Parallel Type Air Gripper

Model Screw Max. tightening Maximum screw-in depth (L mm) torque (Nm) MHZ2-10 M3 x 0.5 0.9 6 MHZ2-16 M4x0.7 1.6 4.5 MHZ2-20 M5 x 0.8 3.3 8 L L MHZ2-25 M6x1 5.9 10 MHZ2-32 M6x1 5.9 10 MHZ2-40 M8 x 1.25 13.7 13 Model Screw Max. tightening torque (Nm) Maximum screw-in depth (L mm) MHZ2-10 M3 x 0.5 0.69 5 MHZ2-16 M4x0.7 2.1 8 MHZ2-20 M5 x 0.8 4.3 10 MHZ2-25 M6x1 7.3 12 MHZ2-32 M6x1 7.9 13 MHZ2

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

min (ANR)) Flow rate (L/min (ANR)) Number of needle rotations Number of needle rotations 735 AS1F-D Series Construction Universal type Meter-out type Elbow type Meter-out type M5 type U10/32 type M5 type U10/32 type Meter-in type Meter-in type M5 type U10/32 type M5 type U10/32 type 736 AS1F-D Series Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

01 M5 x 0.8 Rc(PT) 1/8 (port A) VKF332 (with bracket) Body ported (single type) 5 G M5 Body ported (for manifold) 5 G M5 VKF333 5 G 01 VKF334 Base mounted Light/Surge voltage suppressor Valve option Port size For vacuum For low power consumption For vacuum/low power consumption For long loading time 01 Nil V Y Rc(PT) 1/8 (with sub plate) Without sub plate None With surge voltage suppressor

Series VCL

L K K DIN terminal: D Conduit terminal: T Cable 6.8 to 10 F S Q 27.5 (Q) D F 25 C R C (44) R R E G 1/2 E G 1/2 A H D (S) B B A H 2-P Port size 2-P Port size 2-M, thread depth N 2-M L L K K N.C. dimensions (mm) Grommet: G Conduit: C DIN terminal: D Conduit terminal: T P Port size Rc A B C D E F H K L M N Model Note) U Q V R Q R Q R S Q R S 83 22 23 45 44 43 58 40.5 46.5 99 43 66 13.5 28 64

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

S) (mm) Dimensions PB S Model LVD2m-Tm LVD3m-Tm LVD4m-Tm LVD5m-Tm PA 12.5 26 A B 26 29.5 Dimensions (mm) A B C D E F G H J K L M N P Q T U Model LVD2m-Tm LVD3m-Tm LVD4m-Tm LVD5m-Tm 30 30 61 56 14.5 104 35 13 4 20 44 7 30 6 31.5 17 M5 x 0.8 35 35 79.5 62 17.5 136 42.5 17.5 6 22 50 7 37 6 36 21 M5 x 0.8 35 35 82 62 20 137 45 17.5 6 22 50 7 39 6 36 21 M5 x 0.8 45 45 105.5 76 25 169.5 65 17.5

Round Type Hydraulic Cylinder

Cotter pin 4 x 20 l (2 pcs.)

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

L plug connector (L) VQ 2.0 3.0 M plug connector (M) (A) 2 VKF 1 (P) 3 (R) M plug connector (M) VQZ N.O.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

How to Order 2 2 0 0 01 M AS Option Body size None With seal Nil S 1 2 2 Meter-out Meter-in M5 standard 1/8, 1/4 standard Type Direct cylinder elbow type Control type M5 and U10/32 are not available with seal.

VEX1

Calculation by effective area Q: Flow rate (l/min) P: Pressure differential (P1P2) P1: Upstream pressure (MPa) P2: Downstream pressure (MPa) G: Specific gravity (Air = 1) : Temperature (C) S: Effective area (mm2) P(P2+0.1013) G 273 273+ Q=226S . ... l/min(ANR) wEquation in the domain of sonic flow. . 273 273 + Q=113S(P1+0.1013) 1 G . l/min(ANR) External Pilot Piping VEX312 VEX332 VEX350 VEX370

3 Port Air Operated Valve Series SYJA300 1

Flow Characteristics/Weight Flow characteristics C [dm 3/(s bar)] b Cv C [dm 3/(s bar)] b Cv 1 2 (P A) 2 3 (A R) Valve model Weight (g) Pilot port size Type of actuation Port size SYJA512-M5 SYJA522-M5 0.12 0.18 0.39 0.45 0.47 0.66 0.14 0.18 0.45 0.45 N.C. 0.53 0.66 M5 x 0.8 Body ported 45 N.O. M5 x 0.8 SYJA514-01 0.32 0.46 1.1 0.32 0.41 1.2 75 (Without subplate 45) Rc 1/8 N.C.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

pressure 0.5 MPa Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) Number of needle rotations Number of needle rotations 15-9-76 3 Speed Controller Adjustable by Flat Head Screwdriver With One-touch Fitting, Elbow Type/Universal Type Construction Universal type Meter-out type Elbow type Meter-out type M5 type U10/32 port M5 type U10/32 port AS ASP

