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VAC (50/60 Hz) 200 to 230 VAC (50/60 Hz) Regeneration USB cable option Three phase 200 to 230 VAC (50/60 Hz) USB cable Analog monitor output RS-422 communication Electric actuator Supplied by customer Regeneration PLC option Power supply for I/O signal 24VDC Supplied by customer PLC Power supply for I/O signal 24VDC MR Configurator Setup software Electric actuator Battery (included) PC 56

Centering Unit

X114 X115, X116 U B W A H T H Q PB E PA PD P (Unlocking port) PE P (Locking port) P (Relief port) (Option V only) MACM4, MACM6 MACM2, MACM10 PC PC PC PC PE P (Relief port) (Option V only) PD [mm] Dimensions Model A B C D DA DB E F H P PA PB PC PD PE Q S T U W MACM2 X114 68 74 76 10 27.4 12 34 X115 52 6 62 X116 50 4 30 46 60 64 22.5 MACM4 X114 86 90 90 72 78 32.5 50 19 32 20 33 X115 56

Booster Relay Series IL100

0 Exhaust portr Adjusting springe Upper diaphragmw Upper diaphragm chamberq SIG Lower diaphragmy Lower diaphragm chambert OUT IN1 Springo Valvei Pistonu IN2 56 Series IL201/211/220 Construction 2 12 IL211 IL201 1 r r e t e !2 !2 u t u w w i !9 i !9 q q !7 !7 IN OUT IN1 OUT1 !0 !6 !3 o !3 q !8 !6 IN2 OUT2 !8 !7 !6 o IL220 !3 r e !2 w u y i !9 !5 @1 OUT IN1 !1 q @2 @0 IN2 !

Floating Joint

Lightweight and Compact Type Floating Joint RoHS Compact Model Connection thread Shortened dimensions Overall length JT20 M8 x 1.25 12.3 mm 27.2 mm JT32 M10 x 1.25 13.0 mm 33.0 mm Overall length JT40 M14 x 1.5 19 mm 43.0 mm Reduced by19 mm 29 mm New New JT Series Workpiece Cylinder (JCM) JA Series Workpiece Cylinder (CM2) Max. 56% lighter 50 ga22 g (Compared to JA20) Size JA Series New NewJT

Inch size Rotary One-touch Fittings Standard Type KS Series Applicable Tubing: Inch Size

(inch) Connection thread UNF NPT M Min. port size Weight (g) A D1 D2 L2 L1 Model Nylon Urethane KSL03-34S KSL03-32 9 14 17 23 23 29 56 64 8 10-32 UNF 20.5 22 16 2.5 5 32 3.5 10.4 3.5 12 21 1 8 12.7 23.5 21.1 KSL07-34S 14.29 17 1 8 1 4 25.5 22.1 4 8.6 13.2 8.6 1 4 23.5 14 KSL07-35S KSL09-34S KSL09-35S KSL11-35S KSL11-36S 26.5 30 31 37 38 25.5 1 8 25.6 29 18.5 6 15.2 21.6 14.9

Industrial Filters

oil (20 mm2/s) Industrial water Fragrances (1 mm2/s) Nominal filtration accuracy (m) Cotton Polypropylene Paper Micromesh Applicable filter model 0.5 Note 1) 10 Note 1) 1 5 10 20 10 5 FGDCA 110 550 11 21 23 26 22 29 03 FGDEA 110 750 12 27 30 36 28 42 04 FGDTA 110 1000 13 32 36 46 32 57 06 FGDFA FGDCB 200 600 17 25 26 28 26 30 03 FGDEB 200 840 21 35 37 41 38 44 04 FGDTB 210 1200 23 46 50 56

Hydraulic Filters

properly mounted. 500 A Vertical Suction Filter FHIA Series Dimensions Differential pressure indicator 16 B (34) F OUT Removal dimension K H F OUT D E C H Differential pressure indication switch FH FH 62 HOW (65) F IN 4 x I OUT A J G (mm) A B C D E F G H I J K Model Weight (kg) FHIA-04 FHIA-06 FHIA-08 FHIA-10 FHIA-12 FHIA-16 FHIA-20 FHIA-24 FHIA-28 FHIA-32 22.2 90 72 116 154 38 60 11 M8 x 25 56

Refrigerated Air Dryer

IDFB22E, 37EAD48-8-X2110 SF Dimensions Unit: inch [mm] SFD A B C D E F Model L Option symbol 2.3 [59] 2.4 [60] 1.6 [40] 1 [25] 1.8 [46] 4.9 [125] LLB IDFB22E, 37E With heavy duty auto drain (Suitable for moderate air pressure) IDFB55E, 75E 5.7 [145] 2.2 [56] 3.8 [96] 2.4 [60] 2 [50] 1.4 [36] AD IDFB55E, 75E More thorough drain discharge can be achieved by replacing the float type auto drain

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

with lock [kg] 0.4 (Incremental encoder)/0.7 (Absolute encoder) 534 Electric Actuator/High Rigidity Slider Type Ball Screw Drive 11-LEJS Series AC Servo Motor Clean Room Specication Dimensions: Ball Screw Drive 11-LEJS40 LEF Body mounting reference plane Note 2) 5H9 ( ) depth 6 +0.030 0 (160) 110 4 x M6 x 1 depth 10 LEJ 18 M4 x 0.7 depth 8 (F.G. terminal) 84 105 (3.1) LEL Motor cable (6) 56

