,

connector 15.5 (12-, 14 port) 9 (2-, 4 port) 74.5 66.5 8.5 PE port 23 13.5 SMC 16 16 M5-2 ports 12, 14 port 1/8-2 ports 2, 4 port 1/8 1 port 1/8-2 ports 3, 5 port EVS1-02-FG-D-M0 EVS1-02-F G-D-M0 H J I 136 149 68 21.5 (14 port) 68 21.5 (12 port) 21.5 (14 port) 21.5 (12 port) 8.5 (4 port) 8.5 (2 port) 8.5 (4 port) 8.5 (2 port) 14 4 2 12 14 4 2 12 12 12 25 34 34 18 18 25 14 14 Indicator light

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

(Example) SS3YJ7-20-03 . 1 set (manifold base) SYJ712-5LZ-01 . 2 sets (valve) SYJ700-10-1A . 1 set (blanking plate assembly) SS3YJ7-42R-03-01 . 1 set (manifold base) SYJ714R-5G . 2 sets (valve) SYJ700-10-2A . 1 set (blanking plate assembly) The asterisk denotes the symbol for assembly.

LX Series Compact Electric Actuators

91) connection examples 3 wire NPN/AND connection 3 wire NPN/OR connection 2 wire 2 pcs-/AND conneclion 2 wire 2 pcsJOR conneclion o o When 2 swilches are connecied by ANO, load vollage willdecrease at ON and these connections may cause malfunction of load. Indication lights up when bolh swilches are ON.

CYV

6 $2 #2 !3 #3 !7 !2 @5 @4 r @3 e @6 @1 @2 #1 t y $1 u w q E' Section E-E' CYV32 t !9 $0 @1 @2 y @4 @3 u @6 #9 @5 Description Material Note Parts list Description Material Note No. No.

ZSE30/ISE30

supply voltage of 24V Minimum load impedance: 50 Voltage output Analog output Note 3) Current output Hysteresis mode Hysteresis Variable Window comparator mode 3 1/2-digit, 7-segment indicator, 2-color display (red and green) Sampling cycle: 5 times/s 2% F.S. 2 digits (25C) 2% F.S. 1 digit (25C) Lights up when output is ON (Green) 2% F.S. or less (based on 25C) IP40 Operating: 0 to 50C;

212

Applicable model LVR20 LVR40 LVR50 03 3 x 2 LVR20 LVR40 LVR50 03 1/8" x 0.086" 04 4 x 3 05 3/16" x 1/8" 06 6 x 4 07 1/4" x 5/32" 10 10 x 8 11 3/8" x 1/4" 12 12 x 10 13 1/2" x 3/8" 19 19 x 16 19 3/4" x 5/8" LQ3 Metric size Inch size Symbol Applicable tubing size Applicable model Symbol Applicable tubing O.D.

Plate Cylinder with Lock Series MLU

Switch 1 Relay contact Blue Brown Brown Brown Relay Black Blue Black Black Switch 2 Switch 2 Switch 2 Blue Blue The indicator lights will light up when both switches are turned ON. 2-wire with 2 switch AND connection 2-wire with 2 switch OR connection (Reed switch) Because there is no current leakage, the load voltage will not increase when turned OFF.

VQ4000

SY SYJ 0 VQ4 0 1 Plug-in SX 2 5 VQ4 1 Plug lead VK VZ Enclosure Configuration Dust-proof 2 position single 3 position closed center VF (A) 4 (B) 2 (A) 4 (B) 2 Dust tight, jet proof (Applicable to IP 65) W 3 1 VFR 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Manual override 2 position double 3 position exhaust center (A) 4 (B) 2 (A) 4 (B) 2 VP7 Metal Rubber B: Locking slotted style : Non-locking

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Note 3) Includes one O-ring and 2 mounting screws. [ ]: Pressure gauge cover only. Note 4) Lead wire with connector (2 m), adapter, lock pin, O-ring (1 pc.), and mounting screws (2 pcs.) are included. [ ]: Switch body only.

AMPSeries

Flow direction Right Down With element service indicator AMP220 Rc NPT AMP320 AMP420 G 2 Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With bracket

MLU

2 No. !5 !6 !7 !8 !

FQ1

Model symbol (In-line filters) Element size 125mm 65 x 250mm Bore size 04 06 Rc 1/2 Rc 3/4 2.

SMC CORPORATION OF JAPAN

Introduction. 1-1 1.1 Outline .1-1 1.1.1 List of Models Compatible with the SMC VLS software . 1-1 1.1.2 Product Configuration. 1-1 1.1.3 Major Features of the ECC-PNAL-PCS/WIN-E Software. 1-1 1.2 Definitions.1-2 1.3 Abbreviations.1-2 2. Installation . 2-1 2.1 Operating System Requirements.2-1 2.2 Installation.2-1 2.3 Uninstallation .2-1 2.4 System Configuration .2-2 3.

IIIIIIIIII

F-4300-2 F-4300-5 F-4300-15 F-4300-30 F-4300-60 F-4300-100 .2 .5 .5 .5 .5 1 2 5 15 30 60 100 30 30 45 60 120 120 .1 .2 .4 .6 1.5 2.0 .2 .35 .6 1.0 2.5 3.5 3A 4A 4A 4A 4A 4A Wetted materials For special deadband or current requirements, contact factory See Appendix A F-4300BARBED FITTING SPECIAL OPTIONS RANGE (PSI) MOUNTING STYLE B80 = NYLON 1/16" ID B85 = NYLON 1/8" ID P80 = POLYSULFONE 1

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

01MS-X3 G49-2-02MS-X3 Round type Note 2) 0.2 MPa G49-7-01MS-X3 G49-7-02MS-X3 0.7 MPa Note 1) Assembly includes a bracket and set nuts.

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

01MS-X3 G49-2-02MS-X3 Round type Note 2) 0.2 MPa G49-7-01MS-X3 G49-7-02MS-X3 0.7 MPa Note 1) Assembly includes a bracket and set nuts.

SYJ300-OMU0003

01 D DIN Assy V115-D V115-Y AC200V 200V SY100-61-2-02 AC110V 110V SY100-61-2-03 V111(G,H,L,M,W)V115-Y(DIN) AC220V 220V SY100-61-2-04 Y DIN SY100-82-1 DC24V 24VN SY100-82-3-05 DC12V 12VN SY100-82-3-06 AC100V 100VN SY100-82-2-01 () AC200V 200VN SY100-82-2-02 AC110V(AC115V) 110VN SY100-82-2-03 AC220V(AC230V) 220VN SY100-82-2-04 AC DC LED R NL R: 12 No.SYJ300-OMU0003 SYJ Series

Low Profile

Low Profile 2/3-Port Solenoid Valve RoHS Compact Overall length Valve width Actual size Valve height 2-port 3-port 3-port valve 2-port 3-port Overall length 38 mm/54 mm Approx. 10 mm Valve width/ height 2-port 3-port 10 g/20 g Weight 2-port valve Normally closed Large flow rate 2-port/N.C. 3-port 2-port valve Universal C [dm3/(sbar)] 0.25 0.5 Flow rate [L/min (ANR)] 45*1 90*1 *1 At 0.2 MPa

AR20-B to AR60-B

Example 1) When the pressure in the rear and the front of the cylinder differs: Example 2) When the air supply is cut off and releasing the inlet pressure to the atmosphere, the residual pressure release of the outlet side can be ensured for a safety purpose. 12 1 1 2 2 1 2 1 3 1 2 1 L 14 2 4 12 10 5 1 3 How to Order Refer to page 63 for size 10.

Stainless Steel Heat

Note 2) Refer to page 7 for further information of options.