SMC Corporation of America
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In center position the flo/v P-A, B is as sholn. X X { l ) Series NVFSOO How To Order NVFs lPort size (P,A,B) OXT Y.NPIF O3T %NPTF o4T. _ IbNPIF Typ of I *2 positiqr/singlo solanoid 2 -e position/double eolgnoid l-3 posilion, dGd c6oter/doubl6 solonoid 4 -3 gooidofl extEugt centr/double solenoid 5 -A pEsilion, p.6sure crte./double solenoid oyeride 'Subbas type only.

H andl e caref ul l y w hen operat i ng w i t h out put pressure rel eased t o t he at m osphere, as ai r w i l l cont i nue t o f l ow out . I f suppl y pressure t o t hi s product i s i nt errupt ed or shut of f , w hi l e t he pow er i s st i l l on, t he i nt ernal sol enoi d val ve w i l l cont i nue t o operat e and a hum m i ng noi se m ay be generat ed.

Visible Visible Air suction side Filter Filter holder LED Indicators PWR Power supply indicator ION/HV Static neutralization operation/ Incorrect high voltage indicator ALM Error indicator NDL Maintenance indicator 4 Fan Type Ionizer IZF Series Models and Functions New New IZF21 IZF31 IZF10 IZF10R P.11 P.11 P.21 P.21 Size (Depth x Width x Height) (mm) 40 x 104 x 155 40 x 144 x 195 39 x 80

Note 2) Unit: kPa, MPa Panel mount adapter + Front protection cover L Lead wire with connector (Lead wire length 2 m) Note) With connector cover G Connector cover D Note) For output types N and P, the number of core of lead wires will be 3, and for other types, it will be 4. 33

ZSE3 ISE3L ISE3 (Vacuum) (Positive pressure 100 kPa) (Positive pressure 1 MPa) Rated pressure range 0 to -101 kPa 0 to 98 kPa 0 to 0.98 MPa Min. display unit 1 kPa 0.01 MPa Applicable fluid Air, inert gases and incombustible gases Max. operating pressure 200 kPa *1 1 MPa Power supply voltage 12 to 24 VDC 10%, ripple (P-P) 10 or less (Protected against inverse connection) Current consumption

Refer to page 372 for pivoting bracket. (80, 100) Clevis: CG3DN Bore size Stroke With rubber bumper H S + Stroke L RR V CZ TZ GA GB 8 x J F 2 x P AL A Width across flats NA CDH10 (Hole dia.) C d9 (Shaft dia.)

l Applicable bore size (mm) Part no.

/min How to find the flow rate for water 5.0 Formula based on Cv factor Q = 14.2 Cv 10.2 P l/min Formula based on effective area (Smm) VCB 3 Cv = 0.35 3 4 1.0 Q = 0.8 S 10.2 P l/min VCB23 Cv = 0.33 VCB25 Cv = 0.65 Q: Flow rate (l/min) P:Pressure differential (P P) P: Upstream pressure (MPa) P: Downstream pressure (MPa) S: Effective area (mm) Cv: Cv factor VCB34 Cv = 0.54 VCB24

/min How to find the flow rate for water 5.0 Formula based on Cv factor Q = 14.2 Cv 10.2 P l/min VCB 3 Cv = 0.35 3 4 Formula based on effective area (Smm) 1.0 Q = 0.8 S 10.2 P l/min VCB23 Cv = 0.33 VCB25 Cv = 0.65 Q: Flow rate (l/min) P:Pressure differential (P P) P: Upstream pressure (MPa) P: Downstream pressure (MPa) S: Effective area (mm) Cv: Cv factor VCB34 Cv = 0.54 VCB24

Travel amount per 1 command pulse (P=10m) 1000 P: Travel amount per 1 command pulse [m] *1 n1/n2: Pulley ratio *2 Actuator lead (L = 6mm) Pulley ratio (n1/n2 = 1/1) [PA05] = 100 (Initial value) 1 [PA06] 10010010 1001000.01 1000 = = [PA07] 6 1/1 6 [PA06] 100 = [PA07] 6 *1 In case position control mode, "Travel amount per 1 command pulse"P = 10[um] In case positioning mode, "Travel amount per

