Low torque Metal seal type Rotary joint

Model MQR1-M5 MQR2-M5 MQR4-M5 MQR8-M5 MQR12-M5 Number of circuits 1 2 4 8 12 Operating fluid Air / Inert gas Seal structure Metal seal Guide structure Bearing supported Bearing supported at both ends Port size Male R1/8 Female M5 x 0.8 M5 x 0.8 Flow rate C[dm3/(s.bar)] b Cv characteristics 0.50 0.40 0.17 Lubrication Not required Min. operating pressure -100kPa Max. operating pressure 1.0MPa

EX500-GEN2_eng

Please keep this manual handy for future reference. 4 x M5 : Tightening torque: 1.5 Nm Ethernet communication cable COM A COM B COM C COM D 685 Display Description The power supply for input and control is OFF LED is OFF Operating normally Green LED is ON MS To obtain the operation manual about this product and control unit, please refer to the SMC website (URL http://www.smcworld.com) or

EX500-GPN2_eng

Rated current 6 Branch port C (COM A) 48 52 7 Branch port D (COM D) After maintenance is complete, perform appropriate functional inspections. Stop operation if the equipment does not function properly. Safety cannot be assured in the case of unexpected malfunction.

MHx-OMZ0004

M6x23 : : M3X7 D-M9P-5 JMHZ2-16D M-5ALHU-2 2 KQ2S04-M5N 3 V114-5LU ASN2-M5-X937 3x6 ISO9409-1 M4x25 6x10 M6x10 M8 8 () M6x10 ISO9409-1 6x10 5 - 3-1. JMHZ2-16D-X7400B-ASSISTA(-P) mm 16 MPa 0.1~0.7 (oC) -10~50 (mm) 0.01 (c.p.m.) 120 32.7 (N) 43.5 (mm) 10 (g) 680 D-M9(N/P)-5 ISO9409-1-31.5-4-M5 (www.smcworld.com)JMHZ2 Series P .15 M12 8 6 - 3-2. 2 1 F 7 - 3-3.

Magnet Gripper for Collaborative Robots

Auto switch Auto Switch Specifications D-M9(With indicator light) Auto switch model D-M9N D-M9P Electrical entry direction In-line Wiring 3-wire Output NPN type PNP type Applicable load IC circuit,Relay,PLC Power supply voltage DC51224V(4.5 to 28V) Current consumption 10 mA or less Load voltage DC28V or less Load current 40 mA or less Internal voltage drop 0.8 V or less at 10 mA (2 V or less

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Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2001 SMC CORPORATION All Rights Reserved 1st printing October, 2001 D-SMC.L.A. P-80 (D) All specifications in this catalog are subject to change without notice. Printed in Japan. This catalog is printed on recycled paper with concern for the global environment.

3 Port Air Operated Valve

thread) (5.4) 12 (35) 36 35 31 25 (17.5) 16.5 (45) 26.2 15 (20.9) (Distance between ports) 2.8 (54.5) 1/8, 1/4 1(P), 3(R) port 4.5 1P 26.5 NO 3 3R M5 x 0.8 (Breathing hole) 16 20.4 53.7 01 02 A B For vacuum/VPA342V-1(-F) 1/8, 1/4 2(A) port 26.2 2 x 3.2 (For mounting) 21.5 NC 2A 3.4 (1.6) 20.4 16 65.2 (9) 2 x 3.2 (For mounting) 1/8 12(PA) port (Mounting groove for M5 thread) (5.4) 12 (35)

3 Port Solenoid Valve SYJ300/500/700 Series

4" one-touch fitting) M5 0.8 1/8 NPTF Port size M5 0.8 A port X port Note1) M5 0.8 M5 0.8 M5 0.8 Body ported type SYJ5 2/SYJ5 2R 3.4 (0.19) Note 2) Valve effective area mm2(Cv) M5 : 3.3 (0.18) 1/8 : 4.8 (0.27) N3T, N7T: 3.8 (0.21) Base mounted type SYJ5 4/SYJ5 4R M5 : 3.8 (0.21) 1/8 : 4.7 (0.26) Note 1 : Only for external pilot Note 2 : Value when used on a manifold Proper Combinations of

HRL

(N.O. type/N.C. type can be changed.) 3 Do not connect wiring. 1 14 25 13 D-sub 25-pin female (socket) type 8 HRL Series Dual Channel Refrigerated Thermo-chiller for Lasers Communication Functions Serial Communication The following operations can be performed by the serial communication RS-232C/RS-485.