IR1000/2000/3000

SMC 50 35 5 SMC 6 28 (R) P P K U K C S U O C H L S O H L 38 AV AU Panel cut Panel thickness: Max. 4 Panel cut Panel thickness: Max. 3 34 AF 40 15.4 x 5.4 AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com IR 8 x 6.5 79 13 45.5 VEX Atmosphere 106 G SET SET Pad side

10

Z1K Z1L Z1M Z1W Z1N Z1P Z1Q Z1R Z1Y Z1S Z1T Z2K Z2L Z2M Z2N Z2P Z2Q Z2R Z2S Z2W Z2T Z3A Z3B Z3C Z3D Z3E Z3F Z3G Z3H Z3V Z3J A B C D E F H J K L M N Nil A B C D E F G H K L Z Nil XB A B D E H J L M Nil A B C D E F G H K L Z Nil XB A B C D E F G H J K L M N P Nil A B C D E F G H K L Z Nil XB A B C D E F M N P Q R S T U V W Y Z1A Z1B Z1C Z1U Z1D Z1E Z1K Z1L Z1M Z1W Z1N Z1P Z1Q Z1R Z1Y Z1S Z1T

Thermo-chiller

(Fe) [mg/L] 0.3 or less v v Copper (Cu) [mg/L] 0.1 or less v Sulfide ion (S2) [mg/L] Should not be detected v Ammonium ion (NH4+) [mg/L] 0.1 or less v Residual chlorine (Cl) [mg/L] 0.3 or less v Free carbon (CO2) [mg/L] 4.0 or less v Reference item 5 s 2 s 1 s Min. 0.5 s 0.2 s 0.1 s *1 In the case of [Mcm], it will be 0.003 to 0.01.

IIIIIII

F O.F. 5 07 tbs. {2.3 t\ol T T . 90" 5 7 4 (145 9) 452 1 1 4 9 ) t t 8 t30l 1 2 2 {3t } 0 0 6 (1 s) l 1 ?

Mechanical Valves Series NVM, NVFM, NVZNI

H F O.F. 5 07 tbs. {2.3 t\ol T T . 90" 5 7 4 (145 9) 452 1 1 4 9 ) t t 8 t30l 1 2 2 {3t } 0 0 6 (1 s) l 1 ?

17

R R L L L R Standard piping/Centralized piping (mm) L R WXX Y S d D R Applicable O-ring Model Operating direction Centralized piping MY1B25 MY1B32 MY1B40 15.5 16.2 5.5 6 11.4 1.1 C9 20 20.4 5.5 6 11.4 1.1 L R 23.5 25.9 6 8 13.4 1.1 C11.2 DO-ring R R R Centralized piping (mm) R R R L L L WX SS Model L -X MY1B25 MY1B32 MY1B40 R R 26.5 10 Centralized piping Piping tube 40 5.5 Note) Refer to

Large Type Vacuum Unit Series ZR

(L) Lead wire length 0.6 (3.0) m PNP output 27 (L) Lead wire length 0.6 (3.0) m NPN output D3 26 (L) Lead wire length 0.6 (3.0) m Analog output 67 (L) Maximum vacuum pressure Lead wire length 0.6 (3.0) m PNP output S 84kPa Vacuum switch specifications (E) L 53kPa Nil Lead wire length 0.6m Grommet type L Lead wire length 3.0m Ejector exhaust type C Lead wire length 0.6m CL Connector type

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

L K K DIN terminal: D Conduit terminal: T Cable 6.8 to 10 F S Q 27.5 (Q) D F 25 C R C (44) R R E G 1/2 E G 1/2 A H D (S) B B A H 2-P Port size 2-P Port size 2-M, thread depth N 2-M L L K K N.C. dimensions (mm) Grommet: G Conduit: C DIN terminal: D Conduit terminal: T P Port size Rc A B C D E F H K L M N Model Note) U Q V R Q R Q R S Q R S 83 22 23 45 44 43 58 40.5 46.5 99 43 66 13.5 28 64

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Both of these become slower as the operating pressure is increased. 14 Technical Data 5 He leakage 8 Exhaust time (low/medium vacuum) The time (t) required to exhaust a chamber at low vacuum with volume V (l), from pressure P1 to P2, using a pump with pumping speed S (l/sec) is t=2.3(V/S)log(P1/P2).