Table of Contents

Model Port A size Port B size No. of Port A Porting Port A Port B Model 6 8 4 8 10 12 Rc Rc 6 8 10 6, R 6, R 6, R 8, R 8, R 8, R 10, R 10, R 10, R 6 8 10 4 6 KM11 One-touch fitting One-touch fitting 6, 10 1 4 3 8 KM12 One-touch fitting Rc female thread 6, 10 KM13 One-touch fitting One-touch fitting 3 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main

LEC-OM02704CN

CW RYn1ON PA140 PA141 PA140 PA141 6 11 6 6.1.13 PA15 *ENR 4000 pulse/ rev 165535 (AB)AB4 PC19 AB1/4 4.6Mpps(4) (1) PC190() [pulse/rev] PA155600AB 5600 A B 4 1400[pulse] (2) PC191 1 [pulse/rev] PA158AB A B 8192[pulse] 262144 1 4 8 6 12 6 (3) PC192 PA06PA07 PA06PA07 CDV CMX A B AB 6 13 6 6.2 (PB) 6.2.1 PB01 FILT (II) 0h PB02 VRFT () 0h PB03 0h PB04 FFC 0 PB05 500 PB06 GD2

Table of Contents

9.5 MHS A C 32 M3 x 0.5 Finger opening port M3 x 0.5 Finger closing port MHC MHT 25 25 MHY 3-3 depth 6 +0.02 0 M3 x 0.5 Finger opening port M3 x 0.5 Finger closing port (A, B, C common view) MHW 6-M3 x 0.5 thread depth 6 (A, B, C common view) MRHQ Misc.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

/A80H D-A73C/A80C D-F7/J79/J79W D-F7V/J79C D-F7W/F7WV D-F7BAL/F7BAVL D-F79F D-M9 D-M9V D-F9W D-F9WV D-A79W D-A9 D-A9V D-F9BAL D-P5DWL D-A7/A80 Bore size (mm) A A B B A B A B A B A B A B 12 4.5 5.5 5 6 2 3 16 7.5 5 8 5.5 5 2.5 20 7.5 6.5 8 7 5 4 25 7.5 7 8 7.5 5 4.5 32 9.0 6 9.5 6.5 6.5 3.5 8 5 12 9 11 8 40 9 13 4.5 8.5 13.5 9 10.5 6 12 7.5 16 11.5 15 10.5 50 7 11 7.5 11.5 11.5 12

ZP

nylon tubing M-5AN-6 U4 For 4 soft tubing M-5AU-4 U6 For 6 soft tubing M-5AU-6 B Model 29 A B Vacuum inlet direction q Pad dia.

Made to Order

Applicable stroke Single rod type Bore size (mm) A B 12 16 20 25 20.5 (25.5) 17 (22) 17 (22) 6 to 29 20.5 (25.5) 24 (34) 19.5 (29.5) 22.5 (32.5) 6 to 49 27.5 (37.5) (mm) Applicable stroke Double rod type Bore size (mm) A B 12 16 20 25 29 (34) 29 (34) 35 (45) 39 (49) 22 (27) 22 (27) 26 (36) 29 (39) 6 to 49 6 to 29 (mm) Single rod type (Long stroke) Bore size (mm) Applicable stroke A B 12 16

5

D-H7mW D-H7NF D-M9m(V) D-M9mW(V) D-M9mA(V) D-A9m(V) D-B5m D-B64 REA D-B59W D-G5NT REB Bore size A B A B A B A B A B A B A B A B REC 20 11 9.5 7 5.5 1.5 0 7.5 6 4 2.5 1 0 6.5 5 3 1.5 25 10 10 6 6 0.5 0.5 6.5 6.5 3.5 3.5 0 0 5.5 5.5 2 2 Smooth Smooth 32 11.5 10.5 7.5 6.5 2 1 8 7 5 4 1.5 0.5 7 6 3.5 2.5 40 17.5 15.5 13.5 11.5 8 6 14 12 11 9 7.5 5.5 13 11 9.5 7.5 Low Speed Note) Adjust the auto

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Parts (b) Lever Description Note C4: A, B port One-touch fitting for 4 C6: A, B port One-touch fitting for 6 No.

Air Slide Table

3.3 (Min. screw-in depth) 38.6 B 72 42 60 30 36 B N x M5 x 0.8 F N 2 1 x F 29 3 Cross-sectional view B-B 2 x M5 x 0.8 thread depth 7 27 0.5 M 7 ZZ Z J I 16.5 Pilot port 3 x M5 x 0.8 (Plug: Width across flats 7) +0.030 5H9 ( 0 ) depth 3 +0.030 5H9 ( 0 ) depth 3 +0.030 5H9 ( 0 ) depth 3 24 G H 24 G H HA 10.7 16.3 A 9.5 5.1 10 A 6 6 NN x M6 x 1 thread depth 9 HB GB GB HB B stroke: 50 mm B stroke

Compact 5-Port Solenoid Valve

B) port side: Yellow SI unit X0 0 X1 2 2 X1 X0 0 1 3 3 1 A B A B A B A B X2 4 6 X3 6 X3 X2 4 97.9 83 83 A 4 A 4 A 4 A 4 120 5 7 7 5 65.5 10 X5 X4 8 4.6 B 2 B 2 B 2 B 2 9 11 14.5 X6 12 14 X7 9.9 2 13 15 (C8: 14.9) (Fitting for the type with P/E ports on the U and/or D sides) 4 x M4 Mounting hole 17.5 (14.8) 7.5 End plate Digital input module Digital output module (Station n) (Station 1) FE

