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(mm) At the minimum stroke of 25 mm adjustment bolt Basic stroke At maximum stroke adjustment At the minimum stroke of standard adjustment bolt Bore size (mm) Adjustment bolt fixing bolts Tightening torque Adjustment width across flats Bore size (mm) 10 15 25 10 15 25 A 2 A 26 A = 0.8 A = 0.6 A 0 M3 1.0 to 1.3 Nm 4 A 2 A 26 M5 4.6 to 6.2 Nm 5 Adjuster holder Adjuster holder A Adjustment

(mm) At the minimum stroke of standard adjustment bolt At the minimum stroke of 25 mm adjustment bolt Basic stroke At maximum stroke adjustment Bore size (mm) Bore size (mm) 10 15 25 Adjustment bolt fixing bolts Tightening torque Adjustment width across flats 10 15 25 A 2 A 26 A = 0.8 A = 0.6 A 0 M3 1.0 to 1.3 Nm 4 A 2 A 26 M5 4.6 to 6.2 Nm 5 Adjuster holder A Adjuster holder Adjustment

(mm) At the minimum stroke of 25 mm adjustment bolt Basic stroke At maximum stroke adjustment At the minimum stroke of standard adjustment bolt Bore size (mm) Adjustment bolt fixing bolts Tightening torque Adjustment width across flats Bore size (mm) 10 15 25 10 15 25 A 2 A 26 A = 0.8 A = 0.6 A 0 4 M3 1.0 to 1.3 Nm A 2 A 26 5 M5 4.6 to 6.2 Nm Adjuster holder Adjuster holder A Adjustment

than a needle throttle of a general purpose cylinder.

Double acting PA PA B A PB B A With by-pass Suck back valve Manual Operation-Series LVH N.C. Double acting P PA PA Locking and non-locking types available B A B A PB B A Integral fitting type/Threaded type Manifolds Main applications and fields For shut off For air bleeding N.C.

center 3 position exhaust center 3 position closed center 3 position pressure center (1) 3 position exhaust center 3 position closed center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) Note 1) Except VQZ1000 and metal seal.

Inlet air pressure(MPa) 0.15~1.0 Ambient temperature (Humidity) 2~40 (Relative humidity of 85% or less) Applicable compressor (as a guide) 11 2.2 3.7 5.5 7.5 5.5 3.7 2.2 1.5 0.75 (for screw style) (kW) Single phase, AC100/100 to 110 Single phase, AC100/100 to 110 Single phase, AC200/200 to 220 Power source (V) 50/60Hz 165 195 310 360 330 370 165 195 175 210 210 250 200 230 320 385 335 380

Controller JXC2 Main control power supply 24 VDC 120.3 120.3 mm mm 200 200 mm/s mm/s To USB Port To USB connector 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 or To CPWR connector USB Cable PC JXC3 -3- 3. Connection Check Connect the USB cable, and supply power to the controller.

Diaphragm Assembled in a clean room.

28.5 30 32.5 B 9.5 20.5 23.5 25 29 30.5 33 B 6.5 17.5 20.5 22 26 27.5 30 A 23.5 27.5 26.5 34 34 41.5 45 A 28.5 32.5 31.5 39 39 46.5 50 A 20.5 26 25 32.5 32.5 40 43.5 A 23 27 26 33.5 33.5 41 44.5 A 23.5 27.5 26.5 34 34 41.5 45 A 20.5 24.5 23.5 31 31 38.5 42 A 24.5 30 29 36.5 36.5 44 47.5 20 32 40 50 63 80 100 Note) Adjust the auto switch after confirming the operating conditions in the actual

A 2.0 (50.8) 2 x 10-32 UNF depth 0.35 (8.9) (Mounting hole) 1.5 (38.1) 45 A A Bottom view Connections inch A (mm) FV4 MV4 TW6 FV8 MV8 TW8 FV12 MV12 TW12 2.00 (50.8) 1.375 (34.9) 2.425 (61.6) 1.79 (45.4) 3.50 (88.9) 3.25 (82.6) Elgiloy is a registered trademark of Elgiloy Specialty Metals.

The cylinder should be operated using a connection method which allows for shaft alignment variations and deflection due to the cylinder's own weight. A drawing of a recommended mounting method is shown in Figure 1.

L 5 to 6 Straight bladed watchmaker screwdriver Switch mounting screw (M5 X 4l) When auto switch D-Y59 A is used B Auto switch L Note) Use a watchmakers screwdriver with a grip diameter of 5 to 6mm to tighten the auto switch mounting screw.Use a tightening torque of 0.05 to 0.1Nm. As a rough guide, tighten the screw an additional 90 after feeling a tighten resistance.

Calculate the moment of inertia for A and B separately as shown in the figures on the right. A part B part Procedure Calculation Calculation example 1. Check the operating conditions, dimensions of attachment, etc. Operating model: MHY2-16D Opening time: 0.15 s a = 40 (mm) b = 7 (mm) c = 8 (mm) d = 5 (mm) e = 10 (mm) f = 12 (mm) A part a b c B part e f d 2.

As a rule, it should be turned about 90 beyond the point at which tightening can be felt. A B When auto switch D-Y69A is used Auto Switch Hysteresis Auto switches have hysteresis similar to micro switches. Use the table below as a guide when adjusting auto switch positions, etc. Max.

Tightening with a torque above the limit could malfunction. Whereas tightening insufficiently could result in misalignment or come to a drop. 5. Be careful when adjusting stroke not to allow cylinder end plate to bottom out against cylinder body.

A part B part Procedure Calculation Calculation example 1. Check the operating conditions, dimensions of attachment, etc. Operating model: MHY2-16D Opening time: 0.15 s a = 40 (mm) b = 7 (mm) c = 8 (mm) d = 5 (mm) e = 10 (mm) f = 12 (mm) A part a b c B part e f d 2.

Cooling water (l/min) 180C Inlet air temperature Correction factor Air flow (l/min (ANR)) Model 50C 70C 100C 41.5 43 45.5 37 43 49.5 37 43 45.5 37 42 43.5 40 44 46 39.5 43 44.5 41 43 45.5 A B C A B C A B C A B C A B C A B C A B C 35.5 36 36.5 33.5 36 38 33.5 36 36.5 33.5 35 36 34.5 36 37 34.5 35.5 36 34.5 35.5 36 38.5 40 42 36 40 45.5 36 40 42.5 36 40 41 38 40 42.5 38

300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400500 1000 1500 Piston speed mm/s Piston speed mm/s Piston speed mm/s Piston speed mm/s Features 6