3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

(A) 2 Port size {2(A) port} 1 1 (P) 3 (R) One-touch fitting for 3.2 One-touch fitting for 4 One-touch fitting for 6 M5 thread (Replaceable type) C3 C4 C6 M5 Note) For the inch-size One-touch fittings, refer to page 4-14-18.

Tie-rod Type Hydraulic Cylinder

MA a CHM A MA a Cushion adjustment screw Air release R (max.)

Power Clamp Cylinder

15) 63 How to Order Right type CKZ63 42 3681N R 47 37 54 78 Arm position/Mounting hole A A 20 Arm position Mounting hole Symbol Center type D1 6 6 6 8 8 8 D2 9 9 9 10.2 10.2 10.2 D3 14 14 14 17.5 17.5 17.5 L 6 6 6 8 8 8 Left type A B C D E F Center Right Left Center Right Left 2 x D1H7 through (9) 300.2 2 x D2 through 300.02 1050.1 144 65 280.1 150.2 22 L D3 Sectional view A-A (1:1) 80 How

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

107 118 137.5 148 3 59 70 100 110.5 L1 L2 L3 L4 2.10-15 VQZ100/200/300 Body Ported VQZ300 VV3QZ32C Station C10: One-touch fittings for 10 C8: One-touch fittings for 8 C6: One-touch fittings for 6 n-C6, C8, C10, 02 (35) 33 (11) 2-4.5Mounting holes DIN rail clamp screw (5.5) Grommet (G) (7.5) 24 (2.5) U side 02: Rc(PT)1/4 n Manual override 5 A A A A 4 2 2 2 2 (L4) (L3) L2 L1 3 2 P=19 1 21 6

VQC

VQ4 VQ5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Connector wiring diagram (mixed wiring) VQZ 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 VQD 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

B A B 2 position single 2 position double PR R PR R 3 5 1 4 2 4 2 5 1 A B A B 7 7 R1 P R2 R1 P R2 6 3 position closed center/exhaust center/pressure center 3 position closed center A B 4 2 5 1 PR2 R A 3 position exhaust center A B B PR R 3 position pressure center A B 7 R1 P R2 PR R (This construction shows closed center type.)

3 Port Solenoid Valve Metal Seal Series VZ200 1

6 Pilot valve assembly !

MU

6 !7 !

7.4

Note 6) The flow rate of the body ported product with a built-in silencer decreases by 30%.

High Power Cylinder:

1-B 1-C 2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B CE2 6 1/8, 1/4 1.5 500 0 1,000 2,000 3,000 ML2B Max. speed Vmax (mm/s) 6 1/4, 3/8 3 1000 Graph 3:25 ML1C 10 1/4, 3/8 20 (1/4) 4.5 1500 20 10 1/4, 3/8 REA Composed effective area So (mm2) Composed effective area

High Power Cylinder Series RHC

1-B 1-C 2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B 6 1/8,1/4 500 1.5 0 1,000 2,000 3,000 6 1/4, 3/8 10 1/4, 3/8 Maximum speed Vmax [mm/s] 1000 3 25 20 1500 4.5 Composite effective area So [mm] Composite effective area So [mm] Composite effective area So [mm]

MU

4.5 (7) 4.5 (7) 5 (10) 6.5 (11.5) 7 (12) A 10 (12.5) 10 (12.5) 10.5 (15.5) 12 (17) 12.5 (17.5) Hs A 5 (7.5) 5 (7.5) 5.5 (10.5) 7 (12) 7.5 (12.5) A 5 (7.5) 5 (7.5) 0 (4) 1 (6) 1.5 (6.5) A 2 (4.5) 2 (4.5) 2.5 (7.5) 4 (9) 4.5 (9.5) A Hs Hs Hs Hs Hs Hs CU 25 32 33 39 35.5 37.5 34.5 CQS 32 39 40 46 42.5 44.5 41.5 CQM 0.5 (5.5) 2 (7) 2.5 (7.5) 40 56.5 47 48 54 50.5 52.5 49.5 CQ2 50 Courtesy

MU

4.5 (7) 4.5 (7) 5 (10) 6.5 (11.5) 7 (12) A 10 (12.5) 10 (12.5) 10.5 (15.5) 12 (17) 12.5 (17.5) Hs A 5 (7.5) 5 (7.5) 5.5 (10.5) 7 (12) 7.5 (12.5) A 5 (7.5) 5 (7.5) 0 (4) 1 (6) 1.5 (6.5) A 2 (4.5) 2 (4.5) 2.5 (7.5) 4 (9) 4.5 (9.5) A Hs Hs Hs Hs Hs Hs CU 25 32 33 39 35.5 37.5 34.5 CQS 32 39 40 46 42.5 44.5 41.5 CQM 0.5 (5.5) 2 (7) 2.5 (7.5) 40 56.5 47 48 54 50.5 52.5 49.5 CQ2 50 66 56 57

MTS

A B Hs A B Hs Hv Hv Hv Hv 12/16/20 12/16/20 Hs Hs 25/32/40 25/32/40 Proper Auto Switch Mounting Position Solid state switch Bore size (mm) 2-color indication solid state switch Reed switch D-A9 D-A9V D-M9 D-M9V D-F9W D-F9WV A B C A B Hs Hv A B A B Hs Hv A B C A B Hs Hv C 15.5 15 20 20 15 19.5 19.5 19.5 19.5 46 46 46 46 18 13 15.5 35.5 42 31.5 42 31.5 12 17 17 22 22 17 21 21 21 21 47.5 47.5

AC Servo Motor Driver (SSCNET Type)

Recommended Parameter Values [LEF] LEFS25 LEFS32 LEFS40 Lead symbol H A B H A B H A B Series Lead 20 12 6 24 16 8 30 20 10 Parameter *1,*2 Para. Initial value Recommended value No.

4-channel Flow Monitor ( compatible)

Incorrect internal data processing of the product (Er0, 4, 6, 8, 40) Check if there is a noise source nearby.

Fluoropolymer Piping Equipment

Body Needle V seal Lock nut Adjustment handle Insert bushing Nut Collar A 1 2 3 4 5 6 7 8 PFA PCTFE PTFE PVDF PVDF PFA PFA PFA Body class 2 y u y u B Dimensions A (B) (max.S) D H Port A 2 x G SMC (J) SMC C E F K Port B E A B C D E F G H J K S Model 48 60 72 LVN20 LVN30 LVN40 24 30 36 12 18 22 88 110 124 34.5 43 52 6 9 11 4 5 6 14 25 25 20 26 33 18 24 30 2.4 7.5 8.0 940 LQ1/LQ3/LVN/LQHB Series

CL

It is also possible to manufacture a bidirectional lock-up cylinder. For details, refer to Made to Order on page 9-6-113. Due to the nature of its construction, a lock-up cylinder has a play of approximately 0.5 mm to 1 mm in the axial direction.

Compact Electric Actuator Series LG1

/ Construction 9 5 bn bn 4 8 1 3 2 bs A A' bl bq br bm bt bo bp bk 7 View A-A' 6 Material Note Parts list Material Note Parts list No.

VCW

Made to Order Specifications Non-leak (10 6 Pam 3/sec), vacuum (0.1 Paabs) specifications VCW X35 A L Oil-free specifications VCW X40 17-2-53 6 Series VCW Construction N.C.