“

OUT side passage IN side passage y u t OUT IN i o Basic type (Knob): IR32l0-A e e r q r w e OUT side passage IN side passage t u OUT IN o i Basic type (Knob): IR32l1 2-A e e r q r w e OUT side passage IN side passage t u OUT IN o i 782 Regulator IR1200-A/2200-A/3200-A Series Dimensions Basic type (Knob): IR12l0-01l-A 10.5 42 ARJ 1.6 Bracket AR425 to 935 Mounting hole for hexagon panel nut

OMU0023

65 41 A 97 61 a 2 2 STX 34 22 " 66 42 B 98 62 b 3 3 ETX 35 23 # 67 43 C 99 63 c 4 4 EOT 36 24 $ 68 44 D 100 64 d 5 5 ENQ 37 25 % 69 45 E 101 65 e 6 6 ACK 38 26 & 70 46 F 102 66 f 7 7 BEL 39 27 ' 71 47 G 103 67 g 8 8 BS 40 28 ( 72 48 H 104 68 h 9 9 HT 41 29 ) 73 49 I 105 69 i 10 0A LF 42 2A * 74 4A J 106 6A j 11 0B VT 43 2B + 75 4B K 107 6B k 12 0C FF 44 2C , 76 4C L 108 6C l 13 0D CR 45 2D

XL-OMV0002

KF ) Fn J H B A G A mm A B C D E Fn G H J XLC-16 40 110 38 1 30 17 40 26 XLC-25 50 120 48 1 12 40 26 39 27.5 XLC-40 65 171 66 2 11 55 41 63 36 9 XL-OMV0002 4-2.162580,100,160 C E D C E E (KF ) (K ) Fn Fd J K H B A G A mm A B C D E Fn Fd G H J K XLC-50 70 183 80 31 10.5 75 52 77 29 10.5 XLC-63 88 209 100 39 11 87 95 70 76.5 36 9 XLC-80 90 250 117 45.5 11 114 110 83 105 44 9 XLC-100 108 317.5

Rotary Table

On size 70, 100 and 200 the bearing cannot be removed as the bearing is press-fitted.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

r e w q r e w q VG VP S070 VQ VKF N.C.

CE2

Relay, PLC 100 V Reed switch Solid state switch PLC 100 V, 200 V Relay, PLC 12 V Yes Yes 24 V 2-wire Terminal conduit PLC 100 V, 200 V Relay, PLC DIN terminal Grommet Diagnostic indication (2-color indication) 3-wire (NPN) 3-wire (PNP) 5 V, 12 V 24 V IC circuit Grommet 100 V, 200 V 2-wire 12 V IC circuit 3-wire (NPN) 2-wire Terminal conduit 5 V, 12 V Relay, PLC 12 V 3-wire (NPN

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VKF (A) 2 (A) 2 VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts Description Material Note No.

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 C 15 25 35 45 E 4.9 6.4 8 11.7 F 3 4 5 6 H 3.4 4.5 5.5 6.6 G 6.5 8 9.5 11 A 61 67 81 100 120 142 172 D 26 38 50 64 B 71.6 79.6 95 118 142 164 202 Applicable cylinder MY1W16 MY1W20 MY1W25 MY1W32 MY1W40 MY1W50 MY1W63 Model MY-S16A B MY-S20A B MY-S25A B MY-S32A B M10 x 1.5 55 14.8 8.5 9 14 80 MY-S40A B M12 x 1.75 70 18.3 10.5 11.5 17.5 100 MY-S63A B Guide for

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

3r#0q u @9#2 e y!6#1@8t!2w#3!5 !7 !8 @1 @6 14A !9 @0 CJ1 CJP @7 i o CJ2 80, 100 CM2 C85 !0 !1 CG1 @2@3@4@5 14B MB Locking at rod end C95 CA1 CS1 Manual release non-locking style: L Material Note Component Parts Material Note Component Parts No. q w e r t y No. !7 !8 !

VG342

DIN terminal Terminal 1 2 + + Pilot Valve Assembly Specifications Grommet (G), Grommet terminal (E), Conduit terminal (T), DIN terminal (D) Electrical entry How to Change Passage State Enclosure Dusttight Lead wire color 100 VAC: Blue, 200 VAC: Red, 24 VDC: Red/Black AC (50/60 Hz) 100, 200, 24, 48, 110, 220, 240 Coil rated voltage (V) 24, 6, 12, 48, 100 DC Allowable voltage fluctuation

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

69 96 H P.C.D L1 6-4.4 6-6.6 8-8.4 L2 XMA-16 XMA-25 XMA-40 XMA-50 XMA-63 XMA-80 40 50 65 70 88 90 P.C.D 27 P.C.D 58.7 P.C.D 92.1 XYA/In-line type C D G Fd C (K flange) B H 45 A E Fn (KF flange) (mm) Model A 79.5 106 119 149 178 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 64 84 95 118 142 H XYA-25 XYA-40 XYA-50 XYA-63 XYA-80 100.2

Process Valve

: E) In the case of EZ or TZ, the length is longer by 10 mm.

180

8 e w !7 t !5 r o !8 e !6 w @0 !7 t !5 r o !8 e !6 w @0 !7 t !5 !0 u !2 i q !1 !4 y !9 !0 u !2 i q !1 !4 y !9 !0 u !3 !2 i q !1 !4 y !9 Open condition Component Parts Note No.

LV50-OMQ0002

LFE3 0.02 0.015 P r essur e l oss[ M P a] 0.01 0.005 0 0 50 100 150 200 Fl ow r at e[ L/ m i n] -67No.LV50***-OMQ0002-G IN side straight pipe length (reference value) Straight pipe length Straight pipe length Change of accuracy [%F.S.]

Compact Type

(Refer to page 15 regarding the detailed specification for contact protection box): q In the case operation load is an inductive load. w In the case the wiring length to load is more than 5 m. e In the case the load voltage is 100 VAC.

Compact Type Dual-Rod Cylinder Series CXSJ

V = over 400 mm/s; up to 100 mm stroke 14 15 CXSJM CXSJL Graph V = over 400 mm/s; up to 75 mm stroke 1 1 Weight m (kg) Weight m (kg) 32 32 0.1 0.1 25 25 20 20 10 15 15 0.01 0.01 0 20 40 100 60 80 0 20 40 100 60 80 Overhang L (mm) Overhang L (mm) 6 Series CXSJ Construction: Standard Piping CXSJM (Slide bearing) CXSJL (Ball bushing bearing) CXSJM6 CXSJL6 !

Series AP3500

q e r q e r q e r q e r w w w w 125 Process Gas Equipment / Diaphragm Valve Specific Product Precautions Be sure to read before handling.

70pvvna

PB Note) Parts e and r are for selection of valve composition.

ZL3-OM00601

3/E) port Rc1,G1,NPT1 3638 10 Doc.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

2 i r i t y w w e !0 !0 !2 !5 o !0 !4 q q y u !1 !3 r t !1 M5 type U10/32 type M5 type U10/32 type !1 y !2 u !4 !3 i !5 u e r r t w e o !0 i o q q t y !0 !2 w !