PF-OMM0004_C

-D 30() 3 ON OFF ON OFF [F 1]OUT1(60)[F 2]OUT2(36) -24No.PF-OMM0004-D 3 1 [P_1][n_1] 1 1 OUT1OUT2[P_2][n_2] [ tn][ tp] [F 1]OUT1(60)[F 2]OUT2(36) 30 (26) -25No.PF-OMM0004-D 2 [F 1] [F] 2 [F 1] OUT1 60 ON OFF 50% 5% ON OFF [F 2] OUT2 36 ON OFF 50% 5% OUT1 ON OFF 50 5 -26No.PF-OMM0004-D / [F3] 42 1 [F10] 43 [F20] 47 [F22] 48 OFF [F30] 50 OFF[] [F80] 51

IDUS/IDFS

(C) Outlet air press. dew point (C) Ambient temp.

Stainless Steel Heat

x 3 x 60 = 2736g/h. 6 7 8 3 1 2 3 4 5 Dew point conversion chart 60 50 40 30 Pressure dew point C 20 10 1.5MPa 1.3MPa 1.1MPa 0.9MPa 0.7MPa 0.5MPa 0.3MPa 0.1MPa Atmospheric pressure 0 -40 -30 -20 -10 -60 -50 -60 -50 -40 -30 -20 -10 0 10 20 30 Atmospheric pressure dew point C 8 Series IDUS/IDFS Safety Instructions These safety instructions are intended to prevent a hazardous situation and/

LECP6_C

B RESET 49 - +JOG +1-052 B RESET 1-096 C RESET (1-097) C RESET OFF JOG OFF 1-098 OFF DRV C RESET ON SVRE ON DRIVE ON 1-099 SETOFF DRV C RESET 12 (1-103) C RESET 1 [] A [a ] 2 [SW] [] A [a ] () (1-106) C RESET SVON 1 1-144 RESET SVON (1) D 50 - ON (M24V) 1-145 RESET SVON (1) D 1-146 RESET SVON (1) D (C24V) RESET SVON (1) 1-147 D (1-148) RESET SVON

4-channel Flow Monitor ( compatible)

Normal output Reversed output -100No.PF-OMA1011-A Specifications Model PFG20# series PF2A5 PF3W5 PF2D5 Applicable flow sensor 10 50 11 21 51 04 20 40 11 25 04 20 40 Rated flow range 1 to 10 5 to 50 10 to 100 20 to 200 50 to 500 0.5 to 4 2 to 16 5 to 40 10 to 100 50 to 250 0.4 to 4 1.8 to 20 4 to 40 L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min 0.35 to 1.7 to

Fieldbus System

N.O. 2 2-position double (Rubber) 4-position dual 3-port valve (C) (A) 4 (B) 2 (A) 4 (B) 2 C: Locking type (Manual) Note) C 5 (R1) 3 (R2) 1 (P) 1 (P) 5 (R1) 3 (R2) N.C.

1.63

MGPWM Common Dimensions (mm) A E Standard stroke (mm) Bore size (mm) B C DA DB FA FB G GA GB H J K L 50 st or less Over 50 stroke 50 st or less Over 50 stroke 20 25 32 40 50 63 44.5 47 52 56 60.5 67.5 34 35 37 41 42 49 10 10 14 14 18 18 10 12 16 16 20 20 7.5 9 10 10 12.5 12.5 3 3 5 5 6 6 36 42 48 54 64 78 9.9 10.3 11.4 13.5 14 15.5 7.5 8.7 9 10.5 11.1 13.5 137 157 190 206 258 286 18 21 24

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

dimensions Bore size (mm) Standard stroke (mm) B C DA FA FB G GA GB GC H HA IA IB IC ID IE 10 14 14 100 44 16 12 44 54 120 M6 34 52 6.5 14 4 40 25, 50, 75 100, 125, 150, 175 200, 250, 300, 350 11 12 14 107 44 20 16 47 64 148 M8 35 64 6.8 19 50 7 13.5 16.5 115 49 20 16 50 78 162 M10 38 77 7.5 19 63 16.5 6.5 Bore size (mm) J K L MM ML NN OA OB OL P PA PB PW Q R S T U VA 18 27 27 40 20 6.6 11

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

Nil Nil Without auto switch c 20S 1 pc.