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com L ISE30 01 25 M For positive pressure ZSE30 01 25 M For vacuum/low pressure Option 2 Piping specifications Nil None Bracket R 1/8 (With M5 female thread) 01 NPT 1/8 (With M5 female thread) A T1 Straight type 4 One-touch fitting 5/32" One-touch fiting

D o n o t m a k e a n y a l t e r a t i o n s t o t h i s p r o d u c t . Alterations made to this product may lead to a loss of durability and damage to the product, which can lead to human injury and damage to other equipment and machinery.

min (ANR)) Supply pressure (MPa) Flow rate (l/min (ANR)) Flow Characteristics Flow Characteristics ZM10H ZM13H Exhaust Characteristics Exhaust Characteristics Max. suction flow rate (l/min (ANR)) Air consumption (l/min (ANR)) Max. suction flow rate (l/min (ANR)) Air consumption (l/min (ANR)) Vacuum pressure Vacuum pressure Vacuum pressure Vacuum pressure Vacuum pressure Vacuum pressure (kPa

ON OFF IN OUT R 7 Spacer L type bracket Spacer with L type bracket T type bracket Spacer with T type bracket Spacer with L type bracket Spacer with T type bracket T type bracket L type bracket L type bracket Spacer with L type bracket Applicable model T type bracket Spacer with T type bracket Applicable model Applicable model Model Y20T AV2000 B210T Y20L AV2000 AV2000 Y20 B210L Y30T AV3000

Note Bracket A ZS-46-A1 Tapping screw: Nominal size 3 x 8 L (2 pcs.) Bracket B ZS-46-A2 Tapping screw: Nominal size 3 x 8 L (2 pcs.)

Outside Local Area: (800) 258-9200-www.stevenengineering.com ZSP ISA2 IS ZSM PF2 01: R 1/8 T1: NPTF 1/8 IF 2-3.5 Mounting hole 13 Data M5 x 0.8 Connector type 30 SE3C I Z 01 T1 20.5 RESET button DOWN button SET button UP button Lead wire length 600 39 8.5 3.5 (3000) 10 01: R 1/8 T1: NPTF 1/8 2-3.5 Mounting hole 13 M5 x 0.8 16-4-7 8 Series ZSE3/ISE3 Dimensions/Switch Only Grommet type ZSE3

Sensor Flow range 0.5 L/min 2 L/min 5 L/min 20 L/min 40 L/min 250 L/min 140 L/min 100 L/min 350 L/min 0.5 L/min 4 L/min PF3W704 PF3W504 0.35 L/min 5.5 L/min 5.5 L/min 0.35 L/min 2 L/min 16 L/min PF3W720 PF3W520 1.7 L/min 1.7 L/min 22 L/min 22 L/min 5 L/min 40 L/min PF3W740 PF3W540 3.5 L/min 3.5 L/min 55 L/min 55 L/min 10 L/min 100 L/min PF3W711 PF3W511 7 L/min 7 L/min 140 L/min 140 L/min

L/min type> Common setting Output mode Hysteresis mode Switch operation Normal output Set value (P) 25 Hysteresis (H) 10 Initial setting Zero cut-off setting CUt: 1.0 (displays 0 for a value below 10 L/min) Switch ON point 25 L/min or more Switch OFF point Below 15 L/min Change the zero cut-off setting The set value (P) and hysteresis (H) cannot be changed.

(Custom range) Relationship between analogue input and digital display Set value A B 200 0 L/min 200 L/min 500 0 L/min 500 L/min 1000 0 L/min 1000 L/min 2000 0 L/min 2000 L/min 3000(Default) 0 L/min 3000 L/min 6000 0 L/min 6000 L/min 12000 0 L/min 12000 L/min 16000 0 L/min 16000 L/min 20 0 L/min 20 L/min USEr Input value (setting) Input value (setting) -31No.PF-OMU0007-D Press