VZA200/400 M5 x 0.8 Body side VZA222-P-M5 M5 x 0.8 0.13 0.35 0.52 0.15 0.43 0.60 N.O. M5 x 0.8 Body side VZA214-1P-01 M5 x 0.8 0.22 0.35 0.85 0.25 0.30 1.0 N.C. Rc 1/8 Sub-plate side VZA214-2P-01 M5 x 0.8 0.22 0.35 0.85 0.25 0.30 1.0 N.C. Rc 1/8 Body side VZA224-1P-01 M5 x 0.8 0.22 0.35 0.85 0.21 0.25 0.90 N.O. Rc 1/8 Sub-plate side VZA224-2P-01 M5 x 0.8 0.22 0.35 0.85 0.21 0.25 0.90 N.O.
A AL B B1 C D E F G H H1 J K KA M MM N P S ZZ 32 Up to 300 22 19.5 42 17 31 10 24 8 9 38 6 M5 x 0.8 5.5 8 8 M10 x 1.25 18 1/8 63 109 40 Up to 300 24 21 48 22 37 14 32 9 9 44 8 M5 x 0.8 8 12 8 M14 x 1.5 18 1/8 62 114 45 Up to 300 24 21 52 22 41 14 32 9 9 44 8 M5 x 0.8 8 12 8 M14 x 1.5 18 1/8 62 114 50 Up to 400 35 32 60 27 45 18 38 10 9 55 11 M6 x 1 7 16 11 M18 x 1.5 18 1/8 63 129 56 Up to
How to Find the Flow Rate (at air temperature of 20C) Choke flow: when (P2 + 0.1)/(P1 + 0.1) 0.5 293 273 + t Q = 120 x S x (P1 + 0.1) x Subsonic flow: when (P2 + 0.1)/(P1 + 0.1) > 0.5 Q = 240 x S x (P1 P2)(P2 + 0.1) x 293 273 + t Q : Air flow rate [l/min (ANR)] S : Effective area (mm) P1: Upstream pressure [MPa] P2: Downstream pressure [MPa] t : Air temperature Note) Formulas above apply
R 36 44 53 55.5 R 40 48 56 58.5 Q 46 50 52 52 R 36 44 53 55.5 Q 63 66 69 69 R 35 42 51 53.5 Q 27 30 32 32 VCA21 VCA31 41 50 60 68 18 24 30 35 64 76 86 91 28 34 40 40 11.5 14 15 17.5 15 17 20 20 20.5 25 30 34 12.8 19 23 23 M4 M5 M5 M5 1/4 1/4, 3/8 3/8, 1/2 3/4 VCA41 17-2-13 8 Series VCA How to Order Manifold (VCA20) How to Order Manifold Assembly VV2C A 2 02 02 Enter the mounting valve and
(inch) Thread UNF NPT UNF, M5, M6 10-32 UNF, M5, M6 Weight (g) H (Hex.)
Output voltage (Rated pressure range) Linearity Output impedance Note 2) Voltage output 1% F .S. Approx. 1 k Analog output 2.4 to 20 mA 2.5% F.S. 4 to 20 mA 2.5% F.S. Output current (Rated pressure range) Linearity Note 3) 1% F .S.
x 0.8 0XY: M6 x 1 Vacuum supply port 0X: M5 x 0.8 0XY: M6 x 1 58 51 50 PV 6.5 10.2 8 10 17.8 11 5.5 2-3.3 Mounting hole Connector type: ZSP10X C Adjusting needle ADJ Pressure sensor Vacuum supply port 20 08 Adsorption nozzle port 7 48.3 Lead wire length 600 (3000) Adsorption nozzle port 0X: M5 x 0.8 0XY: M6 x 1 Vacuum supply port 0X: M5 x 0.8 0XY: M6 x 1 59.5 50 PV 6.5 10.2 8 5.5 17.8 11
Types 10, 20 Types 10, 20 VVDW 0 2 C 1 01 2 VVDW 2 0 4A Series Series 1 2 10 20 1 2 10 20 Thread type VC Rc G NPT Nil F N Material VDW C S C37 SUS Type 30 VQ VVCW20-4A OUT port size Stations Symbol M5 01 Port size M5 1/8 (6A) For 2 stations For 3 stations 1 2 VX2 VX Type 10 is M5 only.
Applicable Model Model AR10 Port size M5 AR 10 X406 M5 A 0.4 MPa setting w q Option/Semi-standard: Select one each for a to f. Option/Semi-standard symbol: When more than one specification is required, indicate in alphabetic order.
