NCA1

Stainless steel w/ composite tube Item No from CHART 1 to reference Par t required M O U N T I N G S T Y L E H O W T O O R D E R S E R I E S NCA1 S E A L K I T NCA1PS B O R E S I Z E R O D T H R E A D R O D S T R O K E 150 1.5 200 2 250 2.5 325 3.25 400 4 500 5 600 6 800 8 100010 120012 140014 7/16-20 7/16-20 7/16-20 3/4-16 3/4-16 3/4-16 1-14 1-14 1 1/4-12 1 1/2-12 1 7/8-12 5/8 5/8 5/8

Air Cylinder NCA1 Series

Stainless steel w/ composite tube Item No from CHART 1 to reference Par t required M O U N T I N G S T Y L E H O W T O O R D E R S E R I E S NCA1 S E A L K I T NCA1PS B O R E S I Z E R O D T H R E A D R O D S T R O K E 150 1.5 200 2 250 2.5 325 3.25 400 4 500 5 600 6 800 8 100010 120012 140014 7/16-20 7/16-20 7/16-20 3/4-16 3/4-16 3/4-16 1-14 1-14 1 1/4-12 1 1/2-12 1 7/8-12 5/8 5/8 5/8

CXS

0 0.01 V = up to 100mm/s V = up to 300mm/s 20 40 60 80 100 0.05 Overhang L (mm) Weight m (kg) Graph V = over 400mm/s; up to 10mm 11 2 CXSM CXSL 1 CXSL6 CXSM6 0.5 0 0.01 20 40 60 80 100 32 Weight m (kg) Overhang L (mm) 25 Graph up to 50mm 9 0.1 20 0.05 V = up to 100mm/s V = up to 300mm/s 0.05 0.04 15 0.03 10 Weight m (kg) 0 0.01 20 40 60 80 100 Overhang L (mm) 0.02 Graph V = up to 400mm/s

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

T79 Grommet 2-wire 12 V T79C Connector S79 3-wire (NPN) IC circuit Grommet 5 V, 12 V Relay, PLC Heavy-duty cord S7P 3-wire (PNP) For 20, 24 V 30 and 40 R73 100 V Grommet R73C Connector 2-wire R80 48 V, 100 V 100 V or less IC circuit Grommet R80C 24 V or less Connector Lead wire length symbols: 0.5 m Nil (Example) R73C 3 m L (Example) R73CL 5 m Z (Example) R73CZ None N (Example) R73CN

SYJ3000/5000/7000

-www.stevenengineering.com 20 20 stations R port 1/8 Applicable individual EXH spacer assembly A, B port M5 x 0.8 M5 M5 x 0.8 A, B port size Applicable individual SUP spacer assembly ARBYJ5000-00-P How to Order Type 41 (5 Port/Base mounted) SS5YJ5 41 05 M5 Stations 02 2 stations P, R port thread type -+ -+ R port 1/8 : : R P Nil F N T Rc G NPT NPTF 20 20 stations A, B port M5 x 0.8 M5 M5

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

Kit Manifold C Connector 2 Body ported Stations 2 stations 02 20 stations 20 How to Order Valve C6 VQZ 1 2 1 1 5 M Port size {4(A), 2(B) port} VQZ2000 VQZ1000 Symbol Port size VQZ3000 Series v v v v v v v C3 C4 C6 C8 C10 M5 02 One-touch fitting for 3.2 v v v v VQZ1000 Body width 10mm VQZ2000 Body width 15mm VQZ3000 Body width 18mm 1 2 3 One-touch fitting for 4 One-touch fitting for

HRS100/150

SMC Thermo-chiller Variations HECR HEC Series Temperature stability [C] Set temperature range [C] Cooling capacity [kW] Environment International standards 1.2 1.8 2.4 3 5 6 9 10 15 20 25 28 HEB HED HRSE Basic type 2.0 10 to 30 V V V Indoor use (Only 230 VAC type) HEA IDH HRS Standard type 0.1 5 to 40 V V V V V V Indoor use (Only 60 Hz) HRS090 Standard type 0.5 5 to 35 V Indoor use (400 V

CV/MVGQ

A34 A44 B59W G59 G5P K59 G39 K39 G59W G5PW K59W G59F 100 V Relay, PLC PLC Yes Yes Relay, PLC 100 V, 200 V 12 V Terminal conduit PLC 24 V 2-wire 100 V 200 V DIN terminal Grommet Relay, PLC Diagnostic indication (2-color indication) 3-wire (NPN) 24 V 5 V,12 V IC circuit 3-wire (PNP) Grommet 100 V, 200 V 12 V 5 V, 12 V 12 V 5 V 12 V 12 V 5 V, 12 V 2-wire IC circuit Terminal conduit

CV/MVGQ

A34 A44 B59W G59 G5P K59 G39 K39 G59W G5PW K59W G59F 100 V Relay, PLC PLC Yes Yes Relay, PLC 100 V, 200 V 12 V Terminal conduit PLC 24 V 2-wire 100 V 200 V DIN terminal Grommet Relay, PLC Diagnostic indication (2-color indication) 3-wire (NPN) 24 V 5 V,12 V IC circuit 3-wire (PNP) Grommet 100 V, 200 V 12 V 5 V, 12 V 12 V 5 V 12 V 12 V 5 V, 12 V 2-wire IC circuit Terminal conduit

