Body Size: 20, Pipe Thread: G, Port Size: 1/4, Mounting: w/Bracket, Nominal Filtration Rating: 5µ, Water Removal Type: Water Drop Removal Type, Semi-standard: Nylon Bowl

Body Size: 20, Pipe Thread: Rc, Port Size: 1/8, Mounting: w/o Mounting Option, Nominal Filtration Rating: 5µ, Water Removal Type: Water Drop Removal Type, Semi-standard: Nylon Bowl

Body Size: 20, Pipe Thread: Rc, Port Size: 02 (1/4), Mounting: B (w/Bracket), Nominal Filtration Rating: 5 (5µ), Water Removal Type: S (Water Drop Removal Type), Semi-standard: 6 (Nylon Bowl)

Body Size: 20, Pipe Thread: Rc, Port Size: 02 (1/4), Mounting: w/o Mounting Option, Nominal Filtration Rating: 80 (80µ), Water Removal Type: S (Water Drop Removal Type), Semi-standard: 6 (Nylon Bowl)

Body Size: 20, Pipe Thread: Rc, Port Size: 01 (1/8), Mounting: B (w/Bracket), Nominal Filtration Rating: 5 (5µ), Water Removal Type: S (Water Drop Removal Type), Semi-standard: 6 (Nylon Bowl)

Body Size: 20, Pipe Thread: Rc, Port Size: 02 (1/4), Mounting: w/o Mounting Option, Nominal Filtration Rating: 5 (5µ), Water Removal Type: S (Water Drop Removal Type), Semi-standard: 6 (Nylon Bowl)

Body Size: 20, Pipe Thread: F (G), Port Size: 02 (1/4), Mounting: w/o Mounting Option, Nominal Filtration Rating: 80 (80µ), Water Removal Type: S (Water Drop Removal Type), Semi-standard: 6 (Nylon Bowl)

Body Size: 20, Pipe Thread: F (G), Port Size: 02 (1/4), Mounting: B (w/Bracket), Nominal Filtration Rating: 5 (5µ), Water Removal Type: S (Water Drop Removal Type), Semi-standard: 6 (Nylon Bowl)

Body Size: 20, Pipe Thread: Rc, Port Size: 01 (1/8), Mounting: w/o Mounting Option, Nominal Filtration Rating: 5 (5µ), Water Removal Type: S (Water Drop Removal Type), Semi-standard: 6 (Nylon Bowl)

Body Size: 20, Pipe Thread: F (G), Port Size: 02 (1/4), Mounting: B (w/Bracket), Nominal Filtration Rating: 5 (5µ), Water Removal Type: S (Water Drop Removal Type), Semi-standard: R (Flow Direction: Right to Left)

1

Vacuum L = Effective area H = Fixed hysteresis (2% F .S.)

Auto Switch Guide

Applicable bore size (mm) Cylinder series 32 40 50 63 80 100 MDB1 BMP1-032 8-30-64

Auto Switch Guide

Applicable bore size (mm) Cylinder series 32 40 50 63 80 100 MDB1 BMP1-032 8-30-64

Auto Switch Guide

Applicable bore size (mm) Cylinder series 32 40 50 63 80 100 MDB1 BMP1-032 8-30-64

VCA

size (S) PB Port size G1/2 Compatible heavy-duty cord Cable O.D. 6 to 12 L L K 2-M Thread depth 6 K 2-M Thread depth 6 (mm) Electrical entry P Port size B Model A C D E F K L M Grommet: G Conduit: C DIN terminal: D Conduit terminal: T S 68 71 74 74 U 81 91.5 101 103.5 S 51 54 57 57 Q 98 101 104 104 R 36 44 53 55.5 R 40 48 56 58.5 Q 46 50 52 52 R 36 44 53 55.5 Q 63 66 69 69 R 35 42 51 53.5

Auto Switch Guide Reed Switches/Solid State Switches For Rotary Actuators (Air Grippers) 1

1 Auto Switch Guide Reed Switches/Solid State Switches For Rotary Actuators (Air Grippers) Applicable Auto Switch Auto switch mounting Applicable air grippers Applicable rotary actuators Auto switch model Electrical entry Page Type CRB2 Size Size CRBU2 30 50-100 10/15 20-40 10-40 32/40 1/3 7/20 10-200 05/1 10-25 10-25 10-25 10-40 10-30 16-25 32-125 10-25 32-63 20-50 CDRA1 CDRB2 CDRBU2 CDRQ2MRQ

VXZ

Fluid Table (1) Rated Voltage-Electrical Entry-Electrical Option Standard specifications Option (1) Made to Order (2) Water (standard) Turbine oil High temperature water (D, E) Air X500B Vacuum (up to 1.3 x 10 2 Pa) X500B For pure water X500 G C Class B D, T Class H G, C T S Note) S L, Z L, Z S Note) Surge voltage suppressor is attached in the middle of lead wire.

Smooth Cylinder Series CQSY

Smooth Cylinder Minimum 0.01 to 0.03 MPa operating pressure Minimum Minimum 0.01 to 0.03 MPa operating pressure 0.04 Minimum operating pressure MPa 12 16 0.03 20 25 32 40 0.02 50 63 80 100 0.01 0 0 10 20 30 40 60 50 70 80 90 100 Bore size mm (Measurement based on JIS B8377) Series CQSY/CQ2Y/CM2Y/CG1Y/CA2Y 12 to 25 32 to 100 20 to 40 20 to 100 40 to 100 Stable operation possible even at a

PF2D

1 q t i 16-11-40 5 Series PF2D Digital Flow Switch For Deionized Water and Chemicals Dimensions: Separate Type Sensor Unit PF2D504-11/520-13 Internal circuit and wiring example 60 70 176 z to , are terminal numbers.

Series VCL

Valve model Port size VCL2 VCW20-12-01 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCL3 VCW30-12-04 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW30-12-04 VCL4 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 3 Series VCL Direct Operated