Speed Controller with One-touch Fitting Elbow Type (Metal Body) AS Series

M5 01 02 03 04 M5 x 0.8 R R R R 1 8 1 4 3 8 1 2 Symbol Specifications -X12 Lubricant: Vaseline -X21 Grease-free (Seal: Fluorine-coated) + Throttle valve (Without check valve) -X214 Throttle valve (Without check valve) Note) M5 size: S (with seal) is not necessary. 611 A AS Series Construction AS1201-M5 AS2201/3201/4201 AS3201-02 o !1 w r u y e t !5 !2 !4 q !0 !3 i Component Parts No.

Speed Controller with One-touch Fitting Series AS Elbow Type (Metal Body) 1

1 Thread size M5 01 02 03 04 M5 x 0.8 R R R R 1 8 1 4 3 8 1 2 M5 port only Note 1) AS221: Electroless nickel plated Note 2) AS221: Steel Note 3) Meter-in type: Black zinc chromated 15-9-8 2 Speed Controller with One-touch Fitting Elbow Type (Metal Body) Series AS Flow Rate and Effective Area AS321-03 AS421-04 AS221-01 AS221-02 AS121-M5 Model Tubing O.D. 12 10 10 8 6 8 4, 6 6, 8 Controlled

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

2-P (Piping port) G E G NN ( I ) D X NA R Mounting nut N W K N F S + Stroke F ZZ + Stroke H B E G Mounting nut NN NA F N 12CY3B15 (mm) L 57 66 70 80 92 J 6 6 8 8 10 K 11 8 10 15 16 I 12 15 18 23 G 5.5 7.5 7.5 8 11 H 13 20 20.5 22 29 F 10 13 13 16 16 E 2 2 2 2 3 NN M10 x 1 M20 x 1.5 M26 x 1.5 M26 x 1.5 M32 x 2 D 16.6 21.6 26.4 33.6 41.6 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 B 35 36

Process Gas Diaphragm Valve

Construction Diaphragm Seat Body 1110 B Diaphragm Valve for Ultra High Purity Air operated type Series AZ3542 & 4542 Dimensions inch (mm) AZ3542 & 4542 Ports: 2PW (Welded) Ports: 2P (Machined) M5 x 0.8 Actuation port Actuation port M5 x 0.8 1.57 (40) 1.57 (40) FORGED BODY BAR STOCK BODY Note) 2.24 (57) 2.24 (57) 0.44 (11.2) 0.44 (11.2) A A B A A Connections: MV, FV Connections: MV B A A A

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel (SUS304) M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel

Safety Instructions

Class H coil: AWG18 Operating Port Tightening Torque Class B coil: AWG20 Torque (Nm) Operating port M5 1/6 turn with a tightening tool after first tightening by hand 0.8 to 1.0 (1) Rc, NPT 1/8 0.8 to 1.0 SMC 2. Use of metal fittings Do not use metal fittings for piping on taper threads made of resin, as this may cause damage to the threads. 3.

Series AP3500

q e r q e r q e r w w w w 125 Process Gas Equipment / Diaphragm Valve Specific Product Precautions Be sure to read before handling.

VEX-OMY0001

AN103-01 AN210-02 1) VEX1-9-1P VEX4-2A-P VEX1-11-2 VEX4-4 DXT152-14-1A NXT013-3 VO307K-1 2) 3) VEX322 VEX342 Rc A 1/8 1/4 F G VVEX2 VVEX4 B 1/4 3/8 N NPT ( ) VEX1-17 VEX4-5 C 1/2 T NPTF 11 No.VEX-OMY0001 (2) () 3 2(A) 23(P2) 12(P1) a,b 12(P1),23(P2) (2) a 12(P1) 1(P)2(A)3 3(R) 3(R) b 23(P2) 2(A) 2(A)3(R)1 1(P) 1(P) 12(P1) 1 2 3 23(P2) 4 5 6 7 8 POM 9 -12No.VEX-OMY0001

PA3000/5000/PAX1000

FLUID OUT) Pump chamber B Pump chamber A Check valve Shaft Suction port (FLUID IN) Diaphragm B Diaphragm A Drive chamber A Drive chamber B Control unit 1.

