Fieldbus System

Refer to page 15 for a table of mountable units. 2 Series EX600 SI Unit Specifications All Units Common Specifications Environmental resistance Communication Output Output Communication Operating temperature range 14 to 122F Storage temperature range 4 to 140F Operating humidity range 35 to 85% RH (No dew condensation) Withstand voltage Note) 500 VAC for 1 minute between external terminals

LEY-OM007

INP 1 INP ON 0.50 2 INP ON a bINP ON < / [mm/sec] [mm/sec] 1 4 30% 1 4 40% 5 20 35% 5 20 60% LEY*16** 21 50 60% 85% LEY*16*A* 21 50 80% 95% 1 4 20% 1 4 40% 5 20 35% 5 20 60% LEY*25** 21 35 50% 65% LEY*25*A* 21 35 80% 95% 1 4 20% 5 20 35% LEY*32** 21 30 60% 85% -41- LEY*16** LEY*25** LEY*32** LEY*16*A* LEY*25*A* A B C A B C A B C A B C A B C [kg] 1 1.5

Modular F.R.L. Unit

1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 1 41.5 43 30 24 33 12 5.5 50 29.5 5.5 3.2 65 2 Note 1) 141 123 36 60 126 55 57 41 35 14 7 71 28.5 7 4 64 0 194 153 38 80 167 55 57 41 35 14 7 7 4 71 66 30.5 3.5 194 153 38 80 167 72.5 75 50 40 18 9 9 4 88 74 35 3.5 226 187 40 110 220 77.5 80 50 40 18 9 88 35 9 4.6 74 3 226 187 38 110 235 93 96 70 50 20 11 115 44.5 11 6.4 84 3.3 303 264 43

Rubber seal 5 Port Solenoid Valve Series SYJ7000

connector (M): SYJ7120-M-01 (-F) M8 connector (W0): SYJ7120-W0-01 (-F) DIN terminal (D): SYJ7120-D-01 (-F) Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 65 31.5 [38.5] 101 Max. 10 57.5 16.1 46.2 31.1 M8 x 1 36 (Lead wire length) 18.5 42.6 [49.6] Approx. 300 Pg7 91.9 [94.1] 101.9 82.1 [84.3] 91 83.6 77.1 61.1 35 35 35 35 28.3 28.3 28.3 28.3 21 21 21 2-3.2 (For mounting) 25

KR

36 32 6 1 4 14 17 33 39.5 33.5 35 41.5 35 13.9 11.0 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 34 41.5 38 27 8 26.3 18.2 17 15.2 24 18.5 15.2 24.5 14 37 44.5 38.5 38 45.5 39 35 41 40 49.5 43.5 19 10 40.8 29.0 42 64 18.5 27 21 18.5 28 16 41 50.5 44 44.5 54 45.5 22 57 58 42.5 53 47 12 1 2 KGLU12-04 22 65 Reference dimensions after R thread installation. 20.9 29 22 20.9 30 18 43.5 54 47.5 46.5 57

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

106 48 5 3H9 (+0.025 0 ) depth 35 3H9 (+0.025 0 ) depth 35 8 46 46 47 47 H G *1 When mounting the actuator using the body mounting reference plane, set the height of the opposite surface or pin to be 3 mm or more.

53

Conditions DC inverter Inverter fan pump Low High Motor rotation rate (For air-cooled type) Inverter pump Power reducing effect of the inverter pump Inverter pump Current model HRSH090 35 L/min 55 L/min Inverter Power consumption (Pump only) Power consumption (Pump only) pump 0.6 kW 1.1 kW Tank Tank 55 L/min 35 L/min 35 L/min 0.3 MPa 35 L/min 0.3 MPa Users equipment Users equipment The motor

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

D A L Series Part no. 10-SZ3000 SZ3000-114-2A Dimensions Applicable fitting size d Model A L D 10-KQP-04 10-KQP-06 10-KQP-08 10-KQP-03 10-KQP-07 10-KQP-09 4 16 32 6 6 18 35 8 8 20.5 39 10 5/32" 16 32 6 1/4" 18 35 8.5 5/16" 20.5 39 10 383 Cassette Type Manifold 10-SZ3000 Manifold Option DIN rail dimensions / Weight D-sub connector (25 pins) / Cable assembly Directional Control Valves Air Grippers

Modular Type Lubricators Series AL

35 45 47.5 E 30 38 38 45 G 35 60 80 110 110 110 110 J 12.5 20 26.5 35 35 45 47.5 M 30 41 50 50 70 70 N 27 40 54 54 66 66 Q 22 23 26 25 35 35 R 5.4 6.5 8.5 8.5 11 11 S 8.4 8 10.5 10.5 13 13 T 40 53 70 70 90 90 U 2.3 2.3 2.3 2.3 3.2 3.2 AL10 AL20 AL30 AL40 AL40-06 AL50 AL60 Model Semi-standard specifications With barb fitting Metal bowl Metal bowl with drain cock Metal bowl with

