Modular Pressure Control Equipment F.R.L. Replacement Procedure

(AR20(K)/25(K)/30(K)/40(K)) AR10 AR20(K) AR25(K) AR30(K) AR40(K) AR20(K)/25(K)/30(K)/40(K) Hook spanner Nominal Tightening torque 2.0 0.2 Nm 2.5 0.2 Nm 3.5 0.3 Nm 4.0 0.4 Nm AR20(K) AR25(K) AR30(K) AR40(K) AR20(K) AR25(K) AR30(K) AR40(K) 34/38 40/42 52/55 52/55 Assembly (Bracket assembly) 1) Mount the bracket to the product.

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

L1 (mm) 400 a = 1000 Pitching Yawing Vertical Vertical m a a = 2000 200 a = 3000 L1 Mep 0 5 10 20 15 Transfer load m (kg) 600 a = 2000 a = 1000 L3 (mm) 400 a = 3000 a 200 L3 Mey 0 5 10 20 15 Transfer load m (kg) Refer to page 145 for deflection data. 82 Non-standard Motor/Vertical Mount Specification Series LJ1H30 Dimensions/LJ1H303PA(X10) Scale: 10% 8H10 depth 10 4-M8 x 1.25 thread depth

SV

SS5V2-10 SS5V3-10 SS5V4-10 Note) The value is for manifold base with 5 stations and individually operated 2 position type.

IDX-OM-Z004

IDX-OM-Z004 6 IDF150F-30-W K16K (10, 0.7m) () (10, 2m) JIS 80A 10K (10,0.7m) ) (10 ( (K16K) JIS 80A 10K 2m) 20 18 t 268 217 t 20 18 t 8x23 8x19 A A 8x23 8x19 20 4x 75 A 1056 A 720 9351 1290 160 150 150 160 t K K K K K16K JIS 80A 10K 64 (17) 17) 40 (K16K) 1823) (18~23) JIS 80A 10K 479 127 1332 1432 1,3 -W4 (-W4) -W4 Y3/4 (-W4) Y 3/4 () () R3/4 R3/4 20 50 165

Basic Type/Direct Mount Type

Q N F I NA F N CC 0.1 + CY3B6 to 15 CY3B50, 63 (mm) B 17 25 35 36 46 60 70 86 100 0.007 0.043 30 32 CC 32 38 D 7.6 12 16.6 21.6 26.4 33.6 41.6 52.4 65.4 E 4 1.5 2 2 2 2 3 8 8 F 8 9 10 13 13 16 16 2 2 G 5 5 5.5 7.5 7.5 8 11 14 14 H 13.5 12.5 13 20 20.5 22 29 33 33 I 28 34 40 50 58 72 J 4.5 4.5 6 6 8 8 10 12 12 K 5 4 11 8 10 15 16 25 26 N 9.5 11 11 18 18.5 20 26 25 25 Q NN S 62 63 83 106 111

VCW

Base material Seal material NBR FKM EPDM PTFE NBR FKM EPDM PTFE Symbol Nil A B C G H J K VX2 10 10 stations C37 Refer to page 172-58/59 in the L dimension table regarding the maximum number of stations.

VCW

Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.

Series MHL2 11- ø10, ø16, ø20, ø25, ø32, ø40 22- Parallel Type Wide Opening Air Gripper

2 x M5 x 0.8 (Vacuum port) 6.5 12 12 11 10 10 1 24 14 S O 20 46 24 30 K 15 (70) 10 24 24 12.5 4 12.5 4 10 30 When open F 17 17 54 4 x M6 x 1 through (Thread for mounting attachment) When open G (mm) J 32 68 88 H 176 276 316 G 138 238 278 F 98 158 178 E 38 80 100 D 87 129 149 B C 58 100 120 A MHL2-20D MHL2-20D1 MHL2-20D2 112211221122136 211 251 54 96 116 MHL2-25D 1122D A B C 12.5 +0.030 4H9

IDX-OM-W017

(Ex.) 9-2 1.6MPa IDFA6E 15E 10 IDF6E15E1-23-K N.O. () ) 0.151.6MPa 9-1 IDFA Series 9 1 IDX-OM-W017 9 K AD48-8-A-X2112 1 KQ2H10-02AS 1 10R1/4 IDFA6E15E1-**-K IDF-S1926 1 1) 20193 20192SERIAL No.XP AD48-8-X2110 IDF-S0086() SMC WEB IDF-S0002 1 C42FP-260S 1 IDF-S0529 1 IDFA Series 9 2 IDX-OM-W017 10 L 10 L 10-1 1. 1 2 2. 3.

