ZX

(For replacement) How to order (1) Valve unit (Supply valve: Air operated) (For replacement) How to Order Unit for Replacement (1) Valve unit (2) Adsorption confirmation switch unit 15 C 0X B ZSP1 D K1 B V ZX1 5 Z B D S L Applicable nozzle diameter Vacuum pump for system Single (PD port is equipped with plug.)

MY1

guide type) 63 50 Mounting position A 335.5 290.5 B 138.5 123.5 Operating range l Note) 11 11 A B 100 Solid State Switches D-F9/3 Wire, 2 Wire (Direct Mount) Series MY1 D-F9N (V), D-F9P (V), D-F9B (V) Applicable cylinder series 16 10 20 25 32 40 50 63 80 100 Bore size (mm) MY1B (Basic) G G G MY1M (Slide bearing) G G MY1C (Cam follower guide) G G MY1H (High precision guide) G G G Auto switch

7.4

V Rc1/8 V V 2 V 1(P), 3(R) 4 V Piping specifications 1/8" V 5/32" V Port size M3 V M5 V V 2 V V V Note 1) V 4(A), 2(B) 3.2 V V Note 1) 4 V V V Note 1) V 1/8" V V V 5/32" V V V Type of wiring C Kit: Connector C Kit: Connector S Kit: Serial transmission (EX510) C Kit: Connector Connector kit Connector kit Direct EXH outlet with built-in silencer V Page 755 Blanking plate assembly V V V Page

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Parts (b) Lever Description Note C4: A, B port One-touch fitting for 4 C6: A, B port One-touch fitting for 6 No.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

(Inch) 1 /4 3/8 1/8 5/32 1/4 5/16 M5 Pressure Specifications VP4 V V V VQZ1000 V VQZ2000, 3000 Series A, B port 2 position single 2 position double 3 position V V V VQZ2000 Metal seal only VQZ3000, 3 position 0.15 to 0.7MPa 0.1 to 0.7MPa V V V V VQZ3000 External pilot pressure range VQ Note) Millimeter sizes of One-touch fittings (Cl) are also available.

Brake mechanism added

V V V V V V Clevis pin V Single knuckle joint V V V V V V V Double knuckle joint (with pin) V V V V V V V Option With rod boot V V V V V V V * Refer to page 690 for dimensions and part numbers of the option.

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

, PLC 100 V, 200 V Yes Yes 12 V PLC Terminal conduit 2-wire 24 V 100 V, 200 V DIN terminal Grommet Relay, PLC Diagnostic indication (2-color indication) 3-wire (NPN) IC circuit 24 V 5 V, 12 V 3-wire (PNP) Grommet 100 V, 200 V 12 V 5 V, 12 V 12 V 2-wire IC circuit 3-wire (NPN) Terminal conduit 2-wire Relay, PLC 3-wire (NPN) 3-wire (PNP) IC circuit Diagnostic indication (2-color

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

NPN) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) Reed switch Solid state switch A96V A96 5 V IC Yes Yes Grommet A93 M9N M9P M9B F9NW F9PW F9BW F9BA A93V M9NV M9PV M9BV F9NWV F9PWV F9BWV 100 V 24 V 12 V Relay, PLC 5 V, 12 V IC 12 V 5 V, 12 V IC Relay, PLC 24 V Grommet 12 V Diagnostic indication (2-color) 5 V, 12 V IC 12 V 2-wire

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

NPN) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) Reed switch Solid state switch A96V A96 5 V IC Yes Yes Grommet A93 M9N M9P M9B F9NW F9PW F9BW F9BA A93V M9NV M9PV M9BV F9NWV F9PWV F9BWV 100 V 24 V 12 V Relay, PLC 5 V, 12 V IC 12 V 5 V, 12 V IC Relay, PLC 24 V Grommet 12 V Diagnostic indication (2-color) 5 V, 12 V IC 12 V 2-wire

CL

V IC circuit 5 V, 12 V 40 to 160 40 to 100 Grommet 100 V, 200 V 2-wire 12 V IC circuit 3-wire (NPN) Terminal conduit 5 V, 12 V 40 to 100 40 to 160 Relay, PLC 12 V 2-wire 3-wire (NPN) 5 V 12 V IC circuit Diagnostic indication (2-color indication) 24 V 3-wire (PNP) 40 to 100 12 V Grommet 2-wire Water resistant (2-color indication) 40 to 160 With diagnostic output (2-color indication

