Table of Contents

100 90 ZQ Vacuum pressure (kPa) Vacuum pressure (kPa) 80 80 70 70 ZF 60 60 50 50 ZP 40 40 30 30 ZCU 20 20 10 10 AMJ 0 0 10 20 30 40 50 60 70 80 90 100 110 120 20 60 100 140 180 220 260 300 130 Suction flow rate (/min(ANR)) Suction flow rate (/min(ANR)) Misc.

2/3 Port Valve

90 55 70 45 23 18 0.3 0.4 7 3 8 0.6 0.7 1 2 3 4 0.9 1.0 1.4 1.5 1 1 4 1 2.5 2.6 5.7 5.8 32 1 2 1 4.1 4.2 7.7 7.8 40 Symbol 6.3 6.4 2 N.C.

Stroke Reading Cylinder and Counter

to 264 VAC 21.6 to 26.4 VDC 90 to 264 VAC 21.6 to 26.4 VDC 90 to 264 VAC 21.6 to 26.4 VDC 90 to 264 VAC 21.6 to 26.4 VDC Power consumption 20 VA or less 10 W or less 20 VA or less 10 W or less 20 VA or less 10 W or less 20 VA or less 10 W or less Between case and AC line: 1500 VAC for 1 min.

NAAMS Standards Compliant

size: 63, Arm opening angle: 90, Distance to the center of gravity L: 250 mm Calculation example With an arm opening angle of 90 and a 250 mm distance to the center of gravity, according to the graph, the maximum allowable load mass is 4.0 kg. 10 CKZ3N -X2742A -X2568 Setup Procedure Precautions 1) The tightening torque of the clamp arm is 12 to 15 Nm for 50 and 15 to 20 Nm for 63.

RHC

145 120 20 13 25 63 30 90 116 40 80 0.074 37 Up to 1500 0 Data ZZ 6.8 to 11.3 WH P 310 S 1/2 MM 215 NF M18 x 1.5 H1 58 NE 27 H 11 ND 25 GA 80 K 31 FZ 16 JC 7 I 75 Bore size (mm) 50 116 63 310 1/2 215 M18 x 1.5 27 11 24.5 80 31 16 7 124 75 72 80 8.5 to 13.5 336 3/4 228 M22 x 1.5 32 13 30.5 90 37 20 10 155 78 89 100 351 3/4 236 M26 x 1.5 41 16 34 95 47.3 20 10 172 80 110 10-6-15 15 Series

CJ2

Single acting, Spring return (S), Clevis style is available only for 90 to the axis. Not applicable to single acting, spring extend (T). Applicable Auto Switch/Refer to page 6-16-1 for further information on auto switches.

Series AP500

3) AP501 0.5 to 10 psig (0.0034 to 0.07 MPa) AP502 0.5 to 30 psig (0.0034 to 0.2 MPa) Operating Parameters Delivery pressure Gas Source pressure Proof pressure (Inlet) Burst pressure Ambient and operating temperature Cv Inboard leakage Outboard leakage Leak rate Across the seat leak Surface finish Connections Supply pressure effect Installation Internal volume Mass 1) 14 to 194F (10 to 90

Electric Actuator / Slider Type 《 AC Servo Motor 》

Store in an area that is shaded from direct sunlight and has a temperature and humidity within the specified range (-10C to 60C and 90%RH or less No condensation or freezing). 3. Do not apply vibration and impact to the product during storage. 36 - 6.5 Maintenance Warning 1. Do not disassemble or repair the product. Fire or electric shock can result. 2.

CM2

115 140 165 36 18.2 32 72 85 97 110 135 160 185 12.5 25 37.5 50 75 100 125 52 65 77 90 115 140 165 36 18.2 40 77 90 102 115 140 165 190 12.5 25 37.5 50 75 100 125 54 67 79 92 117 142 167 46 20.2 Built-in One-touch fitting With rod boot With air cushion (mm) Symbol Bore ZZ Bore WA G N1 WB P Q Stroke 1 to 50 17.5 13 8 8.5 6 23 20 20 Bore 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400

SMC Basic Pneumatics

n) t 5 20 25 30 40 50 65 80 100 125 Elbow 0.3 0.4 0.5 0.7 0.8 l . l 1.4 1.8 2.4 3.2 90' Bend (lono) 0.1 0.2 0.3 0.4 0.5 0.6 0.8 0.9 1.2 1.5 90' Elbow 1.0 1.2 1.6 1.8 ?.