Compact Cylinder

L B + Stroke M A + Stroke E 25 Width across flats K M: Rod end male thread H D Hexagon width across flats B1 Rod end nut H1 C X L Rod End Male Thread (mm) Bore size (mm) B1 C D H H1 K L X 20 25 13 14 10 M8 x 1.25 5 8 22 16 13 14 12 M8 x 1.25 5 10 22 16 Basic Style (mm) Bore size (mm) A B C D E F H I K L M N OA OB Q RA RB T 20 25 43 37 10 10 36 5.5 M6 x 1.0 43 8 6 22 4.5 M5 x 0.8 7.5 13 10

Thermo-chiller

mA Output voltage 24 VDC 10% 200 mA MAX (No inductive load) Contact output signal Product side Customer system side 1 Contact input signal COM 1 k 2 Contact input signal 1: Run/Stop (Default setting) 4.7 k 1 k 3 Contact input signal 2: External switch (Default setting) 4.7 k 5 SD+ RS-485 communication 6 SD Internal circuit 7 SG 9 24 COM Circuit diagram Contact output signal 1: Operation

IDX-OM-M051

(O.D.10, Length approx. 2m) Inside diameter 25 (The opposite side (O.D.10, Length approx. 0.7m) 4xEye bolt Compressed Air outlet 4x 20 (For Option K: 16K) Drain tube JIS flange 65A 10K Drain tube condensed water Signal cable outlet Drain tube for 78 9351 18 267 655 8x19 4x19 A A Flange bolt hole Drawing of view A 885 140 1120 140 Other than 18 Option K Model Option K 75 64 (For Option

Cylinder

I z . oG I H K MM I [ flore size; I; # F' B C ~ (mm) . 5" 10" R 5" NN W S!

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Metric sizes Inch sizes Body class Type LQ-GP J 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 6 06 06 06 8 08 4 04 04 04 04 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type only) Nil N Metric size Inch size Nil S Resin Stainless

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.

48

10 x 2), 16 (12 x 2) Standard: JMGPM WA + Stroke/2 Z X 4 x YY depth YL Bottom view WA + Stroke/2 Z 4 x OA through 4 x OB counterbore depth OL 4 x MM depth ML L 2 x P (Plug) (OL) 4 x NN through PW X U H VA PE T R 2 x P (Plug) 2 x P D 2 x P (Plug) GB GA S Q JC J K PD C + Stroke FB FA G A + Stroke [mm] Bore size Standard stroke A C D FA FB G GA GB H J JC K L MM ML NN 12 (10 x 2) 10, 20, 30,

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

-SS5V1-10 10-SS5V2-10 10-SS5V3-10 10-SS5V4-10 Note) The values are for individually operated 2 position type manifold bases with 5 stations.

MXW Series Long Stroke Slide Table

Dimensions MXW 12 Stroke: 100, 125, 150 Operating port 2-M5 x 0.8 Width across hexagon socket hole 2.5 (mm) J 12 Scale: 30% 6.5 5H9 +0.03 depth 4.5 0 Width across flats 8 6-M4 x 0.7 thread depth 6 (Helisert) 6 27 58 46 Y 29 26 103 26 Y L 5H9 +0.03depth 4.5 0 10 15 15 K A 35 20 26.5 A Z Bottom through hole 4.2 N-M5 x 0.8 thread depth 10 (N-1) x H G M5 x 0.8 thread depth 10 GG H 6 depth 4.5

Air Pilot Operated Series NVSA

Klt (when tactory assembted) XX = No. of Stailons DIMENSIONS A B BBD E G H K M N 3.58 (91) 4.61 ( 1 1 4 2.56 (65) 3.58 r) 1.22 (31) 1.50 (38) 0.26 (5.5) 3.29 (83.5) 3.23 (82) 1,42 (36) 2.05 (52) 't.10 (28) 0.59 05) 'Dlmension if DC Sotenold is Used Mlllimeters In Parentheses MANIFOLD DIMENSIONS I-!

MXF

My = 0.5 x 9.8 (10 + 11)/1000 = 0.11 A3 = 11 May = 1 x 1 x 9.14 = 9.14 Mymax = 9.14 K = 1 = 1 2 = 0.11/9.14 = 0.012 Examine Mr.