Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

(mm) D-A90V D-A96V D-A93V 22 Bore size D-M9V D-F9WV D-M9 D-F9W D-A90 D-A96 D-A93 (mm) 32 20 32 Mounting pattern q, w 35 Mounting pattern e 20 12 Mounting of Auto Switch As shown below, there are 3 ways to mount the auto switch according to 3 types of electrical entries. Insert the auto switch into the switch groove.

15

Please consult with SMC regarding water resistant types with the above model numbers. 2 1 m type lead wire is only applicable to D-A93. Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Solid state auto switches marked with are produced upon receipt of order.

Slit Valve

Applicable wafer size 200 mm 300 mm XM XY Non-cassette type DXSA Auto switch and connector XVD Symbol Auto switch Connector Nil A None Lead wire: 0.5 m (without connector) XGT XGT For 200 mm wafer For 300 mm wafer CYV With multiple connector Note 1) C Cassette type D-A93 (With 2 pcs. for opening and closing) (T3106 000: Made by AMP) With D-sub connector Note 2) F (CDE-9PF05: Made by HIROSE

CRQ2

Lead wire length symbols: Auto switches marked with are made-to-order specification. 0.5 m Nil (Example) A93 3 m L (Example) A93L 5 m Z (Example) F9NWZ Auto switches other than those listed above are also available. Refer to page 11-8-9 for details.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

A96V A96 5 V Grommet Yes 12 V A93V A93 100 V 24 V Relay, PLC 2-wire 3-wire (NPN) M9NV M9N IC circuit 5 V, 12 V M9PV M9P 3-wire (PNP) M9BV M9B 2-wire 12 V F9NWV F9NW Grommet 3-wire (NPN) Relay, PLC 5 V, 12 V 24 V Yes Diagnostic indication (2-color display) IC circuit 3-wire (PNP) F9PWV F9PW F9BWV F9BW Improved water resistance (2-color display) 2-wire 12 V F9BA Though it is possible

Compact Cylinder with Air Cushion

IC circuit 5V A76H A96V A96 A72H A73H A72 A73 A73C 200V Grommet A93V A93 Reed switch Solid state switch Yes 100V 12V Relay, PLC 2-wire 24V Connector Diagnostic indication (2-color display) A79W Grommet F9NV F9PV F9BV F9NWV F9PWV F9BWV F9N F9P F9B F9NW F9PW F9BW F9BA F79 F7P J79 F79W F7PW J79W F7BA F7NV F7PV F7BV J79C F7NWV F7BWV F7BAV 3-wire (NPN) IC circuit 5V, 12V 3-wire

CE

Indicator light Lead wire length (m) Applicable load 0.5 (Nil) 3 (L) 5 (Z) Auto switch model Special function Type Load voltage AC DC Wiring (Output) Electrical entry Pre-wire connector In-line Perpendicular Reed switch 3-wire (NPN equivalent) IC circuit A96 A96V 5 V Grommet Yes 2-wire 24 V A93 12 V 100 V Relay, PLC A93V 3-wire (NPN) 3-wire (PNP) M9N M9NV IC circuit 5 V, 12 V M9PV

CQM

IC circuit 5 V A76H A96V A96 Yes No A72 A73 A80 A72H A73H A80H 200 V Solid state switch Reed switch Grommet 100 V 12 V IC circuit A90V A93V A90 A93 5 V, 12 V 12 V 12 V Relay, PLC 2-wire No Yes 24 V A73C A80C A79W F7NV F7PV F7BV J79C F7NWV Connector IC circuit 5 V, 12 V Grommet Diagnostic indication (2-color indication) Yes 3-wire (NPN) 3-wire (PNP) F79 F7P J79 M9NV M9PV M9BV M9N M9P M9B 5

CXT

Lead wire length (m) Load voltage Rail mounting Direct mounting Indicator light Special function Type Electrical entry Wiring (Output) Pre-wire connector Applicable load 12 to 40 32, 40 0.5 (Nil) 3 (L) 5 (Z) None (N) AC DC In-line In-line Perpendicular Perpendicular 3-wire (NPN equivalent) IC circuit 5 V A76H A96V A96 A93V A93 A72H A73H A72 A73 A73C 200 V Grommet Reed switch Solid

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Yes Applicable Auto Switch: 20, 25, 32 Lead wire length (m) Load voltage Auto switch model Indicator light Applicable load Type Electrical entry Wiring (Output) Electrical entry direction Special function 0.5 (Nil) 3 (L) 5 (Z) AC DC Perpendicular In-line A90 A90V No 100 V or less 5 V, 12 V IC circuit Relay PLC 2-wire Reed switch Reed switch Solid state switch Solid state switch 24 V A93

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

(mm) D-A90V D-A96V D-A93V 22 Bore size D-M9V D-F9WV D-M9 D-F9W D-A90 D-A96 D-A93 (mm) 32 20 32 Mounting pattern q, w 35 Mounting pattern e 20 12 Mounting of Auto Switch As shown below, there are 3 ways to mount the auto switch according to 3 types of electrical entries. Insert the auto switch into the switch groove.

