mm) Port size Bore size (mm) GA H J JA A B A' C CA CB D E GB 20 25 32 29 32.5 35 19 23 27 16 20 24 12 15 19 26 32 40 42 50 62 20 25 31 22 25 31 9 10 11 27 22.5 25 14 18 22 12 15.5 19.5 8 10 12 M5 x 0.8 M5 x 0.8 Rc 1/8 Bore size (mm) NN T S Z K KA L MM P Q R Standard strokes 20 25 32 M5 x 0.8 with depth 8 M5 x 0.8 with depth 8 M6 x 1.0 with depth 9 9.3 with depth 8 9.3 with depth 9 11 with
(M5) 01T r/ NPTF {A port onl ' Special order Notel) Indicale in parentheses al end of parl # Ex.
<> [F 3] [F 3] 190% 2(273336) -37No.PS-OMU0005CN-C [F 4] <> [F 4] [F 4] (39) -38No.PS-OMU0005CN-C () OUT1 [AP1 REdY] (OUT1[AP1 REdY] 1 AP2 REdY) OUT1 OUT1 OUT1 [AP1 RUn] ([AP1 RUn] 1 [AP2 REdY]) OUT2 P_1 H_1(n_1 H_1),[AP2 REdY] (OUT2[AP2 REdY] 1) OUT2 OUT2OUT1OUT2 [AP2 RUn] ([AP2 RUn] 1) P_2 H_2 (n_2 H_2 ) OUT1 P_1=A-(A-B)/4 n_1=B+(A-B)/4 A= H_1=(A-B)/2 H_1=(A-B)/2
A B A B B A B A B 18 (26) A B 16 (24) A B Hs Hs Hs 21.5 (29.5) 20.5 (28.5) 15 (22.5) 17.5 (25.5) 19.5 (27.5) 20 6 9 3 8 10 6.5 4.5 24.5 27 27.5 21.5 (29.5) 20.5 (28.5) 15 (22.5) 17.5 (25.5) 19.5 (27.5) 18 (26) 16 (24) 25 6 9 3 8 10 6.5 4.5 27 29.5 30 22.5 (30.5) 21.5 (29.5) 15.5 (23.5) 18.5 (26.5) 20.5 (28.5) 19 (27) 17 (25) 32 7 10 4 9 11 7.5 5.5 30.5 33 33.5 25 (34) 24 (33) 20 (27) 21 (
4 3 2 7 5 10 1/8 (6A) 2 1/4 (8A) VCB (for heated water) 2 port solenoid valve 1/4 (8A) 3 3/8 (10A) CAC406 (SUS) FKM (EPDM) 1/2 (15A) 1/4 (8A) 3/8 (10A) 4 1/2 (15A) 3/4 (20A) OUT IN Viewing the graph To generate a water flow of 5l/min at a differential pressure of 0.1MPa, an effective area with Cv factor 0.35 (VCB , 3) or more is required. 3 4 100 VCB 10 Cv = 2.1 3 4 VCB 7 Cv = 1.38 3 4
78.5 103 78.5 70 111.5 35 60 102 3/4 41 17.5 17 36 30 28.2 M5 8 26 96 48 86.5 103 86.5 70 119 17-2-27
A B A B B A B A B 16 (24) A B Hs Hs Hs 21.5 (29.5) 20.5 (28.5) 15 (22.5) 17.5 (25.5) 19.5 (27.5) 20 4.5 8 6 10 9 3 24.5 27 27.5 21.5 (29.5) 20.5 (28.5) 15 (22.5) 17.5 (25.5) 19.5 (27.5) 16 (24) 25 4.5 8 6 10 9 3 27 29.5 30 22.5 (30.5) 21.5 (29.5) 15.5 (23.5) 18.5 (26.5) 20.5 (28.5) 17 (25) 32 5.5 9 7 11 10 4 30.5 33 33.5 25 (34) 24 (33) 20 (27) 21 (30) 23 (32) 19.5 (28.5) 40 10 13.5 35 37.5
A B A B B A B A B 16 (24) A B Hs Hs Hs 21.5 (29.5) 20.5 (28.5) 15 (22.5) 17.5 (25.5) 19.5 (27.5) 20 4.5 8 6 10 9 3 24.5 27 27.5 21.5 (29.5) 20.5 (28.5) 15 (22.5) 17.5 (25.5) 19.5 (27.5) 16 (24) 25 4.5 8 6 10 9 3 27 29.5 30 22.5 (30.5) 21.5 (29.5) 15.5 (23.5) 18.5 (26.5) 20.5 (28.5) 17 (25) 32 5.5 9 7 11 10 4 30.5 33 33.5 25 (34) 24 (33) 20 (27) 21 (30) 23 (32) 19.5 (28.5) 40 10 13.5 35 37.5
When adjusting the pressure on the supply side with a regulator, etc., please take precautions against rising pressure to prevent leakage from the regulator. 3.
