ARM10/11

AL SMC SMC SMC SMC SMC SMC 0.1 0.3 0.2 0.4 0.5 0.6 IS1000 MPa SMC SMC SMC K K K P P P C C C U U U O O O SMC SMC SMC SMC S S S L L L H H H MADE IN JAPAN K K K P P P C C C U U U O O O S S S L L L H H H Mixed manifold Mixed manifold Front handle/Bottom ported Front handle/Top ported Common exhaust type and individual exhaust type can be mounted on the same manifold base.

MGC

x 1.25 depth 14 32 40 75 22 16 18 107 8.6 140 50 34.5 160 14 depth 10 M10 x 1.5 depth 18 37 M8 x 1.25 depth 16 45 110 22 19 23 142 10.5 170 80 37 194 17 depth 12 M12 x 1.75 depth 21 42 M10 x 1.5 depth 20 Bore size (mm) W Z Y X WH W V U T S R Q O N M L K J I P 20 25 32 40 50 30 140 80 30 23 36 40 86 12 26 12 21 M6 x 1 25 38 80 60 44 25 M5 x 0.8 30 153 80 37 25 44 47 98 13 31 12 21 M6 x 1

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

(S)A 8 13.2 23.9 33.2 (33.3) 14.2 18 (19) AS22l1FG-02-10(S)A 10 15.9 26.9 36.2 (36.3) 15.6 19 (20) AS32l1FG-02-06(S)A 6 1/4 17 (17.5) 13 13.3 40 (40) AS32l1FG-02-08(S)A 8 13.2 22.7 33 14.2 41 (41) AS32l1FG-02-10(S)A 10 15.9 26.7 37 35.7 15.6 42 (42) AS32l1FG-02-12(S)A 12 18.5 29.7 40 34.5 17 43 (43) AS32l1FG-03-06(S)A 6 10.4 21.8 32.1 36.4 50 48.4 44.5 42.9 1/4 19 16.6 13.3 29 (30) AS32l1FG

25

150 100 50 0 50 100 150 150 100 50 0 50 100 150 250 200 150 100 50 0 50 100 150 200 250 0 0 50 50 100 100 0.5 s 0.5 s 150 150 1 s 1 s 200 200 2 s 250 250 2 s 5 s 5 s 300 300 421 IZS40/41/42 Series Note) Static neutralization features are based on the data using the charged plate (size: 150 mm x 150 mm, capacitance: 20 pF) as defined in the U.S.

Series VQ Base Mounted Metal Seal/Rubber Seal

4.5mm2) Cylinder stroke 300mm Series CM2 Pressure 0.5MPa Load factor 50% Piping length 5m Speed controller: AS2000F-06 (S=4.5mm2) Cylinder stroke 100mm Series CJ2 Pressure 0.5MPa Load factor 25% Piping length 2m Speed controller: Fitting (One-touch fitting) Effective area (mm2) (Cv factor) Cylinder speed (mm/s) Model AS2000F-06 (S=4.5mm2) Cylinder stroke 50mm 10 6 16 20 25 32 40 40 50 63

MXH

Selection conditions Mounting: Horizontal Max. speed: 500 mm/s Load eccentricity: 50 mm Overhang: 30 mm Load weight: 0.1 kg Max. speed: 500 mm/s Overhang: 40 mm Load weight: 0.1 kg Refer to Graph (3) based on vertical mounting and a speed of 500 mm/s. In Graph (3), find the intersection of a 40 mm overhang and load weight of 0.1 kg, which results in a determination of 20.

MXH Series Compact Slide

2 Maximum speed 300(mm/s) or less 10 1 20 16 0.1 10 6 0.01 20 40 60 80 100 0 Overhang L(mm) 1 kg = 2.2046 lb 28 Compact Slide MXH Series Model Selection Method Selection Graphs 4 to 12 (Horizontal Mounting) Maximum speed 100mm/s or less Maximum speed 300mm/s or less Maximum speed 500mm/s or less Graph 4 Load eccentricity 50mm Graph 7 Load eccentricity 50mm Graph 10 Load eccentricity 50mm

VM

Note 3) The handle of the selector (2 position) cannot be removed or replaced alone. 5-6-41 40 Series VZM500 How to Order S 01 01 0 VZM55 Option Suffix for actuator F Foot bracket Actuator type R S G B Red Hard steel roller Port size Basic 00 Color of push button selector Rc 01 1 8 Roller lever 01 Black 1 8 NPT N01 One way roller lever 02 Green G F01 1 8 Straight plunger 05 Y Yellow Roller

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

400 300 300 6.8 25 102 3.2 131 400 300 34 30 37 107 30 9 14 133 142 8 10 32 32 52 36 108 116 118 40 4 40 55 20 8 21 7 4 60 75 9 10 19 450 300 300 6.8 28 102 3.2 135 450 300 40 37 41 111 30 9 14 137 146 9 10 40 40 60 40 112 120 122 47 4 40 55 20 8 25 7 4 60 75 9 10 19 450 300 300 6.8 28 104 3.2 137 450 300 40 37 41 113 30 9 14 139 148 9 10 40 40 60 40 114 122 124 47 4 40 55 20 8 25 7 4

OMR0032

3) = 2000 [pulses/s] Acceleration time: 60 1500 = 40 [ms] Deceleration time: 60 1000 = 60 [ms] 61 - Step Data setting example Thrust Load mass setting No.