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-2 ports 12, 14 port 1/8, 1/4-2 ports 2, 4 port 1/8, 1/4-2 ports 3, 5 port 21 21 1/8, 1/4 1 port EVS1-01-F G-D-M0 H J I EVS1-01-FG-D-M0 151 166.5 75.5 75.5 27.5 (14 port) 27.5 (12 port) 27.5 (14 port) 27.5 (12 port) 10.5 (4 port) 10.5 (2 port) 10.5 (4 port) 10.5 (2 port) 14 12 2 4 12 14 4 2 12 12 26 35 45 26 35 45 14 14 Indicator light 3 1 5 Indicator light 5 1 3 39 36.5 Manual override 2

AN

Model Model Model Port size R(PT) Effective area (mm2) Weight (g) Dimensions (mm) Weight Effective area Port size Model Dimensions (mm) R(PT) (mm2) (g) AN200-02 35 17 63 22 19 25 84 25 22 35 92 30 27 165 107 46 36 225 132 50 41 490 200 74 55 580 233 74 60 820 263 86 70 A B D A B D 1 4 1 4 AN202-02 35 16 64 22 19 33 84 28 24 47 95 34 24 AN300-03 60 3 8 AN302-03 60 3 8 AN402-04 90 1 2 AN400

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted 1

Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 89.5 (114) [92.5] 1 8, 1 4 [92.5] 3-Rc 3-Rc 1 8, 1 4 VT VP VG Bracket Bracket 2-M5, Depth 7 For mounting 2-M5, Depth 7 For mounting VP S070 VQ ( ): DC [ ]: AC, with indicator light VKF VQZ Base mounted VS3110-G VS3110-D VZ VS 2-4.5 VFN Mounting hole 87.5 (111.5

JSY1000/3000/5000 Series (Non Plug-in)

Dimensions are completely the same as D type DIN connector. 3.

Booster Regulator Series VBA1110 to 4200 1

G H AV OUT port AU AF 4-12 mounting hole Silencer (Option) O EXH port: 1 position AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com F EXH port: 1 position D E IR A 300 404 B 126.5 167 C 53 96 D 73 116 E 118 150 F 98 130 G 46 62.8 H 43 62 I 60.5 90 J 18 17 K 15 15

ARJ310

One-touch fitting ARJ310-01 ARJ310-N01 ARJ310F-01-04 ARJ310F-01-06 ARJ310F-N01-03 ARJ310F-N01-07 R 1/8, M5 x 0.8 NPT 1/8, M5 x 0.8 R 1/8, M5 x 0.8 NPT 1/8, M5 x 0.8 Note) M5 x 0.8 female thread is cut inside the pipe.

Title not found

female threads) T1: NPT1/8 (with M5 female threads) Reverse pressure two directions B R1/8, NPT1/8 Rc1/8 M5 x 0.8 female threads Panel mount (ZS-22-A) Rc1/8 E * M5: M5 x 0.8 (female threads) * C4: With 4 One-touch fitting * C6: With 6 One-touch fitting Wall mount Wall mount Panel mount + Front protective cover (ZS-24-C) M5 x 0.8 F 4, 6 One-touch fitting * Optional * When optional parts only

AR20-B to AR60-B

J Bracket (Option) AR20(K)-B to AR40(K)-06-B 2 x P1 Panel fitting dimensions A (Port size) Y W C B Q V K OUT OUT IN IN Z Plate thickness AR20(K)-B to AR30(K)-B: Max. 3.5 AR40(K)-B : Max. 5 R F P2 S (Pressure gauge port size) Bracket (Option) U M J D T N AR50(K)-B/AR60(K)-B 2 x P1 A (Port size) B Q C K OUT IN R F P2 S (Pressure gauge port size) Bracket (Option) T N J M D U 73 Regulator Series

HRX-OM-Q026

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-15 Connection of RS-232C HRSH Series 3.3 Installation 3-27 HRX-OM-Q026 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

ITV0000

D side 1 2 3 ...

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

-2 ports 12, 14 port 1/8, 1/4-2 ports 2, 4 port 1/8, 1/4-2 ports 3, 5 port 21 21 1/8, 1/4 1 port EVS1-01-F G-D-M0 H J I EVS1-01-FG-D-M0 151 166.5 75.5 75.5 27.5 (14 port) 27.5 (12 port) 27.5 (14 port) 27.5 (12 port) 10.5 (4 port) 10.5 (2 port) 10.5 (4 port) 10.5 (2 port) 14 12 2 4 12 14 4 2 12 12 26 35 45 26 35 45 14 14 Indicator light 3 1 5 Indicator light 5 1 3 39 36.5 Manual override 2