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M9B M9NWV M9PWV M9BWV M9NAV M9NW M9PW M9BW M9NA IC circuit 5 V, 12 V Relay, PLC Diagnostic indication (2-color indication) Grommet 24 V Yes 12 V IC circuit 5 V, 12 V Water resistant (2-color indication) M9PAV M9PA M9BAV M9BA 12 V 3-wire A96V A96 (NPN equivalent) 5 V IC circuit Yes Grommet A93V A90V A93 A90 IC circuit 100 V Relay, PLC 2-wire 24 V 12 V No 100 V or less Solid state

Proper Mounting Position (Detection at Stroke End) and Mounting Height 32, 40, 50, 63 D-M9/D-M9W/D-A9 D-M9V/D-M9WV/D-A9V Hs B W A A A B (mm) D-A9V D-A9 D-M9 D-M9W D-M9V D-M9WV A B A B Bore size (mm) W Hs A B W A B Hs 32 40 50 63 12 [17] 9 1 12 [17] 9 29 8 [13] 5 3 (0.5) 8 [13] 5 27 16 11.5 1.5 16 11.5 32.5 12 7.5 5.5 (3) 12 7.5 30.5 14 <19> 14.5 4.5 14 <19> 14.5 42 10 <15> 10.5 8.5 (6)

I1 = 0.03 x (0.02 + 0.01)/12 = 1.25 x 10-kgm I2 = 0.006 x (0.005 + 0.005)/12 + 0.006 x 0.007 = 0.32 x 10-kgm I = 1.25 x 10+ 0.32 x 10-6 I1 = m x (a + b)/12 I2 = m x (a + b)/12 + m x H I = I1 + I2 Inertial moment = 1.57 x 10-kgm Kinetic energy 6 1/2 x I x Allowable energy = 2 /t (: Terminal angular velocity) : Rotation angle (rad) 1/2 x 1.57 x 10-6 x (2 x ( /2)/0.2) Confirm that the load's

D: Push-turn locking slotted type E: Push-turn locking lever type (With gasket and screws) Body option Nil: Individual pilot exhaust style Electrical entry Grommet L plug connector 24, 12, 6, 5, 3 VDC/100, 110, 200, 220 VAC 24, 12 VDC/ 100, 110, 200, 220 VAC 24, 12, 6, 5, 3 VDC M plug connector DIN terminal M8 connector R port P, E port M: Common exhaust for the pilot and main valve MN: Without

Load voltage Auto switch model Lead wire length [m]1 Pre-wired connector Applicable load DC AC Perpendicular In-line 0.5 (Nil) 1 (M) 3 (L) 5 (Z) Indicator light Wiring (Output) Type Special function Electrical entry M9NV M9N V V V v v IC circuit 3-wire (NPN) 5 V, 12 V 3-wire (PNP) M9PV M9P V V V v v Solid state auto switch 2-wire 12 V M9BV M9B V V V v v 3-wire (NPN) 5 V, 12 V M9NWV M9NW

(mm) P = Operating pressure [MPa] T 0425 T 0604 TU 0805 T 0806 1/8B T 1075 TU 1208 T 1209 1/4B TS 1612 3/8B T 1613 1/2B 3/4B 1B 4.9 4 2.5 l = Length of piping [mm] 12.6 6 4 a = Internal cross section of piping [mm ] 19.6 8 5 QC = Air consumption required for one reciprocation of rotary actuator [l (ANR)] 28.3 8 6 33.2 6.5 44.2 10 7.5 50.3 12 8 63.6 12 9 66.5 9.2 113 12 16 127 12.7 133

(N.C.) port Port size Rc1/8 Supply from one side 10 NPT1/8 12 12 Supply from both sides 12 G1/8 Supply from one side 10 8 10 M50.8 Supply from both sides 12 10 12 Note) The number of stations shown above is to satisfy the specifications of the ejector performance at the standard supply pressure.

