HRX-OM-Q026

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-15 Connection of RS-232C HRSH Series 3.3 Installation 3-27 HRX-OM-Q026 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

End Lock Cylinder Series CBJ2

) 2 (same surface) 2 (different surfaces) 1 3 (same surface) 3 (different surfaces) 2 (same surface) 2 (different surfaces) 1 90 55 50 15 10 105 60 60 15 10 105 65 65 15 10 115 75 65 25 15 35 10 5 45 10 5 40 15 10 45 5 5 30 5 5 55 15 10 40 15 10 60 15 15 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 D-C7 D-C80 D-A7H D-A80H D-H7 D-H7W D-H7BAL D-H7NF Band mounting D-A79W Rail mounting D-F7

EXxx-OMY0006CN

/PL / OSSD SIL 2 2 2 3 3 3 3 3 SIL CL 2 2 2 3 3 3 3 3 * 2 2 4 3 4 ** 4 3 Cat. 3 PL d d d e d e e d *:Cat. 3 EN13849-2 2 N.O. **:Cat. 18 No.EX##-OMY0006CN 3.3.8. SI 0 SI 0 A SI 1. 2.I/O 3.SI 4. 5. 10 0 I/O 0 "0"= SI 72 72 SI 72 SI SI 16 SI SI SI SI 0 16 19 No.EX##-OMY0006CN SI SI SI 16 SI SI 20 D 3.3.9. GSDMLFDCML 3.4.

Lubrication Equipment

(Turn proof structure at pressurized state) 1.17-2 AL1000 to 6000 Standard Specifications AL1000 AL2000 AL3000 AL4000 AL4000-06 AL5000 AL6000 Model 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 M5 X 0.8 Port Size Air 1.5MPa 1.0MPa Fluid Proof pressure Max. operating pressure 1/4: 30 3/8: 40 1/2: 50 130 1/4: 30 3/8: 40 50 Min.operating flow (l/min (ANR))(1) 50 190 220 4 15 130 130 130 7 25

Series 11-CRA1-Z Rack & Pinion Type Rotary Actuator Size: 30, 50

Rack & Pinion Type Rotary Actuator Series 11-CRA1-Z Size: 30, 50 RoHS How to Order 11 Vacuum suction type Clean series Nil Auto switch No D Built-in magnet B Mounting Basic L Foot Shaft type S Single shaft W Double shaft 30 Size 50 11 C D R A 1 B S 50 90 Z M9B Rotating angle Number of auto switches 90 180 100 90 180 100 190 Nil S 2 pcs. 1 pc. 190 Type of auto switch (For model with auto switch

LFE-OMY0008

[%F.S.] 2 1 0 OUT OUT OUT OUT 0 D 2D 3D 4D 5D IN IN IN IN 0 1 2 3 4 5 5 (5D) [] [] LFE13/8 inch 0.2 MPa LFE23/4 inch LFE31 inch (mm) D 5 D LFE1 11 55 LFE2 21 105 LFE3 27 135 68 No.LFE*-OMY0008 4.0 3.5 3.0 2.5 [%F.S.]

Slit Valve

CAUTION 184 49 49 Cassette type Half MESK/XGT223 340 A 50 305 44 36 112 50 B 365 !

ZP3

B C D E Y q Pad dia.

VKF300

Hole diameter 5 9 Features 1 3 Port Direct Operated Poppet 3 Port Direct Operated Poppet Solenoid Valve Series VKF300 How to Order Valves Electrical entry Rated voltage 100VAC 50/60 Hz 200VAC 50/60 Hz 110VAC 50/60 Hz 220VAC 50/60 Hz 24VDC 12VDC 240VAC 50/60 Hz Other DO-DIN terminal (without connector) 1 2 3 G-grommet (lead wire length: 300mm) H-grommet (lead wire length: 600mm) D-DIN type

3 Port Air Operated Valve Series SYJA300

Unrestricted Base mounted 300/50 SA Note 1) Be certain that pressure within operating pressure range be supplied to supply port, because return pressure is introduced from supply port {1(P)} for activation. Note 2) Impact resistance: No malfunction resulted from the impact test using a drop impact tester.