Series SV

One-touch fitting [X: External pilot port] Applicable tubing O.D.: 6 N7 One-touch fitting [PE: Pilot EXH port] Applicable tubing O.D.: 6 N7 Rc 1/4, 3/8 [4(A), 2(B) port] L3 (L4) U side D side L5 47.3 4-6.2 (for mounting) (5.4) [for Rc 1/4, 3/8] DIN rail holding screw (for DIN rail mounting) 13.3 81.7 75 B B B B B 8 164.7 148.2 5.5 35 A A A A A 98.2 A B A B 1 2 3 4 5 6 7 8 9 10 11 12 13 14

ZP

ZPT2004U ZPT10UT 2 2 2.6 1.2 10 1.2 0.3 11 4 2.6 4.6 1 ZPT04U-B-A8 ZPT3507U ZPT13UT 4 3.5 4.8 1.8 13 1.6 0.8 0.5 14 7 4.3 7.8 1.5 ZPT06U-B-A8 ZPT4010U ZPT16UT 6 4 7 2 16 0.8 17 10 5 11 2.5 2.5 ZPT10CT 10 11 0.8 ZPT08U-B-A8 8 9 1 ZPT13CT 13 14 Dimensions by Stroke 1 16 17 F: M3 x 0.5 F: M5 x 0.8 E G H J G H D Model J ZPT 6-B-A8 46 18 15 44 ZPT10-B-A8 79 23 77 84 3 6 5 8 ZPT15-B-A8 28 43 82

Electric Actuator/Slider Type

6 !9 !1 !5 A-A t y @2 C B e @1 !0 C B r w C-C B-B !4 !2 Body Table !3 Component Parts No. Description Material Note No.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

O.D.: 6 1/4" One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 12 3/8" One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 6, 1/4" 8, 5/16" 10, 3/8" U side D side L3 (L4) L5 6.5 31.6 DIN rail holding screw (For DIN rail mounting) (5.3) (5.1) SI unit 68.5 10.1 9.5 B B B B B 8 128.8 115.8 A A A A A 83.8 5 35 COM PWR 5.5 A B A B 14.3 29.6 46.9 Manual override Press and turn

Battery-less

6 !7 @1 q B B !9 B-B !5 !8@8 e r t !2 !1 @3 @5 o A @4 A A-A !4 @2 @0 !0 w !3 @6 Component Parts No.

CQ2

A B A B A B A B A B A B 12 4.5 5.5 5 6 2 3 9 10 16 7.5 5 8 5.5 5 2.5 12 9.5 20 7.5 6.5 8 7 5 4 12 11 25 7.5 7 8 7.5 5 4.5 12 11.5 32 9.0 6 9.5 6.5 6.5 3.5 13.5 10.5 8 5 12 9 11 8 40 13 8.5 13.5 9 10.5 6 17.5 13 12 7.5 16 11.5 15 10.5 50 11 11.5 11.5 12 8.5 9 15.5 16 10 10.5 14 14.5 13 13.5 63 13.5 14.5 14 15 11 12 18 19 12.5 13.5 16.5 17.5 15.5 16.5 80 17.5 18 18 18.5 15 15.5 22 22.5 16.5

Vacuum Pad

Note 3) ZP3-(015/02/035)U ZP3-Y(015/02/035)U;(J/K)3-@ ZP3-Y(015/02/035)U;(J/K)6-@ ZP3B-Y1(J/K)3-B3 ZP3B-Y1(J/K)6-B3 ZP3-Y(10/13/16)UM;(J/K)3-@ ZP3-Y(10/13/16)B;(J/K)3-@ ZP3-Y(10/13/16)UM;(J/K)6-@ ZP3-Y(10/13/16)B;(J/K)6-@ ZP3-Y(10/13/16)UM;(J/K)10-@ ZP3-Y(10/13/16)B;(J/K)10-@ ZP3-Y(10/13/16)UM;(JB/K)15-@ ZP3-Y(10/13/16)B;(JB/K)15-@ ZP3-Y(10/13/16)UM;(JB/K)20-@ ZP3-Y(10/13/16)B;(JB/K)20-@

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Side Valve Top Base Bottom Location Direction P, R port A, B port piping specifications 1/8 1/4 1/8, C6 (One-touch fitting for 6) 1/8 M5 x 0.8 Port size C4 (One-touch fitting for 4) C6 (One-touch fitting for 6) M5 x 0.8 A, B port C4 (One-touch fitting for 4) Flow characteristics Flow characteristics Port size 14/2 (PA/B) 4/25/3(A/BR) C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv Manifold model

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

P, R, A, B port thread type Clean series Valve stations Rc G NPT NPTF Nil F N T Symbol Station 3 stations : 8 stations 3 stations : 16 stations Note SI unit A B A B 03 A B NPN output (+ COM.) Nil A B Double wiring Note 1) : A, B port M5 x 0.8 A B 8 6 4 2 0 08 03 CE-compliant PNP output ( COM.)

0.4

C10: 10 N11: 3/8" C12: 12 (Double sided type) ( ) 7 6 5 4 3 2 1 n D side Station U side VFR VQ7 M12 57.2 R R OUT 76.7 76.5 X 3 3 67.2 72 IN X B B B B B B B 49.5 46.2 P 12 P 12 25.6 30 25 A 1 A 1 A A A A A 10 13.5 M12 21.5 13 (7.5) 25 55 18 One-touch fitting [4(A), 2(B) port] Applicable tube O.D.: 4, 5/32" 6, 1/4" 8, 5/16" n: Stations L: Dimensions n L 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 L1