Air Slide Table Series MXS

MXP With end lock (12) MXS12-R With buffer (12) MXS12-F MXY 2 x M5 x 0.8 thread depth 8 MTS Operating port 2 x M5 x 0.8 10.5 J 9.5 38 14.5 16 37 3 29 30 0.5 Other dimensions are the same as the basic style.

MXQ

end) 14 6.5 F 4-M5 x 0.8 thread depth 7 49 3.5 1 14.5 28 24.5 24.5 29 24 58 Retraction end adjuster 6 N-M5 x 0.8 thread depth 6 11 5.5 Adjuster at extension end 5H9 depth 5 +0.030 0 36.5 (Adjuster at extension end) Bottom view of MXQ16L-50 1 11 5.5 11 12 I J 5.5 3 11 2-M5 x 0.8 thread depth 8 Operating port 2-M5 x 0.8 5H9 depth 5 +0.030 0 Max. 12 (Retraction end adjuster) 13 35 45 HA GA

CJ2

nut M5 x 0.8 DPiping port 2-M5 x 0.8 -X 20Rod End Nut S + Stroke Z + Stroke Data Material: Iron Part no.

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

x 0.8 M5 x 0.8 M6 x 1 M8 x 1.25 M8 x 1.25 TA M4 x 0.7 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 YA M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 P M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 +0.030 0 +0.030 0 +0.030 0 +0.030 0 +0.030 0 +0.062 0 +0.062 0 +0.074 0 +0.074 0 +0.087 0 MHSJ3-32D MHSJ3-40D MHSJ3-50D MHSJ3-63D MHSJ3-80D 34H9 42H9 52H9 65H9 Rc 1/8 (G 1/8, NPT 1/8) 82H9 569 Parallel Style Air Gripper

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

AS121FG-M5-23 AS121FG-U10/32-01 9.6 25.8 28.6 12.3 8 7 12.7 17.3 22.1 8.4 8.4 3.2 M5 0.8 25 1/8" 22.2 12.3 17.3 22.1 12.7 AS221FG-01-23 AS121FG-U10/32-03 14.2 31.1 36.1 14.3 12 16 12.7 20.4 27.5 9.3 9.3 3.2 32.1 5/32" 27.1 R 1/8 8 10-32 UNF 28.6 25.8 25 22.2 7 9.6 AS121FG-M5-04 AS121FG-U10/32-05 21.3 26.1 12.3 12.7 17.3 22.1 9.3 11.4 4 3/16" 16.5 M5 0.8 11.7 9.6 25.8 28.6 8 7 25 22.2 AS121FG-M5

Possible to transfer a workpiece at low-speed.

(Example) For M3: L1 = 6 Applicable shaft types: J, K, T Q1 = M K axis T, X shaft Q1 = M L1 = L2 + (3 x P) L2 + (3 x P) L1 + (3 x P) L1 + (3 x P) L2 = L2 = L1 = Q2 = M Q2 = M (mm) (mm) Q2 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Q1 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Size 10 15 20 30 40 Size 10 15 20 30 40 (mm) Q1 M3, M4 M3, M4, M5, M6 M4, M5, M6

MY1

NH NC DTT UU TT UU Auto switch magnet holder M5 x 0.8 (Port) -X GA GA 2-M5 x 0.8 (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) Cushion needle G G 20GB M5 x 0.8 (Hexagon socket head plug) N A M5 x 0.8 (Port) Data Z + Stroke M5 x 0.8 (WW) (WW) (Hexagon socket head plug) 2 x 2-J depth K M5 x 0.8 (Hexagon socket head plug) XX XX M5 x 0.8 (Port) VV VV 2-M5 x 0.8 (Hexagon socket

MXS

CXT With end lock(12) MXS12-llR With buffer(12) MXS12-llF MX 2-M5 X 0.8 thread 8 deep MXU Operating port 2-M5 X 0.8 J 10.5 MXS 38 MXQ 9.5 14.5 MXF 16 37 3 29 MXW 30 0.5 * Other dimensions not indicated are same as the basic style.

KJ

(mm) <M5> <M5> Note) Weight (g) Model D1 P A M D2 L 2-applicable tubing M5 x 0.8 KJU23-M5 KJU23-01S KJU04-M5 KJU04-01S KJU06-M5 KJU06-01S 5.9 8.3 6.4 8.8 7.4 9.9 Reference dimensions after R thread installation.

Air Slide Table Series MXQ

Basic style 2 x M5 x 0.8 thread depth 8 Operating port 2 x M5 x 0.8 3 11 Max. 12 (Retraction end adjuster) 12 I J 5.5 1 11 5.5 Note 1) If long bolts are used, they can touch the guide block and cause malfunction, etc. Refer to the Specific Product Precautions. Note 2) Since the table is made of a magnetic substance, it could become magnetized if touched by a magnet, etc.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

AS121FM-M5-23 AS121FM-M5-04 AS121FM-M5-06 AS221FM-01-23 AS221FM-01-04 AS221FM-01-06 AS221FM-01-08 AS221FM-02-04 AS221FM-02-06 AS221FM-02-08 AS221FM-02-10 3.2 4 6 3.2 4 6 8 4 6 8 10 22.1 22.1 22.9 27.5 27.5 27.5 32.4 34.4 34.4 36.4 43.2 8.4 9.3 11.6 9.3 9.3 11.6 15.2 10.4 12.8 15.2 18.5 17.3 17.3 18.1 20.4 20.4 20.4 25.3 25.2 25.2 27.2 33.9 12.7 12.3 7 25.1 28.8 30.1 9.6 33.8 M5 x 0.8 8 13.5