(Normally open) B Port size Rc (Nominal size) VP3145 VP3165 VP3185 Symbol 03 (10A) 3 8 (15A) 1 2 (20A) 3 4 (25A) 1 Electrical entry 04 CE-compliant 06 10 12 14 20 TL D T G Grommet Conduit terminal DIN terminal Conduit terminal with indicator light SYJ (32A) 1 4 1 (40A) 1 2 1 VQZ TS (50A) 2 Symbol Internal pilot Conduit terminal with surge voltage suppressor TZ Conduit terminal

6.9 8.7 6 6.5 8 10 30 35.5 37.5 44 19 22 22.5 28 3.5 3.5 3.5 3.5 6 6 9 9 76 87 87 102.5 26 28 36 42 M5 x 0.8 90 100 104 124.5 126 140 149 177.5 104 114 119 142.5 8 6.5 9 12 M8 x 1.25 depth 13 Rc, NPT, 1/8 M8 x 1.25 depth 13 Rc, NPT, 1/8 M10 x 1.5 depth 15 Rc, NPT, 1/4 9-13-12 12 Series MLU Plate Cylinder with Lock Dimensions Axial foot style LY CL (mm) LH LS LH ZZ LT 114 132 140 166.5 LX

SRH4010-03 SRH4000-03 0.5 0.20 0.20 0.4 Outlet pressure MPa Outlet pressure MPa Outlet pressure MPa 0.15 0.15 0.3 0.10 0.10 0.2 0.05 0.05 0.1 10 0 5 15 20 25 0 0 1000 500 500 1000 1500 Flow rate L/min Flow rate L/min (ANR) Flow rate L/min (ANR) SRH4100-03 SRH4110-03 SRH4100-03 0.5 0.20 0.20 0.4 Outlet pressure MPa Outlet pressure MPa Outlet pressure MPa 0.15 0.15 0.3 0.10 0.10 0.2 0.05 0.05

characteristics Set pressure range (MPa) Without sub-plate Without sub-plate 1 2 3 Nil 02 03 13 9 5 Symbol 2 1/4 Nil 02 03 0.05 to 0.65MPa 1 3/8 2 1/4 0.1 to 0.9MPa 2 2 02 03 04 03 04 06 1/4 3/8 1/2 3/8 1/2 3/4 1 2 3 4 3/8 03 04 06 3 1 30 3/8 0.005 to 0.15MPa 1 4 1/2 4 45 1 3/4 12 8 4.5 2.5 Without sub-plate Nil 02 03 1(P) Symbol Flow type (VEF2) Flow type (VEF3) Pressure type (VEP3) 2 2

Lightweight, compact, and precision control make these speed controls the right choice for many heavy-duty applications. These speed controls are offered with in-line and elbow construction to give the widest choice to your unique application. Locking nuts are included as standard as well as simplified mounting. Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric

B(9.5) B(12.7) B(19.1) 1B(25.4) 1 B(31.8) 1 B(38.1) 2B(50.8) VNA 111 211 311 411 511 611 711 AS 420-03 420-04 500-06 600-10 800-12 900-14 900-20 Caution Warning 1Piping When operation is suspended, surge pressure will be generated between the cylinder and VNA11A.

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 URL http://www.smcworld.com 2010 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing LY printing OZ 7150SZ Printed in Japan. D-DN

5 LY 11 12 15 18 LZ X 6 8 10 11 Y LD Model LT 29 37 46 57 56 71 89 109 5.5 6.6 9 11 23 27 31 37 12 16 18 21 144 164 177 209.5 MLUL25 MLUL32 MLUL40 MLUL50 LS + Stroke X Y X Y LX LZ 4-LD ZZ + Stroke Front flange type 2-FD FY FV (mm) FV FT FX 76 94 118 144 FY 14 16 18 22 FZ 66 82 102 126 ZZ MLUF25, MLUG25 MLUF32, MLUG32 MLUF40, MLUG40 MLUF50, MLUG50 FD Model 8 8 9 12 24 28 32 39 5.5 7 9 11

M2 M3 m2 m3 m4 10 15 25 1 2 1 2 2 2 1.4 CY1F 1.5 3 1.5 5 5 5 2 14 20 14 12 12 12 12 The above values are the maximum allowable values for moment and load. Refer to each graph regarding the maximum allowable moment and maximum allowable load for a particular piston speed.

B A VP3145 VP3165 VP3185 Port size Symbol 03 04 3 8 1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com In the case of -X80, only N.C. is available. 06 3 4 10 12 1 Light/Surge voltage suppressor 1 4 1 None With light/surge voltage suppressor With surge voltage suppressor

VDC) Brown LINE(+) Brown DC(+) Load Main circuit Main circuit (Analog output) 1k Black OUT 12 to 24VDC + 12 to 24VDC + Load Blue LINE() Blue DC() Load Install the load either on the LINE (+) or LINE (-) side.

Series 10-/11-/12-/13Clean Series Available for clean environment. Particle generation in a clean room can be prevented.