Thermo-chiller HRS offers convenient functions, self diagnosis and check display for easy maintenance.  An angled supply port facilitates the supply of circulating fluid, even when units are stacked.  A large digital display provides a clear view of the current and set values.  The dustproof filter is integrated with the grill of the front panel allowing mounting and removal of the HRS filter

Aluminum High Vacuum Angle Valve

XLS-16XLS16-20-G, C, T, D XLS-16-P XLS16-20-PG XLS-25XLS25-20-G, C, T, D XLS-25-P XLS25-20-PG Description Construction No. w y r e-1 e-2 Coil assembly Core assembly Armature assembly O-ring O-ring XLS25-30-1 XLS25-30-2 AS568-018V AS568-030V XLS16-30-1 XLS16-30-2 AS568-018V AS568-025V 465 b

energy saving effect

SMC Thermo-chiller Variations Series Temperature stability [C] Set temperature range [C] Cooling capacity [kW] Environment International standards 1.2 1.8 2.4 3 5 6 9 10 15 20 25 28 HRSE Basic type 2.0 10 to 30 V V V Indoor use (Only 230 VAC type) HRS Standard type 0.1 5 to 40 V V V V V V Indoor use (Only 60 Hz) HRS090 Standard type 0.5 5 to 35 V Indoor use (400 V as standard) Outdoor installation

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Rod End Lock: -R Bore size (mm) WH W P WA WB 20 30 M5 x 0.8 16 15(16) 23 25 30 M5 x 0.8 16 15(16) 25 32 25 Rc 1/8 16 15(16) 28.5 40 20 Rc 1/8 16 15(16) 33 50 20 Rc 1/4 18 17(18) 40.5 63 20 Rc 1/4 18 17(18) 47.5 80 20 Rc 3/8 22 22 60.5 100 20 Rc 1/2 22 22 71 ( ): Denotes the dimensions for long strokes.

Environment

1200 Speed: V [mm/s] Speed: V [mm/s] LEFS40/Ball Screw Drive Horizontal Vertical 70 Lead B 60 30 Work load: W [kg] Work load: W [kg] 50 Lead B Lead A 40 20 30 Lead H 20 10 Lead A/Lead H 10 0 0 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 Speed: V [mm/s] Speed: V [mm/s] 39 LEF Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specication For the LECP6/LECP1/ LECPMJ

Electric Actuator with Integrated Guide

OFF SUP 1MC 5Ry SGDE servomotor Motor 1MC 1 R U V SGDE servo pack 2 1MC M T 3 W 1CN 4 150 PULS PULS SIGN SIGN CLR CLR 1 2 3 4 5 6 Be sure to ground.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

plate assembly SYJ700-10-2A P, R port thread -+ -+ -+ -+ -+ -+ -+ -+ Manifold type Stations Nil Rc G NPT NPTF R P 20 21 Type 20 Type 21 2 stations : 20 stations 02 : 20 00F 00N 00T R P P Port 1/4 R port 1/4 P Port 1/8 R port 1/8 Note) For more than 6 stations for type 20 and more than 9 stations for type 21, supply air to both sides of P port and exhaust air from both sides of R port.

MB

24 V 100 V, 200 V Relay PLC DIN terminal Diagnostic indication (2-color indication) A59W Grommet Y59A Y7P J51 Y59B Y7NW Y7PW Y7BW G39 K39 3-wire (NPN) 3-wire (PNP) 5 V, 12 V 24 V IC circuit Grommet 100 V, 200 V 2-wire 12 V IC circuit 3-wire (NPN) 2-wire 5 V, 12 V Terminal conduit 12 V Relay PLC 3-wire (NPN) 3-wire (PNP) IC circuit Diagnostic indication (2-color indication) 5 V, 12 V

CA2

Reed switch Solid state switch 5 V IC circuit Z76 Grommet Z73 A54 A59W Y59A Y7P J51 Y59B Y7NW Y7PW Y7BW Y7BA F59F 100 V 12 V Yes Relay, PLC 24 V 2-wire 100 V, 200 V Diagnostic indication (2-color indication) Grommet 3-wire (NPN) 3-wire (PNP) 24 V 5 V, 12 V IC circuit Grommet 12 V 100 V, 200 V 2-wire 3-wire (NPN) 3-wire (PNP) IC circuit Relay, PLC 5 V, 12 V Diagnostic indication (2

Compressed Air Preparation Filter

Example) AMK30-N03B-6RZ-D q e r t y w V w Symbol Description Body size 20 30 40 50 60 V q Filter type AMK Activated carbon filter V V V V V + V e Thread type Nil Rc V V V V V N NPT V V V V V F G V V V V V + 01 1/8 V 02 1/4 V V V 03 3/8 V V 04 1/2 V 06 3/4 V 10 1 V V + V r Port size a Mounting Nil Without mounting option V V V V V Option V t B1 With bracket V V V V V + Nil Polycarbonate

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Max. voltage (with no load): 30 Vrms (42.4 V peak) or less Max. current: (1) 8 A or less (including shorts), and (2) When controlled by a circuit protector (fuse, etc.) with the following rating Max. current rating 5.0 100 Peak voltage value No-load voltage (V peak) 0 to 20 [V] Over 20 [V] to 30 [V] 2) A circuit (class 2 circuit) with maximum 30 Vrms (42.4 V peak) or less, and a power supply