ZQ-OM01401

-10 to 60 [%RH] ,35 to 85 [ACV] 1000 1 [M] 50 (DC500V ) 2 (%) F.S. (-5 to 50 25) 2 (AWG26) 5 3.5 2m 0.15mm 1.0mm CE / UKCA (EMC RoHS ) 1 34 - No.ZQ-OM01401-B 10.

INFORMATION Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve For connecting to F.R.L. units AC25-A AC30-A AC40-A VP500 IN OUT VP700 Allows for space saving and reduced piping labor. Power consumption: 0.35 W (Without light) EXH Exam

(Default settings) Solenoid Specifications Electrical entry DIN terminal (D) DIN terminal (Y) D, Y Coil rated voltage [V] DC 24, 12 AC (50/60 Hz) 100, 110, 200, 220 Allowable voltage fluctuation 10% of rated voltage*2 Power consumption [W] DC Standard 0.35 (With light: 0.45) 100 V 0.78 (With light: 0.87) 110 V [115 V] 0.86 (With light: 0.97) [0.94 (With light: 1.07)] Apparent

Multi-Axis Step Motor Controller

Step Axis Movement mode Speed Position Acceleration Deceleration Pushing force Trigger LV Pushing speed Moving force Area 1 Area 2 In position Comments mm/s mm mm/s2 mm/s2 mm mm mm Axis 1 ABS 500 100.00 3000 3000 0 85.0 50 100.0 10.0 30.0 0.5 Axis 2 ABS 500 100.00 3000 3000 0 85.0 50 100.0 10.0 30.0 0.5 0 Axis 3 ABS 500 100.00 3000 3000 0 85.0 50 100.0 10.0 30.0 0.5 Axis 1 INC 500 200.00

JXCx-OMT0028CN

) (1-145) RESET SVON D (1-146) RESET SVON D (C24V) (1-147) RESET SVON D 63 - (1-148) RESET SVON D (1-149) RESET SVON D () (1-150) RESET SVON D (1-192) E ON(SVON ON) (1-193) E ON(SVON ON) (1-194) E (1-195) E E EEPROM (1-197) E (EEPROM 10 ) CPU (CPU ) CPU (1-198) CPU E 64 - Revision history No.JXC-OMT0028CN 2018 3 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN

NAMUR

) NPT Nil F N Voltage Manual override/Classification C F H J P V Y Z 9 1 2 3 4 5 6 7 8 A B 115 VAC, 50/60 Hz 32 VAC, 50/60 Hz 42 VAC, 50/60 Hz 230 VAC, 50/60 Hz 100 VDC 6 VDC 48 VDC 110 VDC Other voltages 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 to 120 VAC, 50/60 Hz 220 VAC, 50/60 Hz 24 VDC 12 VDC 240 VAC, 50/60 Hz 48 VAC, 50/60 Hz 12 VAC, 50/60 Hz 24 VAC, 50/60 Hz Electrical entry Non-locking

Stainless Steel Cylinder Series CJ5-S/Series CG5-S

Plug Series Variations Bore sizes (mm) Seal materials Applicable auto switches 10 16 20 25 32 Series 40 50 63 80 100 Water resistant D-H7BAL CJ5-S NBR FKM Water resistant D-G5BAL CG5-S Related Equipment P. 18 Water Resistant Air Cylinders Speed Controller with One-touch Fittings/Stainless Steel Series AS-FG P. 20 One-touch Fittings/Stainless Steel Series KG P. 21 Miniature Fittings MS P.

PA3000/5000/PAX1000

Printed in Japan. 1st printing September, 1999 D-SMC.L.A. P-80 (D)

AC Servo Motor Driver (Pulse input type/Positioning type)

Target position Rotation speed Dwell Auxiliary time constant time constant [10STMm] [r/min] [ms] function [ms] [ms] 1 5.00 3000 100 150 100 1 2 -6.00 2000 100 100 0 3 3 3.00 3000 50 50 0 0 (Note) Note.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 10, 16 20 25, 32 12, 16 20, 25 32, 40 6, 10 15, 20 25, 32 6, 10 16 20, 25 32, 45 6, 10 16 20, 25, 32 40, 50 10, 15 25 12, 16 20, 25 Bore sizes (mm) 5 to 50mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50mm/s Piston speed Shock absorber (optional

SMC Electronic Switch Series Variations

Between external terminals and case 1000V AC 50/60Hz for 1 min.