Miniature Fittings Stainless Steel 316 MS Series Applicable Tubes: ø 3.2, ø 4, ø 6 Connection Thread: M5, R 1/8

KQB2 Universal tee M5 female x M5 female x M5 male Body rotates at 360 around the stud axis 4/2.5 x M5 MS-5UT MS-5AU-4 KS KX For soft nylon and polyurethane tube P.338 KM Push For reducing Rc 1/8 female to M5 female R 1/8 x M5 female 6/4 x M5 MS-5B MS-5AU-6 KF P.338 P.339 M Barb elbow for soft tube Plug Body rotates at 360 around the stud axis For soft nylon tube 3.18/2.18 x M5 Use to plug

Precision Clean Regulator

ARM Nil Standard Machined bleed port M5 thread Set pressure ARP X201 0 1 0.005 to 0.2 MPa 0.01 to 0.4 MPa X206 With bleed port fittings (Applicable tube O.D.: 4) IR-A Gauge port orientation IR Nil: Standard Port size IRV OUT IN Piping port size M5 x 0.8 Rc 1/8 Symbol M5 01 VEX Knob Gauge port SRH R: R specifications Symbol Gauge port SRP SRP OUT IN SRF Gauge port positions are indicated

Flame Resistant (Equivalent to UL-94 Standard V-0) Speed Controller with One-touch Fittings Elbow Type AS Series

Port size With One-touch fitting 01 M5 M5 R 1/8 R 1/4 R 3/8 R 1/2 02 03 04 Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.

CLK1

Hs B 16 14 14 26 29 (36) D-C73C 8.5 A D-H7C 8.5 A Hs B B Hs 14 36.7 38.2 D-G5NT D-B5, B6 B A Hs Hs B A 24.5 24.5 13 33 13 33 Hs D-A3 D-G3, D-K3 B A 49 B Hs A 49 34 56 18 36 18 36 B D-A4 Hs A 34.5 56 18 36 Minimum Strokes for Auto Switch Mounting Minimum strokes are as follows based on the space required for mounting auto switches.

High Power Cylinder:

1-C 2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B CE2 6 1/8, 1/4 1.5 500 0 1,000 2,000 3,000 ML2B Max. speed Vmax (mm/s) 6 1/4, 3/8 3 1000 Graph 3:25 ML1C 10 1/4, 3/8 20 (1/4) 4.5 1500 20 10 1/4, 3/8 REA Composed effective area So (mm2) Composed effective area

2-Color Display Type High-Precision Digital Pressure Switch Series ZSE30/ISE30

2-Color Display Type High-Precision Digital Pressure Switch Series ZSE30/ISE30 How to Order Option 1 Without lead wire Nil Lead wire with connector (Lead wire length: 2m) L ISE30 01 25 M For positive pressure ZSE30 01 25 M For vacuum/Low pressure Option 2 Piping specification R 1/8 (with M5 female thread) NPT 1/8 (with M5 female thread) 01 T1 None Bracket Nil A Output specification NPN output

Dedicated Controller Series LC1 Uniaxial Type

Mounting bracket Ass'y Mounting screws Controller model M3 x 0.5 LC1-1-N3 LC1-1B-N3 M5 x 0.8 LC1-1-N5 LC1-1B-N5 M3 LC1-1-L3 LC1-1B-L3 M5 LC1-1-L5 LC1-1B-L5 Note) This controller comes with either the T-nuts or T-brackets as accessories.

CM2

7 Rod cover Head cover A Head cover B Head cover B Cylinder tube Piston Piston rod Bushing Seal retainer Snap ring Bumper A Bumper B Snap ring Clevis bushing Piston seal Piston gasket Wear ring Mounting nut Rod end nut Oil-impregnated sintered alloy NBR NBR Resin Carbon steel Carbon steel 2A Clear anodized 2B Clear anodized 2C Nickel plated Nickel plated e r t y u i o !0 !

ML1

Model PP SS VV OO Gasket QQ RR TT UU ML1C25 ML1C32 ML1C40 C11.2 10 14 37 24 8 27 20 8 16.5 C11.2 18 46 30 12 32 22 8 17 23.5 12.5 10 C14 53 40 34 26 Model A B C D E F G H I J K L M N P Q S T O R U W Z V Y ML1C25 ML1C32 ML1C40 274 260 137 140 88 108 87 85.5 60 74 97 100 42.5 26 34 206 28 24 5.6 9 5.5 8.5 9.5 M5 X 0.8 M6 X 1 11 322 306 161 160 108 131 101 99.5 64 92 118 120 53.5 28 40 242 36.5

Miniature Fittings M3, R(PT) 1/8, M5 Series M

Miniature Fittings M3, R(PT) 1/8, M5 Series M Series M5 Manifold: M-5M Bulkhead reducer: M-5ER Panel mounting plate thickness max. 3.5mm For the plate thickness 3.5 to 6mm, give the plate tapping M12 0.75, and then screw-in. For the plate thickness 3.5 to 6mm, give the plate tapping M12 0.75, and then screw-in.

Wedge Cam Operation Provides

MHW2 Groove position of auto switch A Model MHK2-12l MHK2-16l A 10.4 12.8 B 1.8 1.6 MRHQ B Auto switch Standard switch grooves Dimensions A and B other models are same as standard switch grooves. 2.4-17