Air Cylinder Series MB

E1 L1 R1 E1 L1 MM NDH10 NX U1 NDH10 NZ A A1 R1 U1 MM NX 32 40 50, 63 80 100 125 32 40 50, 63 80 100 125 20 22 28 40 40 46 30 40 50 65 65 I-03M I-04M I-05M I-08M I-10M I-12M Y-03M Y-04M Y-05M Y-08M Y-10M Y-12M +0.058 0 +0.058 0 +0.070 0 +0.084 0 +0.084 0 +0.084 0 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 0.10 0.30

VXP21/22/23

) Oil (Standard) (D, E) High temperature oil (3) (S) (D) 99 100 183 AC DC AC DC 60 40 80 60 60 40 40 60 Maximum Minimum 1 10 5 (2) 10 (1) Note 1) Dew point: 10C or less Note 2) 50 cSt or less Note 3) D, E etc. in parentheses are option symbols.

Dual Rod Cylinder/High Speed Specification Type Series CXS-XB19

Standard stroke (mm) 10, 20, 30, 40, 50 10, 15, 20, 25, 30, 35, 40, 45, 50, 60, 70, 75 Bore size (mm) Nil S 6 10 10, 15, 20, 25, 30, 35, 40, 45, 50, 60, 70, 75, 80, 90, 100 15, 20, 25, 32 Auto switch type Nil Without auto switch (built-in magnet) Note) Refer to the table below for auto switch part numbers. Applicable auto switches Load voltage Auto switch part no.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Stations J kit (Flat ribbon cable) G kit (Flat ribbon cable with terminal block) P kit (Flat ribbon cable) F kit (D-sub connector) Cylinder port Kit U S A U S P 26P 20P J U S U S F 15P U S P 16P U S B P 20P U S C P A 10P F 25P G Type Negative common specifications Max. points 24 14 24 18 14 8 16 16 Electrical entry Cable length M kit T kit (Terminal block box) S kit 0 1 2 With cable (0.6

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Stations J kit (Flat ribbon cable) G kit (Flat ribbon cable with terminal block) P kit (Flat ribbon cable) F kit (D-sub connector) Cylinder port Kit U S A U S P 26P 20P J U S U S F 15P U S P 16P U S B P 20P U S C P A 10P F 25P G Type Negative common specifications Max. points 24 14 24 18 14 8 16 16 Electrical entry Cable length M kit T kit (Terminal block box) S kit 0 1 2 With cable (0.6

Vacuum System Peripherals:

/S (8 points output) R2 09 9 Can accommodate up to 16 solenoids.

Round Type Hydraulic Cylinder

27 70 12 8 46 6 8 32 5.5 13 28 25 f8 32 Up to 800 21 M14 x 1.5 24 50 22 38 16 19 7 9 55 33 72 12 8 53 8 9 40 7.5 13 36 31 f8 40 Up to 800 21 M16 x 1.5 24 60 24 41 18 21 9 9 66 36 84 14 11 54 10 11 48 7.5 19 44 34 f8 (mm) Bore size (mm) NB NC NN S ZZ P 20 19 15 M22 x 1.5 1/8 81 138 25 19 15 M24 x 1.5 1/8 81 143 32 19 15 M30 x 1.5 1/8 87 159 40 M33 x 2 24 21 1/4 108 183 321 CHM Series Dimensions

Pulse Valve

MOperation sequence diagram M Operation sequence diagram 4 output points Two-time hitting only for CH2 ON for 1 s OFF for 2 s Stop signal ONt For CH1 OFFt CH2 OFFt CH3 Power supply ON time CH4 2 s 1 s tA tA 1 s CH1 2 s 2 s 2 s 2 s OFFt 1 s 1 s 1 s 1 s CH2 2 s Two-time hitting 1 s CH3 2 s 1 s CH4 Power switch ON (Output start) Power switch OFF (Output stop) Cascade Connection (Multiple-board

Series IDG

40 P1= 0.7MPa P1 = 0.7MPa 50 50 60 60 70 70 0 0 20 40 60 80 100 160 40 80 120 Outlet air flow rate l/min (ANR) Outlet air flow rate l/min (ANR) IDG75L IDG60L 0 0 P1 = 0.3MPa Outlet air atmospheric pressure dew point C Outlet air atmospheric pressure dew point C P1 = 0.3MPa 10 10 20 20 P1 = 0.5MPa P1 = 0.5MPa 30 30 40 40 P1 = 0.7MPa P1 = 0.7MPa 50 50 60 60 70 70 0 0 40 80 120 160 200 100

100

capacity: 1 L) (Tank capacity: 1 L) 100 90 80 70 60 50 40 30 20 10 0 100 90 80 70 60 50 40 30 20 10 0 Vacuum pressure in tank [kPa] Vacuum pressure in tank [kPa] ZL6H ZL6M ZL3H ZL3M Time to reach vacuum [S] 1 2 3 4 5 6 0 Time to reach vacuum [S] 1 2 3 4 5 6 7 8 9 10 0 Break Flow Rate Characteristics (Representative value) Vacuum Breaking Time (Representative value) Break flow rate supplied