ZZ Z Z S S Z S S ZZ ZZ ZZ ZZ Z 20 6 21.5 25 20 158 112 143 183 133 137 87 168 193 6 24.5 32 25 162 112 147 187 137 137 87 172 197 6 27 40 32 164 114 149 189 139 139 89 174 199 164 214 224 8 32.5 40 138 179 168.5 163 113 204 229 188 243.5 254 193.5 218.5 213 268.5 279 6-4-49 50 Series CM2 Clevis Integrated Style (E) CM2E Bore size Stroke S T Spring return S + Stroke Z + Stroke ZZ + Stroke
Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Dimensions GC GC S + (2 x Stroke) ZZ + (2 x Stroke) ZZ + Stroke (A + B) S + Stroke (A + B) Stroke B Stroke A Bore size (mm) GC 29 33 33 41 41 S 169 181 197 233 253 ZZ 231 250 269 321 342 40 50 63 80 100 GC 29 33 33 41
1 100mm2 100mm No.1 50mm/s 1 100mm 2 50mm No.2 Step No. mm/s / 1 2 2 2 mm mm/s mm/s mm mm mm 1 LIN-A 100 100.00 1000 1000 0 0 0.5 2 LIN-A 100.00 0 0 0.5 1 3 4 1 LIN-I 50 100.00 1000 1000 0 0 0.5 2 LIN-I 50.00 0 0 0.5 2 3 4 () 2 50mm 2 25mm/s 50mm/s Step2 Step1 100mm 2 71mm/s 100mm 2 43mm/s 100mm/s 100mm 2 71mm/s (0, 0) 1 65 No.SFOD-OMT0009CN-B () (1)No.1(IN0ON) (
Axis Movement Speed Position Acceleration Deceleration Pushing Area 2 In-position 2) 2) mode (mm/s) (mm) (mm/s (mm/s Selection (mm) (mm) (mm) 1 LIN -A 100 100.00 1000 1000 0 0 0.5 2 LIN -A 100.00 0 0 0.5 1 3 4 1 LIN -I 50 100.00 1000 1000 0 0 0.5 2 LIN -I 50.00 0 0 0.5 2 3 4 () 2 50mm/s 50mm 2 25mm/s Step2 Step1 100mm 2 71mm/s 100mm 1 43mm/s 100mm/s (00) 100mm 1 71mm/s
X B 5 S T D. R O D T H R E A D S T D.
50 to1000mm/s Relief port size Basic, Axial foot, Front flange, Rear flange, Single clevis, Double clevis, Front trunnion, Rear trunnion , Integrated clevis, Boss-cut M5 X 0.8 CA1 Piston speed Mounting 30 to 400mm/s CS1 Basic, Axial foot, Front flange, Rear flange, Boss-cut Mounting Auto switches can be mounted.
Supply pressure (MPa) Flow rate (l/min (ANR)) 13-4-27 8 Series ZMA Dimensions 111 S: Vacuum pressure switch trimmer Pilot valve for vacuum pressure T: Release period adjustment trimmer Pilot valve for vacuum release M5 x 0.8 through (P, E port) Release flow adjustment screw 3-Rc 1/8 SUP.
M5 01 02 03 04 M5 x 0.8 R R R R 1 8 1 4 3 8 1 2 Symbol Specifications -X12 Lubricant: Vaseline -X21 Grease-free (Seal: Fluorine-coated) + Throttle valve (Without check valve) -X214 Throttle valve (Without check valve) Note) M5 size: S (with seal) is not necessary. 611 A AS Series Construction AS1201-M5 AS2201/3201/4201 AS3201-02 o !1 w r u y e t !5 !2 !4 q !0 !3 i Component Parts No.
2 Speed Controller for Clean Room Series AS-FPQ/FPG Construction Meter-out type M5 type Meter-in type M5 type Parts list No.
AXT662-1(1: M5, 2: M3) 1 2 Sub-plate Optional parts Gasket, screw: VQ100-GS-5 Note) 1 set includes: 1 gasket and 2 screws. Purchasing order is available in units of 10 pieces. 4-12-9 10 Series VQ100 How to Order Valves VQ1 1 0 5 L M5 Series VQ Compact 3 port valve Port size Type of actuation Without sub-plate With sub-plate With sub-plate Nil M3 M5 1 N.C. (Normally closed) N.O.