Series AS-FM/AS-M/ASD-FM

Max. 3.2 4 6 3.2 4 6 8 4 6 8 10 22.1 22.1 22.9 27.5 27.5 27.5 32.4 34.4 34.4 36.4 43.2 8.4 9.3 11.6 9.3 9.3 11.6 15.2 10.4 12.8 15.2 18.5 17.3 17.3 18.1 20.4 20.4 20.4 25.3 25.2 25.2 27.2 33.9 AS121FM-M5-23 AS121FM-M5-04 AS121FM-M5-06 AS221FM-01-23 AS221FM-01-04 AS221FM-01-06 AS221FM-01-08 AS221FM-02-04 AS221FM-02-06 AS221FM-02-08 AS221FM-02-10 12.7 12.3 7 25 25.8 22.2 9.6 28.6 M5 x 0.8 8

MXS Series Air Slide Table

With end lock (12) MXS12R With buffer (12) MXS12F 2-M5 X 0.8 thread 8 deep Operating port 2-M5 X 0.8 J 10.5 9.5 38 14.5 16 37 3 29 30 0.5 Other dimensions not indicated are same as basic type.

Speed Controller for Low Speed Operation Series AS-M Standard Type (Metal Body)

AS121FM-M5-23 AS121FM-M5-04 AS121FM-M5-06 AS221FM-01-23 AS221FM-01-04 AS221FM-01-06 AS221FM-01-08 AS221FM-02-04 AS221FM-02-06 AS221FM-02-08 AS221FM-02-10 3.2 4 6 3.2 4 6 8 4 6 8 10 22.1 22.1 22.9 27.5 27.5 27.5 32.4 34.4 34.4 36.4 43.2 8.4 9.3 11.6 9.3 9.3 11.6 15.2 10.4 12.8 15.2 18.5 17.3 17.3 18.1 20.4 20.4 20.4 25.3 25.2 25.2 27.2 33.9 12.7 12.3 7 28.8 25.1 30.1 9.6 33.8 M5 x 0.8 8 13.5

MY1

needle NW Z + Stroke 2-P (Hexagon socket head taper plug) MW (mm) Bore size (mm) B 6 C 3.5 CH 25 G 8.5 GB 16.2 H 52 HG 13.5 J M5 x 0.8 K 10 L 110 LD 3.6 LH 38 LL 35 LW 84 M 6 MM M4 x 0.7 MW N 20 NC 13.5 NE 49.5 NG A 90 16 20 25 32 40 13.5 110 7.5 4.5 26 10.5 20 58 17 M6 x 1 12 130 4.8 39 45 88 7.5 M5 x 0.8 25 17 55.5 17 120 9 5.5 25.7 16 24.5 66 22 M6 x 1 9.5 142 5.6 38.7 49 100 10 M5

High Vacuum Angle Valve

0 Body Valve side exhaust Refer to the back of page 465 for Maintenance Parts. 457 A XLS Series Dimensions XLS/Without control power supply D Lead wire AWG20, O.D.: 2.63 mm E D F L J K 2 J K L 270 10 290 10 M J K J 33 25 C B 39 G G1/2 G1/2 C B B C A B C 6 to 9 G1/2 A DIN terminal (D) Terminal (T) Conduit (C) Grommet (G) XLS/With control power supply 41 26 J K 530 10 72 OPERATION V INPUT

Air Slide Table

I J 5.5 11 5.7 11.2 2 x M5 x 0.8 thread depth 8 5H9 depth 5 +0.030 0 N x M5 x 0.8 thread depth 6 5H9 depth 5 +0.030 0 5.7 11 6 1 1 28 24.5 58 29 24 49 14.5 24.5 3.5 F 6.5 4 x M5 x 0.8 thread depth 7 14 -1 x F 2 N 21 3 x M6 x 1 thread depth 10 M 10 KA 21 10 5.5 Bottom view of MXQR16-50 NA x M5 x 0.8 thread depth 6.5 45 35 13 K 21 33.7 0.3 10 5.5 5.5 37 Z ZZ G (NN-1) x H H 22.4 7.6 22.4 7.6

LX

Proximity switch (optional) depth 5 10 7.5 15 pin plug 5H9 +0.030 0 E-M5 x 0.8 thread depth10 Home position switch (optional) 6 Refer to page 100 for connection cables. LJ1 LG1 LC1 LX LC6D/LC6C Switches 76 46 38 2-M2.5 x 0.45 thread depth 4 5H9 +0.030 0 10 3 depth5 J 27 J x K 25 8 Motor unit Refer to "Applicable Motor List" below for dimensions.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(mm) (mm) Q1 M3 M4, M5, M6, M8 M4, M5, M6, M8, M10 M4, M5, M6, M8, M10, M12 M5, M6, M8, M10, M12 Q2 M3 M4, M5, M6, M8 M4, M5, M6, M8, M10 M4, M5, M6, M8, M10, M12 M5, M6, M8, M10, M12 Size 30 50 63 80 100 Size 30 50 63 80 100 Symbol: A35 Symbol: A36 Symbol: A37 Machine female threads into the short shaft.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(mm) (mm) Q1 M3 M4, M5, M6, M8 M4, M5, M6, M8, M10 M4, M5, M6, M8, M10, M12 M5, M6, M8, M10, M12 Q2 M3 M4, M5, M6, M8 M4, M5, M6, M8, M10 M4, M5, M6, M8, M10, M12 M5, M6, M8, M10, M12 Size 30 50 63 80 100 Size 30 50 63 80 100 Symbol: A35 Symbol: A36 Symbol: A37 Machine female threads into the short shaft.