MTS

IC circuit 5 V, 12 V 3-wire (PNP) Relay, PLC 2-wire 12 V Grommet 5 V, 12 V 24 V 3-wire (NPN) 3-wire (PNP) IC circuit Diagnostic indication (2-color indication) 12 V 2-wire Lead wire length symbols: 0.5 mNil (Example) A93 3 mL (Example) A93L 5 mZ (Example) F9NWZ Since there are other applicable auto switches than listed, refer to page 8-10-22 for details.

10-cls-e

function Wiring (output) Type Electrical entry 0.5 (Nil) 3 (L) 5 (Z) DC AC 3-wire (NPN) 3-wire (PNP) 2-wire M9N M9P M9B A90 A93 5 V, 12 V Solid state switch Relay, PLC 24 V Grommet Yes 12 V 5 V, 12 V 12 V 100 V or less 100 V IC circuit no Yes Relay, PLC 24 V 2-wire Reed switch Grommet 161

XL-OMY0002

D-A93 120 M9// 25H4 14 XL-OMY0002 9. 200 2580 100 100,160 [] 1 1.5 1 XLD-25,XLD-40,XLD-50,XLD-63,XLD-80 200 XLD-100,XLD-160 100 : FKM 110 Pa <> 15 XL-OMY0002 10. 10-1. 2 2P5P6 16 XL-OMY0002 10-2 1 2 3 c b 1 S 2 O 4 M a S aa M 0.2MPa b S 0.3MPa c S 25,40,50,160 O 3 4 O O O O O O 17 XL-OMY0002 10-3. 1 2 3 2 3 O 4 1 M O M O O O O O O 4 5 O S M

XG_-OMV0028

Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: 1 : ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4., 5. 6. ,, 2 - / 1 1.5 () [] 3 - 1. 50mm336mm -6 Pa 10 MPa 0.450.6 -10 Pam 3/sec O :FKM 6.510 O :Kalrez R 4079 6.510 -9 Pam 3/sec -8 Pam 3/sec O :FKM 6.510 0.1MPa(abs) O :Kalrez R 4079 6.510 -7 Pam 3/sec -11 Pam 3/sec 6.510 5150() 560() s 0.61 *2 (D-A93

CEP1

(DC12~24V), 1. , 2. , , , 1. 2. , , , ,, , 3. ,, , 4. , 1. ,(), 2 , 2. , , ,1.5~2 1. , ,1ISO VG32 ,, ,, 2 ,,A /B 90 4 ,0.01mm 2-1 2-2 2-2-1 () B L F 0.5m L 3m 12 12 20 20 (mm) Z 255075100 () 2-2-2 A90 D-A90 F9N D-F9N F9NW D-F9NW A93 D-A93 F9P D-F9P F9PW 2 D-F9PW A96 D-A96 F9B D-F9B F9BW D-F9BW A90V D-A90V F9NV D-F9NV F9NWV D-F9NWV A93V D-A93V F9PV D-F9PV F9PWV

CE

A /B 90 0.1mm/ 2-1. 2-2 F.G CE1-R** CE1 CEU5 OUT1OUT5 RS-232C OUT1OUT20(bank ) (31 ) 221 () B L F G D 0.5 L 3 Z 12 12mm 20 20mm 32 32mm 40 40mm 50 50mm 63 63mm 4063 N R H (mm) (mm) (mm) 25 50 75 100 125 150 175 200 250 300 400 500 12 20 32 40 50 63 222 A90 D-A90 M9N D-M9N M9NW D-M9NW A93 D-A93 M9P D-M9P M9PW D-M9PW A96 D-A96 M9B D-M9B M9BW D-M9BW A90V D-A90V M9NV D-M9NV

smcmaintenancepartslist

CLS 125 A93 TN D UA Bore size (mm) Lock unit auto switch Nil Without auto switch Refer to the table below for applicable auto switch models Port thread type Lock unit built-in magnet Nil TN NPT TF G Rc Nil D Built-in magnet Without magnet (Without auto switch) Cylinder Unit/Applicable Auto Switches Load voltage Lead wire length (m) Applicable load Indicator light Auto switch model Special

Compact Guide Cylinder

Relay, PLC No 100 V or less A90V A90 IC circuit 1 Water-resistant type auto switches can be mounted on the above models, but SMC cannot guarantee water resistance. 2 The 1 m lead wire is only applicable to the D-A93.

1.63

A water-resistant type cylinder is recommended for use in an environment which requires water resistance. 2 1 m type lead wire is only applicable to D-A93. Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Solid state auto switches marked with are produced upon receipt of order.