PD (vacuum breaking pressure port) Breaking flow adjustment needle M5 port PS (pilot valve supply pressure port) 1 Spacer A PE 2.5 Valve unit Attachment D 1 85 80 PD Rc(PT) 1/8 port PV (vacuum pump connection port) SMC 2-4.2 (mounting hole) PS 51.5 41.5 2 20 32.5 27.5 Filter block D 16.5 16 PV 2 8 13 3 1.5 Adapter G 1 4 Bracket A Bracket A 128.7 100.8 (9.8) 4.5 Rc(PT) 1/8 port V (vacuum
2 position single 2 position double 3 position closed center 3 position exhaust center 3 position pressure center 1 2 3 4 5 1(P) port location Nil 2 position 3 position Thread type (Including pilot port) -X1 Port size (A, B port) Nil Rc G NPT NPTF Note) Indicate suffix symbol -X1 at the end of the part number for 3 position.
(M5) 01T r/ NPTF {A port onl ' Special order Notel) Indicale in parentheses al end of parl # Ex.
Construction: AS1000-M5 Component Parts No. Description Material 1 2 3 4 No.
Can designate 8 types of programs with a total of 3 bits. (a combination of 1.2.4) Pro-No.bit1 BIT 2 Program designation < 1 > 5 Pro-No.bit2 (5) BIT 3 18 Pro-No.bit3 (18) STP-NO BIT 1 6 Stp-No.bit1 (6) BIT 2 19 Stp-No.bit2 (19) BIT 3 7 The terminal which designates the step to be executed. Used when executing steps (position movement). (a combination of 1. 2. 4. 8. 16. 32. 64.)
size Port 1(P), Port 2(B), Port 4(A): Rc1/8 Port 3(EB), Port 5(EA): M5 x 0.8 XT34-60 (With lock) 192 177 149.3 MOD.
Operating Pressure Particulate Generation Grade Classifications 1.2 104 Average particle concentration Particles/ft3 Max. operating pressure MPa Grade 4 1.0 103 0.8 Grade 3 102 0.6 101 Grade 2 100 0.4 Grade 1 10-1 0.2 0 5 0 20 40 60 1 0.1 0.2 Particle size m or less 0.3 0.5 Operating temperature C 15-17-3 4 Series AS-FPQ/FPG How to Order AS 2 1 1 2 F P Q 01 06 Body size 1 2 3 4 M5 standard
2-P Port size A B 2-P Port size A B M M 2-J, thread depth K 2-J, thread depth K G1/2 Specifications with bracket Orifice 2, 3, 4.5, 6 Orifice 8, 10 7.5 2.3 Bracket Y 29 Mounting hole 2-5.3 Bracket 22 5.5 52 28 W U 67 X (mm) Grommet Conduit DIN terminal Electrical entry Mounting dimensions Bracket mounting Port size P Model Orifice size A B C D E F H Conduit terminal J M4 M5 M5 M5 M5 K M
R 1 04 A Z Common supply type 1 2 3 4 5 6 1.