VQZ1000/2000/3000

Clamp screw (B) 2-7-34 35 35 VQC SQ VQ0 VQ4 VQ5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VQZ VQD 2-7-35 36 36 For details about certified products conforming to international standards, visit us at www.smcworld.com. 5 Port Solenoid Valve Base Mounted Plug Lead

Cylinder with Lock Series MNB

10 40 to 800 30 22 8 52 104 38 16 13 14 16.5 19.5 63 12 4 96.5 27 1/8 91 52.5 14 40 12.5 50 to 1000 35 27 11 65 120.5 46.5 20 14 15.5 19 22.4 75 15 5 111.2 32 1/4 104.5 58.5 18 45 17.5 63 to 1000 35 27 11 75 134.5 56.5 20 14 16.5 23 20.7 90 12 9 123.5 32 1/4 119.5 68 18 45 22 80 to 1000 40 32 13 95 169 72 25 20 19 33 26 102 18 11.5 157 37 1/4 150 81 22 55 25 100 to 1000 40 41 16 114 189

Thermo-chiller

) Ambient temperature 104F (40C) 10 10 8 8 Ambient temperature 113F (45C) Ambient temperature 113F (45C) 6 6 4 4 2 2 0 0 41 [5] 50 [10] 59 [15] 68 [20] 77 [25] 86 [30] 95 [35] 41 [5] 50 [10] 59 [15] 68 [20] 77 [25] 86 [30] 95 [35] Circulating fluid temperature F [C] Circulating fluid temperature F [C] HRS150-W -20/40(50 Hz) HRS150-W -20/40(60 Hz) 20 20 Facility water temperature 90F (32C)

V

Wiring Specs 20 20 Applicable up to 20 Solenoid M A N I F O L D O P T I O N S PORT PLUGS Applicable Fitting Size d A L D Model 16 32 6 KQP-04 4mm 16 32 6 KQP-03 5/32 18 35 8 KQP-06 6mm 18 35 8 KQP-07 1/4 20.5 39 10 KQP-08 8mm 20.5 39 10 KQP-09 5/16 Inserts easily into an unused cylinder port and/or SUP/EXH Ports.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

43 71.5 [72.8] 67.5 81.1 35 C6: MAX. 6 C8: MAX. 6.5 35 (Lead wire length) 300 80.6 [87.1] 300 (Lead wire length) 57.1 [ ] for AC Other dimensions are the same as the grommet

SZ3000

Refer to pages 32 through 35 for safety instructions and common precautions.

ZP

K 49 32.9 24 2.5 M6 x 1 6 10 8 M5 x 0.8 16 50 33.9 25 25 63.6 45.8 35 3.5 12 12 M8 x 1.25 40 71.1 53.3 42.5 4 25 B8 63.6 45.8 35 3.5 M8 x 1.25 8 12 12 M8 x 1.25 40 71.1 53.3 42.5 4 04 06 08 ZP R D B6 D2 Construction p. 117 Adapter Assembly p. 122 Dimensions Per Vacuum Inlet Model K L M Fitting part min. hole size Vacuum inlet direction q Pad dia.

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

BDL (108.5) 10 4.6 10 34.3 101 74.5 35 5.5 28.1 12.7 ADDRESS No.

CG1

Standard stroke range (mm) Long stroke range (mm) Bore (mm) TC GB GA F E AL TB C D B1 ZZ A H H1 I J K KA MM NA P S TA WA WB W WH 30 12 12 12 13 14 14 20 20 2 2 2 2 2 2 3 3 12 14 18 25 30 32 40 50 14 11 11 20 25 32 40 50 63 80 100 8 10 12 16 20 20 25 30 18 22 22 30 35 35 40 40 15.5 13 17 17 19 27 27 32 41 10 (12) 35 5 6 6 8 11 11 13 16 26 31 38 47 58 72 89 M4 X 0.7 Depth 7 5 6 8 10 14 18 18

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

Series ANB1 38 dB (A) 30 m Page 5-10-9 Exhaust cleaner Ensures clean plant air, reduces noise pollution by over 35 dB (A), and removes over 99.9% of all oil mist. 99.9% Series AMC Page 5-10-11 35 dB (A) 0.3 m Page 5-10-13 Precautions/Specific Product Precautions Exhaust Cleaner for Vaccum (Series AMV) Exhaust Cleaner for Clean Room (Series AMP) Page 5-10-15 Related Products 5-10-1 2 Silencer

Guide Cylinder Series MGG

6.6 100 70 130 M10 x 1.5 depth 18 65 30 26.5 35 109 75, 100 125, 150 200, 250 300 M6 x 1 depth 12 19 118 80 11 depth 8 35 100 16 16 60 35 6.6 106 80 73 135 M10 x 1.5 depth 18 35 29 40 129 M8 x 1.25 depth 16 22 150 100 14 depth 10 40 120 19 19 75 50 9 134 95 93 170 M12 x 1.75 depth 21 45 32 50 152 M10 x 1.5 depth 20 22 170 120 17 depth 12 45 150 21 25 90 56 11 152 115 103 194 50 37 55 182