Valve; w/Stop Valve), Supply/Return Port Size: 03 (3/8), Return Unit Flow Switch Output Specifications: BT (Out 1: PNP; Out 2: Flow Rate: PNP; Temp.: PNP; Temperature Sensor: Yes), Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Return Unit Flow Switch Unit Specifications: J (Integrated Display: L/min; Accumulated Flow: L; Temp.: °F)

Valve: None; Stop Valve: None, Return Port Size: 03 (3/8), Flow Switch Output Specifications: C (Out 1: NPN; Out 2: Flow Rate: Analog 1 to 5 V; Temp.: None; Temperature Sensor: None), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Flow Switch Unit Specifications: J (Integrated Display: L/min; Accumulated Flow: L; Temp.: °F)

Valve: None; Stop Valve: None, Return Port Size: 03 (3/8), Flow Switch Output Specifications: CT (Out 1: NPN; Out 2: Flow Rate: Analog 1 to 5 V ⇔ Analog 1 to 5 V; Temperature Sensor: Yes), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Flow Switch Unit Specifications: J (Integrated Display: L/min; Accumulated Flow: L; Temp.: °F)

AS-FPQ/FPG

Port size M5 01 02 03 04 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 With One-touch fitting Clean specifications Metal parts material Q G Brass (electoless nickel plated) Stainless steel 304 Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.

Body Size: 40, Backflow: K (w/Backflow Function), Thread: N (NPT), IN Port Size: 03 (3/8), OUT Port Size: 03 (3/8), Options: J (Right Angle Square Type Pressure Gauge w/Limit Indicator), Set Pressure: 0.05 TO 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Knob: Downward, Pressure Unit: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)

Guide Cylinder Series MGG

M N C D 4-O T Q 2-P E B S K L U W AA A I AP R X AB Y + Stroke J V Z + Stroke AC AD 8-AF AE For standard stroke (mm) Bore size (mm) Stroke range (mm) AC E D AF G AE AD AB AA N M F L K B J AP C H I A 20 25 32 40 50 75, 100, 125, 150, 200 M5 x 0.8 depth 10 16.5 92 60 9.5 depth 6 30 75 11 12 45 25 5.5 80 60 55 108 M8 x 1.25 depth 14 25 24 30 99 M6 x 1 depth 12 16.5 113 65 11 depth 8 30 85 13

Pneumatic Transfer System Series MF

Applicable cylinder D G F H L I C E J K M N Part No.

Rotary Table

0.025[J] 0.048[J] 0.081[J] 0.240[J] 0.320[J] 0.560[J] With internal shock absorber 0.039[J] 0.116[J] 0.116[J] 0.294[J] 1.100[J] 1.600[J] 2.900[J] Allowable Kinetic Energy (J) With external shock absorber (For low energy) 0.161[J] 0.574[J] 0.805[J] 1.310[J] With external shock absorber (For high energy) 0.231[J] 1.060[J] 1.210[J] 1.820[J] With adjustment bolt 0 to 190 Note2) With internal

33

s]) : Tap water* IDH Example of current measurement units (Reference) : (= r x qv 60) [kg/s] : 1 [kg/dm3] : 10 [dm3/min] : 4.2 x 103 [J/(kgK)] : 293 [K] (20 [C]) : 295 [K] (22 [C]) : 2.0 [K] (= T2 T1) : 60 [s/min] : Unknown [cal/h] [W] : Tap water* Heat generation amount by users equipment Q Circulating fluid Circulating fluid weight flow rate qm Circulating fluid weight volume ratio g

&snac

3 4 5 5 6 7 l\caut ion l n s t a l l a t i o n l n s t a l l a t , I D G s * M ( V ) i o n . r o n i n l e t s i d e 0 f m e m b l a n e a i r J i u t t , s u r e l v i n s t a l l m i s t s e p a r a t 0 r a n d m i c r o m i s t s e P a r a t o r ' t w i f n o u t t t r e m , i t d 0 e s n o t p e r f o r m ' w e l l b e c a u s e v a t e r a n d o i l f l o w i n ' l t F I u s h P j P

CEx-OMQ0011

Nm N M1 M M3 W W2 W W4 ML2B25 10.0 1.2 3.0 200.0 58.0 65.0 100.0 ML2B32 20.0 2.4 6.0 300.0 80.0 96.0 150.0 ML2B40 40.0 4.8 12.0 500.0 106.0 140.0 250.0 ML2B25 ML2B32 ML2B40 J 0.43 0.68 1.21 18 ML2B/M1 ML2B/W1 ML2B/W1 0 0 0 Nm 0 0 0 N N 0 m/s m/s m/s ML2B/M2 ML2B/W2 ML2B/W2 N m N N m/s ML2B/M3 m/s m/s 20 ML2B/W3 ML2B/W3 10 Nm 5 3 2 1 N N m/s m/s m/s ML2B/W4 500 N 00 N

