SMC Corporation of America
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Thermo-chiller HRS offers convenient functions, self diagnosis and check display for easy maintenance.? An angled supply port facilitates the supply of circulating fluid, even when units are?stacked.? A?large digital display provides a clear view of the current and set values.? The dustproof filter is integrated with the grill of the front panel allowing mounting and removal of the HRS?filter

Thermo-chiller HRS offers convenient functions, self diagnosis and check display for easy maintenance.? An angled supply port facilitates the supply of circulating fluid, even when units are?stacked.? A?large digital display provides a clear view of the current and set values.? The dustproof filter is integrated with the grill of the front panel allowing mounting and removal of the HRS?filter

www.stevenengineering.com I 6.12 VACUUM VACUUM PADS SERIES ZP H O W T O O R D E R ZPT P A D V E R T I C A L T Y P E W I T H B U F F E R ZPT N P A D D I A M E T E R M O U N T I N G T H R E A D 02 2 04 4 06 6 08 8 10 10 13 13 16 16 20 20 25 25 32 32 40 40 50 50 Symbol Thread dia. 2~8 10~32 40~50 A8 M8X1 Male thread A10 M10X1 A14 M14X1 V A C U U M E N T R Y Symbol Port size 2~8 10~32 40~50

R S T R O K E ( I N C H) S E A L K I T S 6 .CY2B6-PS 10 .CY2B10-PS 15 .CY2B15-PS 25 .CY2B25-PS 32 .CY2B32-PS 40 .CY2B40-PS Bore Size Standard Stroke (inch) Maximum Stroke (inch) 6 2, 3, 4, 5, 6, 8, 10 12 10 2, 3, 4, 5, 6, 8, 10 20 15 5, 10, 15, 20, 25, 30 40 N O N-G U I D E D M O U N T I N GN U T NSNJ-015 (6/10/15) NSN-03 (25/32) NSN-04 (40) 25 5, 10, 15, 20, 25, 30, 40 80 32 5, 10, 15,

1 85 90 35 Stroke + 334 2-T-slot 2 90 62 3-8H 10 depth 20 Stroke + 32 92 Body mounting reference plane 90 (T-slot pitch) 3.3 20 67 5.8 1.7 5.3 62 T-slot 1 dimensions (Switch groove) 8-6.6 92 58 10 10 Stroke + 216 11.5 The body mounting reference plane should be used as a standard when mounting onto equipment.

1 85 90 35 Stroke + 334 2-T-slot 2 90 62 3-8H 10 depth 20 Stroke + 32 92 Body mounting reference plane 90 (T-slot pitch) 3.3 20 67 5.8 1.7 5.3 62 T-slot 1 dimensions (Switch groove) 8-6.6 92 58 10 10 Stroke + 216 11.5 The body mounting reference plane should be used as a standard when mounting onto equipment.

H O W T O O R D E R KDM M U LT I-C O N N E C T O R KDM O U T L E T T U B E O.D. N O O F C O N N E C T I N G T U B E S Inch 01 1/8 03 5/32 07 1/4 mm 23 3.2 04 4 06 6 08 8 10 10 Connections 20 20 Connections Courtesy of Steven Engineering, Inc. ! 230 Ryan Way, South San Francisco, CA 94080-6370 ! Main Office: (650) 588-9200 ! Outside Local Area: (800) 258-9200 !

E O U T S I D E D I A M E T E R Metric (mm) 06 6 08 8 10 10 12 12 Imperial (inch) 07 1/4 09 5/16 11 3/8 13 1/2 3 Universal T Y P E W I T H O N E T O U C H F I T T I N G S P O R T S I Z E Symbol Cylinder Side Pilot Port 01 R(PT)1/8 M5x0.8 02 R(PT)1/4 Rc(PT)1/8 03 R(PT)3/8 Rc(PT)1/8 04 R(PT)1/2 Rc(PT)1/4 F02 R(PT)1/4 G(PF)1/8 F03 R(PT)3/8 G(PF)1/8 F04 R(PT)1/2 G(PF)1/4 N01 NPT1/8 10

