 10 12 M12 1 M14 1 M16 1 M20 1 M22 1 14 42 13 15 17 21 23 18 19 21.5 24 25.5 16 17 18.5 21 22 21 30 39 84 115 2.6 6.8 13.1 20.4 30.4 2.6 6.8 16.2 25.6 35.4 17 19 24 27 45.5 52.5 59.5 63.2 Bulkhead female union: KCE Thread Rc (PT) 4 6 8 10 12 Effective orifice(mm

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

25 18.5 23.5 27.5 26 30 33 34.5 37 39.5 8 15.3 21.1 25.5 15.8 22.3 26.7 23.5 27.9 29.4 30.8 32 36.2 8 10 14 8 10 14 12 14 4 10 19 6 12 20 13 21 26 36 38 65 D1 4 17 4 4 10.4 19.7 L2 A D2 10 H 8 Connection threads 6 18.5 10 10 12.8 21.8 (R) 10 (R) Applicable tubing 8 15.2 20.5 26 18 12 25.3 M L1 10 18.5 23 41 29 28.4 17 17 12 20.9 24 58 46 30.4 D1 22 Reference dimension for R threads after

IP80-OM00019

O 21 5. ( 3-1-2 ) 6. () ( 7-2) 22 11 11-1 OUT1OUT2 (1920) 6 90cm3 07 P36801080 P565010-18 180cm3 1 P36801081 P565010-19 O P5 19 20 (1) O (2) A (P22401123) 11-2 IP8100 IP8100 7 M P368010-24 S P368010-25 21 M 22 S M IP610 SIP610 23 11-3 IP8000 IP8000 8 1085mm P368010-20 35100mm P368010-21 50140mm P368010-22 11-4 (IP8*00-**0)2 9 (A) P368010-26 79 (B) P368010-27 911 G1/2 23 24

LECA6_C

CN1:. 18 5.1 . 18 5.2 . 18 5.3 . 19 (1) . 19 1 - (2) . 19 (3) . 19 5.4 . 20 1. 20 2. 21 (3) (). 22 6.

Slider Type Ball Screw Drive/11-LEFS Series

8 12 16 20 24 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] L6 [mm] 600 600 600 600 Z 400 400 400 400 200 200 200 200 0 0 4 8 12 16 20 24 0 0 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work

CXS

(2) V = 400 mm/s Graph (1) V = 200 mm/s 20 50 CXSM CXSL CXSM CXSL 10 10 Weight m (kg) Weight m (kg) 32 32 25 25 1 1 20 20 0.6 10 20 30 40 50 100 5 0.6 10 20 30 40 50 100 5 Overhang l (mm) Overhang l (mm) Graph (4) V = 800 mm/s Graph (3) V = 600 mm/s 6 5 3 32 2 Weight m (kg) Weight m (kg) 32 25 25 1 1 20 20 CXSM CXSL CXSM CXSL 0.6 10 20 30 40 50 100 5 0.6 10 20 30 40 50 100 5 Overhang l (

CXS

10 to 32 Graph (3) V = 200 mm/s Graph (4) V = 400 mm/s 4 20 3 10 32 5 25 1 Weight m (kg) Weight m (kg) 32 20 25 0.5 1 20 15 0.5 15 10 CXSM CXSL CXSM CXSL 10 5 0.1 5 0.1 10 20 30 40 50 100 10 20 30 40 50 100 Overhang l (mm) Overhang l (mm) Graph (5) V = 600 mm/s Graph (6) V = 700 mm/s (800 mm/s for 10) 2 0.6 20 32 25 0.4 1 15 20 Weight m (kg) Weight m (kg) 0.5 15 0.2 10 10 CXSM CXSL CXSM

MHK2

30 30 60 0.3 MPa 0.4 MPa 40 0.5 MPa 0.6 MPa 20 20 40 0.6 MPa 20 20 10 10 50 60 10 0 0 20 50 60 10 0 20 30 40 100 120 20 0 20 30 40 100 80 60 40 40 60 80 Gripping point L (mm) Gripping point L (mm) Gripping point L (mm) Gripping point L (mm) Note) Distance to the gripping point L of single acting type is shortened by spring return.

MHK2

30 30 60 0.3 MPa 0.4 MPa 40 0.5 MPa 0.6 MPa 20 20 40 0.6 MPa 20 20 10 10 50 60 10 0 0 20 50 60 10 0 20 30 40 100 120 20 0 20 30 40 100 80 60 40 40 60 80 Gripping point L (mm) Gripping point L (mm) Gripping point L (mm) Gripping point L (mm) Note) Distance to the gripping point L of single acting type is shortened by spring return.

Wedge Cam Operation Provides

20 40 0.6MPa 20 20 10 10 50 60 10 0 0 20 50 60 10 0 20 30 40 100 120 20 0 20 30 40 100 80 60 40 40 60 80 Holding point L (mm) Holding point L (mm) Holding point L (mm) Holding point L (mm) Note) Distance to the holding point L of single acting type is shortened end by spring return.

Swivels

For -20 Ports, -24 Body is used.

Air Pilot Operated Series NVSA

28 'Vacuuh to 30o FSIG (20 Kglrcm?).

Serial Network

United States Canada Montreal Phone: (514) 733-9595 Fax: (514) 733-1771 Europe (Contd) Norway Phone: 67-12-90-20 Fax: 67-12-90-21 United States (Contd) Asia China Phone: 010-67881021 Fax: 010-67882335 Europe Austria Phone: 0-2262-62280 Fax: 0-2262-62285 Los Angeles Phone: (714) 669-1701 Fax: (714) 669-1715 Atlanta Phone: (770) 624-1940 Fax: (770) 624-1943 Poland Phone: 022-548-50-85 Fax :

VXA21/22

20 18 21 20 20 22.5 27.5 42.5 47.5 71 80 81 90 21 27 1 4 3 8 4.1-71 Direct Air Operated 3 Port Valve/Manifold Series VVXA31/32 For Air, Gas, Vacuum and Oil Compatible with a wide variety of fluids.

LG1H

10 20 20 20 20 LG1H20 LG1H21 LG1H21 Without coupling 148 Standard motor High rigidity direct acting guide LG1H 10 20 10 20 Horizontal With coupling 158 Non-standard motor 10 20 10 20 With coupling 168 Options Page 178 Construction 179 Mounting 181 Non-standard Motor Mounting 182 Deflection Data 183 Part Number Designations F 2 G X10 1 P A 100 LG1 21 H Frame material Aluminium alloy

HRL

-Am-20 (CH1) HRL100-Am-20 (CH1) 0.6 0.6 60 60 0.5 0.5 50 50 Circulating fluid outlet Circulating fluid outlet 0.4 0.4 40 40 Usable flow rate range Usable flow rate range 0.3 0.3 30 30 0.2 0.2 20 20 Circulating fluid return port 0.1 0.1 10 10 Circulating fluid return port 0 0 0 0 0 10 20 30 40 50 60 70 80 90 100 110 120 0 10 20 30 40 50 60 70 80 90 100 110 120 130 Pump Circulating fluid Pump