MHS

VG32 4 4-1 1 2 3 14 4-2 MHS2 MHS3 MHS4 C O O MHS2MHS4 MHS3 15 MHSJ3 C J O O J J J 16 MHSH3 C A O O O A A 17 / / C S (P) P O O S O P P C / ; ; ; ; C 18 4-3 3 MHS2 MHS3 MHS4 1 C C 4 2 5 mm Nm 16 M30.5 2.5 0.6 20 M30.5 2.5 0.6 25 M40.7 3 1.4 32 M50.8 4 5.1 40 M50.8 4 5.1 50 M61 5 8.6 63 M81.25 6 21.6 80 M101.5 8 24 100 M121.75 10 42.2 125 M142 12 67.7 19 MHSJ3

Series MHL2 11- ø10, ø16, ø20, ø25, ø32, ø40 22- Parallel Type Wide Opening Air Gripper

mounting groove (4 locations) Width across flats 8 (4 locations) 18.2 M5 x 0.8 (Finger closing port) 4 x M5 x 0.8 (Piston rod thread and rack thread) 5.5 2 x M5 x 0.8 Vacuum port H 7 8.4 16.8 0.5 7 9 7 12.5 8 6 6 O S 15 31 (46) 20 K 12.4 15 15 7 7 4 4 20 When open F 10 4 x M4 x 0.7 through (Thread for mounting attachment) 34 10 When open G (mm) J 24 39 57 H 116 158 196 G 92 134 172 F 72

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

-,I T _ I I 1sri61 @ll: p ( j iPilot ExH) (63.5) 2.58( Ll : with indicator light and surge voltage suppres6or e . [ o l a ' l s 1 6 e ' 9 r , p , . 1 4 . ; 116 17 l!

CHKD/CHKG

J A + Stroke M M Rod end male thread CHKDB20, 25 CHKDB32 to 100 Water resistant type S N g C B + Stroke h + Stroke A + Stroke Rod end male thread (mm) B C D E F G H J K L M P Q R A Bore size (mm) 20 51 43 8 12 10 M8 x 1.25 10 6 30 5.5 9.5 depth 5.4 43 1/8 16.5 6 25 53 45 8 14 12 M10 x 1.5 12 6 36 5.5 9.5 depth 5.4 49 1/8 17 8 32 61 51 10 18 14 M12 x 1.75 15 7 47 6.6 11 depth 6.5 63 1/4 19.5

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

+ Stroke Relief port With air cushion Cushion valve (Width across flats WH) WA GA RA Relief port M5 x 0.8 WB 20 10 S + Stroke ZZ + Stroke (mm) AL Bore size Stroke range 1 2 A GB I J MM P S ZZ K NA C H RA B1 KA D H1 E F GA Standard Long 20 25 32 40 50 63 80 100 35 40 40 50 58 58 71 71 5 5.5 5.5 6 7 7 10 10 24 29 35.5 44 55 69 86 106 7 7 7 9 10 10 10 10 0 0 0 10 10 10 10 10 15.5 19.5 19.5

Title not found

-,I T _ I I 1sri61 @ll: p ( j iPilot ExH) (63.5) 2.58( Ll : with indicator light and surge voltage suppres6or e . [ o l a ' l s 1 6 e ' 9 r , p , . 1 4 . ; 116 17 l!

LEF-OM006xx

40 50 60 70 80 90 100 [mm] [mm] c 180[mm] 290[mm] AREAON 100[mm]-0.5[mm] = 99.5[mm] INPON 2[mm] j 1[mm] j 100 b 0 [mm/s] AREA ON OFF ON [mm] k INP INP OFF 100.5 99.5 0 10 20 30 40 50 60 70 80 90 100 [mm] -23- (2 INC a b c d e f g h i j k ABS()/ / INC()// )30[mm] No.0 No.0INC No. 1 2 mm/s mm mm/s2 mm/s2 % % mm/s % mm mm mm 0 INC 100 10.00 3000 3000 0 0 0 100 10.00 20.00 0.50 1

LEF-OM002xx

The INP output signal is turned on from 100[mm] 0.5[mm]=99.5[mm] Table Position[mm] c Area2[mm] j Area1[mm] j b Speed[mm/s] 100 0 AREA Output signal ON OFF INP Output conodition INP Output signal ON In pos[mm] k OFF 100.5 99.5 0 10 20 30 40 50 60 70 80 90 100 Stroke [mm] 27 - Example of step data input (2) Positioning operation Relative a b c d e f g h i j k Step data No.

Air Cylinder CP Series Cylinder Positioner Assembly

s' i20mh) w'Bool CPA1TN ROD BOOT with Boof BORE B D E J K MM P s dTDeB TT TX TY TZ H z zz h zl 1 3 4 (351 2 7 6 2.O5 152\ o.79 1.57 0 3 9 i10l 067 117\ M8x1.25 0.28 (7\ M16x1.5 1 1 4 (30) 3.54 i90l o 5e 8;tjj (15 3,'* 1 . 1 4 (30) g 7 (95t 2.99 5.31 t135) 2.24 (581 (1031 6.06 (1541 2.05 (521 11.2) 260 (66) s T o 1 1 1 1 6 3 8 1.38 l35l 3 3 5 (85) 2.52 (64) 0.79 (2Ol 1.57 0.39 0.67 t17l 0