VXF(A)2160 Tank 41l 6 x 10 pcs. VXF(A)2160 Tank 41l 6 x 6 pcs. 10 x 12 pcs. 10 x 12 pcs. Without tube (VXF2280) Without tube Without tube (VXF2280) Flow rate Q (Nl) 10 x 12 pcs. 10 x 8 pcs. 10 x 12 pcs. 10 x 8 pcs. VXF(A)2280 Tank 70l 10 x 8 pcs. VXF(A)2280 Tank 70l 10 x 8 pcs. 10 x 10 pcs. 10 x 10 pcs. 100 mm 100 mm 10 x 10 pcs. 10 x 10 pcs. 10 x 8 pcs. 10 x 8 pcs.

is D side mounting only. 10 Note) 10 stations Note) Base 01T/10/40: 2 to 10 stations Base 01C/01F: 2 to 8 stations Including stations of control unit.

Note) D: Max. diameter Applicable tubing T (with seal) Male Branch Tee: KJT Connection thread (T) UNF NPT 10-32 UNF <10-32 UNF> <10-32 UNF> Applicable tubing O.D.

10 114 128 74 8 RZQ T-bracket Dimensions Note) Applicable bore size (mm) Part no.

(Pad diameter: 20 mm or less only) ZP T 10 F N B5 A8 With adapter From p. 62 p. 119 From p. 127 ZP T 10 F N J 10 B5 A10 With buffer From p. 65 p. 120 From p. 129 q w e r t y u Ball joint type w Pad diameter t Buffer stroke q Vacuum inlet direction T Vertical R Lateral (With One-touch fitting) 10 10 13 13 16 16 20 20 25 25 32 32 40 40 50 50 Stroke [mm] Pad diameter [mm] 10 to 16 20 to 50 10

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

1 85 90 35 Stroke + 334 2-T-slot 2 90 62 3-8H 10 depth 20 Stroke + 32 92 Body mounting reference plane 90 (T-slot pitch) 3.3 20 67 5.8 1.7 5.3 62 T-slot 1 dimensions (Switch groove) 8-6.6 92 58 10 10 Stroke + 216 11.5 The body mounting reference plane should be used as a standard when mounting onto equipment.

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

10 12 Applicable tubing O.D. d T L3 L2 H D1 D2 L1 Model Max.

Applicable shaft types: J, K, T Applicable shaft types: J, K, T (mm) (mm) Q1 Q2 L2 + (3 x P) L2 = L2 + (3 x P) K axis (T axis) J axis Shaft type Shaft type J K T J K T Size Size Q1 = M L1 = L1 + (3 x P) L2 = 10 10 Not available Not available 15 15 M3 M3 20 20 M3, M4 M3, M4 30 30 M3, M4, M5 M3, M4, M5 Q2 = M Q2 = M 40 40 M3, M4, M5 M3, M4, M5 Symbol: A37 Symbol: A38 The long shaft can be

Grease pack part no.: GR-S-010 (10 g) Single acting, spring extend 12 16 20 25 32 40 50 CQ2B12-T-PS CQ2B16-T-PS CQ2B20-T-PS CQ2B25-T-PS CQ2B32-T-PS CQ2B40-T-PS CQ2B50-T-PS Set of left nos. !4, !5, !6. Seal kit includes !4, !5, !6. Order the seal kit, based on each bore size. Since the seal kit does not include a grease pack, order it separately.

sizes 10 15 Applicable sizes 10 Shaft types Description Shaft types S, Y J, K, T J, K, T J, K, T J, K, T Symbol Symbol 20 30 40 15 20 30 40 XA39 Shaft through hole Shaft through hole Shaft through hole S, Y K, T J S, Y K, T J XA31 XA33 XA37 XA45 XA47 Shaft-end female threads Shaft-end female threads Stepped round shaft Middle-cut chamfer Machined keyway XA40 XA41 XA42 Shaft through hole