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

.: 3.2 : 4 : 6 Thread size: M5 L n Formula L1 = 11.5n + 44.5 L2 = 11.5n + 59 n: Stations (Max. 12 stations) Dimensions 12 182.5 197 225 235.5 11 171 185.5 212.5 223 10 159.5 174 200 210.5 9 148 162.5 187.5 198 8 136.5 151 175 185.5 7 125 139.5 162.5 173 6 113.5 128 150 160.5 5 102 116.5 137.5 148 4 90.5 105 125 135.5 3 79 93.5 125 135.5 2 67.5 82 112.5 123 1 56 70.5 100 110.5 L1 L2 L3 L4

Silencer Metal Case Type Series 25

m3/min (ANR)) 2.2 or less 3.0 or less 4.0 or less 8.0 or less 10.0 or less 1.5 or less 1.5 or less Model Port size R Effective area (mm2) Weight (g) 0.2 Inlet pressure (MPa) Noise level (dB (A)) 1 4 2504-002 33.9 111 62 30 24 106 64 30 24 113 68 30 24 0.1 2505-003 45.9 3 8 2506-004 50.0 1 2 310 88.5 48 35 2507-006 105.6 3 4 514 97.5 60 41 2508-010 129.6 1 57 54 22 19 2510-002 17.2 1 4 55 56

Series AK1000

to 60 psig (0.014 to 0.4 MPa) AK9210 2 to 100 psig (0.014 to 0.7 MPa) Operating Parameters Delivery pressure Gas Source pressure Proof pressure (Inlet) Burst pressure Ambient and operating temperature Cv Leak rate Connections Supply pressure effect Installation Internal volume Wetted Parts Material S 316 SS 316 SS 316 SS Hastelloy C-22 PFA Wetted Parts Body Nozzle Poppet Diaphragm Seat 56

Micro-Mist Separator with Prefilter Series AMH

Bracket (Option) Optional Specifications J: With drain guide u I T: With element service indicator T Maintenance , Drain space Dimensions with mounting bracket E~ment service indicator B E F G H I J Model Port size A C D K L M N 0 P Q R S T U 5 9 5.5 35 54 70 26 4.5 1.6 24 37 AMH150 1/8, 1/4, 3/8 159 20 63 20 76 20 76 20 90 20 90 20 106 20 106 20 122 20 160 10 166 56 15 10 187 66 20 10 187

MR Unit (Regulator with Mist Separator) AMR3000 to 6000 Series

ITVH N Bracket dimensions With auto drain Model Port size A M L K J H G F E D C B L 178 211 277 321 B 260 298 366 436 T 9 9 11 11 S 8 16 21 26 R 78 97 98 115 P 50 35 45 46.5 U (Body) V (Adapter) 1 4, 3 8 1 4, 3 8 AMR3000 AMR4000 AMR5000 AMR6000 144 166 188 230 182 215 281 325 21.5 18 16 18.5 37 37 42 42 3.2 3.2 4.5 4.5 32 40 48 56 28 37 37 44 51 61 66 81 101 121 131 161 10 10 45 70 260 302

Manifold Regulator ARM1000/2000 Series

recommended, depending on the situation. 752 Manifold Regulator ARM1000/2000 Series Dimensions 14.5 (With pressure gauge) (Mounting hole) ARJ AR425 to 935 ARX (With pressure gauge) Pressure gauge (Option) AMR ARM ARM Pressure gauge (Option) ARP IR-A IN (Common IN, with plug) IR IRV VEX SRH (Pitch) IN (Individual IN) IN (Common IN) SRP SRF Symbol Model Dimensions ITV C 34 43 D 21 28 E 18 27 F 56

Manifold Regulator Modular Type ARM2500/3000 Series

B C D E F G H I J K L M N O P Symbol Model A ITVH ARM2500 ARM3000 6 17 44 56 42 126.5 58 45 17 21 38 42 29 48 68 33.5 ITVX 7 21 54 68 55 153.5 70 53 23.5 27.5 48.5 55 35 59 85.5 42.5 PVQ Manifold stations Dimensions by the Number of Stations 10 Model Symbol VY1 9 8 7 6 5 4 3 2 L1 454 412 370 328 286 244 202 160 118 VBA VBAT ARM2500 L2 442 400 358 316 274 232 190 148 106 L3 420 378 336 294

With Factory Installed

(-R) specification Bracket mounting dimensions With auto drain Model Port size A B C 0 E F G I H J K L M N P Q S Float type N.O N.C B B AW3001 1/4 . 3/8 53 2 11 92.5 55 38.5 41 40 46 6.5 8.0 53 2.3 42.5 56 4 32.5 236.5 247 10 AW4001 1/43/8 V2 70 262.5 112 70 38 50 54 54 8.5 10.5 70 2.3 52.5 73 1 36 288 298.5 SMC'S GLOBAL MANUFACTURING DISTRIBUTION, AND SERVICE NETWORKe EUROPE -ASIA -NORTH

Atex: 56- (ATEX category 3 - II 3GD), Body Size: 5 (1/2 Standard), Body Material: 1 (ADC12, Aluminium), Diaphragm Material: 1 [PTFE (Fluororesin)], Switching Type: 3 (Air Operated), Thread: Rc, Port Size: 04 [1/2 (15A)]

Stainless steel specification for use in corrosive environments, Available with PT or NPT ports, One-touch fittings, Meter-in and meter-out types easily determined by the flow direction symbol on the resin body, Threads with and without sealant are available as standard, SPEED CONTROLLER, ONE TOUCH, FLOW CONTROL, 56 lb

Stainless steel specification for use in corrosive environments, Available with PT or NPT ports, One-touch fittings, Meter-in and meter-out types easily determined by the flow direction symbol on the resin body, Threads with and without sealant are available as standard, Speed Controller, FLOW CONTROL, 56 lb