2–4

size (mm) Solid state switch D-P5DW A B HS (mm) D-P5DW Auto switch model 40, 50 A B Hs 9 7 4.5 7.5 44 50 Symbol Bore size (mm) 40 50 8 Series CQM Auto Switches/Proper Mounting Positions and Height for Stroke End Detection HS Reed switch D-A9 V Solid state switch D-F9 V D-F9 WV A B 12 HS A B 16, 20, 25 HS A B 32, 40, 50 (mm) D-F9 V, D-F9 WV D-A9 V Auto switch model Symbol A B Hs A B Hs 12

Series CE1

A76H 5V A96 A96V IC V V A72H A73H A72 A73 200V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V Grommet Yes Reed switch Solid state switch V 100V 12V A93 A90 A93V A90V Relay PLC 2 wire A80H A80 A73C A80C A79W F7NV IC No Yes No Yes 5V,12V 100V 24V 24V 12V V V V V Connector IC 5V,12V Diagnostic indication (2 color) Grommet F79 IC 5V,12V 3 wire (NPN) 3 wire

Table of Contents

button Body O-ring Seal Stud Port B Port B Port B Port B Seal Guide Chuck Guide Chuck Collet Collet Port A Release button Port A 15-3-6 2 FR One-touch Fittings Manifold Series KRM Dimensions: KRM11 2-FB Applicable tubing O.D.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Z76 5 V IC circuit Yes Grommet Z73 12 V 100 V Relay PLC 24 V 2-wire No 5 V, 12 V Z80 100 V or less IC circuit Y69A Y59A 3-wire (NPN) IC circuit 5 V, 12 V Y7PV Y7P 3-wire (PNP) Y69B 2-wire Y59B 12 V Relay PLC Grommet Yes 24 V Y7NWV 3-wire (NPN) Y7NW IC circuit 5 V, 12 V Diagnostic indication (2-color indication) Y7PWV 3-wire (PNP) Y7PW Y7BWV Y7BW 2-wire 12 V Improved water resistance

Soft Start-up Valve

+ 02 1/4 V 03 3/8 V 04 1/2 V 06 3/4 V 10 1 V + e Port size 1(P), 2(A) a Mounting Nil Without mounting option V V V V B With bracket V V V V + Option b Pressure gauge Nil Without pressure gauge V V V V G Round type pressure gauge (with limit indicator) V V V V + r c Silencer Nil Without silencer V V V V S Silencer (Built-in) V V V V + 1 100 VAC V V V V 2 200 VAC V V V V 3 110 VAC [115

MLGP

9 i @5 o Section B-B' Section B-B' @5 !8@6!7 @5@6!7 !

MLGP

5 @8 B' @9 @0 A' A A' A B !6 !3 #0 40 to 63: Over 100 stroke !6 50 to 100 80, 100: Over 200 stroke Extension locking (Type F) Retraction locking (Type B) !9 @7 #9 #5 i o @5 #5 #9 @7 !9 i @5 o Section B-B' Section B-B' @5 !8@6!7 @5@6!7 !

MY1

Auto Switch Proper Mounting Position for Stroke End Detection MY1CW 16, 20 MY1MW 16, 20 B A Reed switch D-A90(V), D-A93(V), D-A96(V) Solid state switch D-F9N(V), D-F9P(V), D-F9B(V) D-F9NW(V), D-F9PW(V), D-F9BW(V) Mounting position 16 20 20 16 20 Mounting position Mounting position 16 A 70 90 93 73 94 A A 74 B 90 110 107 87 106 B B 86 Operating range Note) 11 7.5 6.5 8.5 6.5 Operating range

CM2

24 V 100 V, 200 V DIN terminal Relay, PLC Diagnostic indication (2-color indication) B59W Grommet H7A1 H7A2 H7B H7C G39A K39A H7NW H7PW H7BW 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector 3-wire (NPN) 2-wire IC circuit 5 V, 12 V Terminal conduit 12 V Relay, PLC 24 V 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Diagnostic indication (2-color indication

Compact Hydraulic Cylinder

BQ-1 BQ-2 BQ2-012 Weight (g) 1.5 1.5 5 259 CHQB/CHQWB Series How to Mount and Move the Auto Switch Solid state D-M9N(V), D-M9P(V), D-M9B(V) D-M9NW(V), D-M9PW(V), D-M9BW(V) D-M9NA(V), D-M9PA(V), D-M9BA(V) Reed D-A90(V), A93(V), A96(V) 20 1.