Adsorption Plate

Adsorption surface size 9 SP1130 SP1230 50 x 50 80 110 20 50 65 95 70 5 100 x 100 130 160 20 100 115 145 95 A D Rc 1/8 (Suction port) C F F B D G E E 8 x 5.5 drill Element fixing nut N pcs. 9.5 depth of counter bore 7 (mounting hole) A B C D E F G N Part no.

A

80 Rated coil voltage 100VAC (50/60Hz) 200VAC (50/60Hz) 110 to 120VAC (50/60Hz) 220VAC (50/60Hz) 24VDC 12VDC Other 1 2 3 4 5 6 9 For soft start-up valve Note) The grommet type can have a surge voltage suppressor (direct coupling type lead wire), but without indicator light.

LVQ

LVQ20 C A B D (Max.

PF-OMN0011_C

1 OUT1OUT2[P_2][n_2] [ tn][ tp] [F 1]OUT1(26)[F 2]OUT2(34) 28 (23 ) -22No.PF-OMN0011CN-C 2 [F 0] [F] 2 2 [F 0] 25 4 L/min [F 1] OUT1 26 ON OFF 50% 5% ON OFF [F 2] OUT2 34 () ( ) ON OFF 50% 5% OUT1 -23No.PF-OMN0011CN-C [F 3] 40 1 [F10] 41 [F20] 45 [F22] 46 OFF [F30] 48 OFF [F80] 49 () [F81] 50 OFF [F82] 51 [*] [F90] 52 OFF [F96] 53 () [F97] 54

PSxx-OMU0005CN

-2No.PS-OMU0005CN-C / *3) 1 1.5 3) 1 1 -3No.PS-OMU0005CN-C () () () () -4No.PS-OMU0005CN-C () * UL UL1310 2 UL1585 2 30[Vrms] 42.4[V ]2 UL (1 20 ) -5No.PS-OMU0005CN-C * FG (35 N () ,() *() 6 33 () () 30m DC(-)() () * -6No.PS-OMU0005CN-C ( ) () CE -5~50(5 ) * , 1015 10 1% 2365 LCD * -7No.PS-OMU0005CN-C 3 ISE20B -0.100~1.000MPa ZSE20B 0.0~-101.0kPa Y ZSE20BF -100.0~100.0kPa

ML2B

Horizontal and lateral Mounting Vertical Mounting 50 RS H A 2.

ML2B

D A B Side support B MY-SB 2-J C D A B (mm) A 61 70 87 B 75 84 105 C D E F G H J Part no.

VCW

Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.

CEx-OMQ0010

P PNP C E U 1 C E U 5 AC80120V AC100240V DC24V DC24V NPN RS-232C P PNP RS-232C+BCD NPN P PNP C E 1 R *1) (CE1-ROOC) 05 5m 10 10m 15 15m 20 20m *1)() C ()(CE2)(CE2**-*Z ) CE1-ROOC CE1-RO5 CE1-R10 CE1-R15 CE1-R20 CE1-R*C 11 3 100 200 200 NO 100 80 YES 100 100 80 kgf kgf 63 NO 63 50 50 40 40 YES 100 100 300 300 200 400 500 200 400 500 NO mm/s mm/s OK YES NO NO YES

Heavy Duty Stopper Cylinder

Lateral load F = mg [N] (g: Gravitational acceleration = 9.8 [m/s2]) Mass of transferred object m [kg] RSQ RSG Friction coefficient RS2H RS2H RSH P: Operating pressure of the cylinder [MPa] MIW MIS D-X 593 Heavy Duty Stopper Cylinder 50, 63, 80 RS2H Series RoHS How to Order D 30 RS2H 50 L M9BW Bore size 50 63 80 50 mm Port thread type Number of auto switches (auto switch number mounted)

Compact and Lightweight

ZA A B t 2 x D ZX C ZM ZL ZH ZH ZH ZH -X267 ZH13 to 20DA 2 x D B ZHP A F E C ZU VQD-V Long clamping screw set for 1 station required for assembly needs to be ordered separately.