High Power Cylinder Series RHC

116 40 80 0.074 ZZ WH 305 S 6.8 to 11.3 H1 58 P 215 H 11 NF 1/2 GA 80 NE 24 FZ 16 ND 25 FY 116 MM 27.7 K M18 x 1.5 JC 7 I 75 Bore size (mm) 50 53 305 215 11 1/2 80 24 16 24.5 124 27.7 60 M18 x 1.5 7 75 72 63 328 8.5 to 13.5 228 13 3/4 90 32 20 30.5 155 37 75 M22 x 1.5 10 78 89 80 341 236 16 3/4 95 41 20 34 172 47.3 90 M26 x 1.5 10 80 110 100 8 Series RHC Dimensions/Rear Flange Type 20 to

%silltr

n) t5 20 25 30 40 50 65 80 100 125 Elbow 0.3 0.4 0.5 0.7 0.8 l . l 1.4 1.8 2.4 3.2 90' Bend (lono) 0.1 0.2 0.3 0.4 0.5 0.6 0.8 0.9 1.2 1.5 90' Elbow 1.0 1.2 1.6 1.8 ?.

C95Series

lJlO 11 4 120 90 15 158 132 1 84 26 13.5 24 17 75 100 129 2S +

High Vacuum Angle Valve

5 XLAV16-90-2 (XLAV63-90-1 only for XLFV-50-2) XLAV63-90-1 * The -mm at the end of the solenoid valve part number is the selection symbol for voltage, electrical entry, and other specifications.

MK

Example) M5 x 75l (MK2B) MK232/40 10 2 ML2B 6 Moment of inertia (kgm2) C J G5-S 4 MK220/25 CV 2 Mounting bolt 10 3 MVGQ 6 CC 4 Flat washer Operating range RB 2 Note) Be sure to use a flat washer to mount cylinders via through-holes. 10 4 J Model C D 75 85 80 90 90 100 80 90 105 135 105 135 Mounting bolt M5 x 75l M5 x 85l M5 X 80l M5 x 90l M5 x 90l M5 x 100l M5 x 80l M5 x 90l M6 x 105l M6

240

force [%] Duty ratio [%] Continuous pushing time [minute] 70 100 LEY -X5 80 70 10 11LEFS 100 50 5 11LEJS LEPY10 (Basic) LEPY10L (Compact) 25A50 60 LEC 50 LEC S 40 Lead 5 (LEPY10K) Lead 5 (LEPY10LK) LEC SS-T 40 30 Force [N] Force [N] LEC Y 30 20 Motorless Lead 10 (LEPY10J) Lead 10 (LEPY10LJ) 20 10 LAT 10 LZ 0 0 60% 70% 80% 90% 100% 50% 60% 70% 80% 90% 100% LC3F2 Set value of pushing force

Environment

or less (No condensation) 90 or less (No condensation) Regeneration option May be required depending on speed and work load.

Floating Joint

89 22 28 70 78 49 3 55000 10.3 200 JAL200-45-150-X530 45 1.5 220 116 55 96 74 48 151 90 89 22 28 70 78 49 3 55000 10.4 Rod End Nut Floating Joint Replacement Parts Dust cover When the dust cover is damaged and deteriorated, order with the part number below.

Air cylinder (Series compatible with secondary batteries)

Bore size(mm) Auto swich model 40 50 63 80 100 D-A9-900 D-M9-900/M9V-900 D-M9W-900/M9WV-900 90-BA7-040 90-BA7-040 90-BA7-063 90-BA7-080 90-BA7-080 Table 5 Operating Range Bore size(mm) Auto swich model 40 50 63 80 100 D-A9-900 7.5 8.5 9.5 9.5 10.5 D-M9-900/M9V-900 D-M9W-900/M9WV-900 4.5 5 5.5 5 6 Values which include hysteresis are for guideline purposes only, they are

3-Position Rotary Table

(CCW: Counterclockwise, C: Center, CW: Clockwise) C C C C CW CCW CW CCW CW CCW CW CCW Left 90: Right 90 Left 45: Right 45 Left 90: Right 30 Left 60: Right 90 Working Principle This model uses a 3-position 5-port solenoid valve (pressure center).