RHC

M22 x 1.5 15.0 13 33.5 30 265 26 9 232 M8 x 1.25 192 22 20 20 1/4 55 46.5 40 6.5 M24 x 1.5 19.6 17 37 36.9 270 32 9 233 M10 x 1.25 193 5.8 to 8.8 27 20 25 1/4 MI W S 60 53 45 7 M30 x 1.5 19.6 17 43.5 43.9 278 38 9 241 M10 x 1.25 195 27 23 32 3/8 75 62 55 7 M33 x 2.0 25.4 22 52.5 47.3 292 41 11 251.5 M14 x 1.5 201.5 30 25 6.8 to 11.3 40 3/8 CEP1 CE1 50 to 100 H EA CE2 EA FA GA A NE Rc P Rc

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

of P and R port Type 40R Applicable solenoid valve SYJ514R-SYJ524R-How to Order SS3YJ5-40R-05 -01 R port 1/8 X port (External pilot type) Applicable blanking plate assembly SYJ500-10-3A P, R port thread type P port 1/8 R Stations A port size + + + + M5 x 0.8 02 : 20 2 stations : 20 stations P port 1/8 M5 01 M5 x 0.8 Nil Rc G NPT NPTF P A A X F N T 1/8 R P A port M5 x 0.8, 1/8 R port 1/8

Applicable Auto Switch Model

Refer to p.5.3-6 for the details of contact protection box. Caution -X Precautions qFix the switch with appropriate screw installed on the switch body.

Magnetically Coupled Rodless Cylinder

determination F3 D 1.6 x P WB Inclined operation W + WB WV P PV W + WB WV P PV Allowable driving force table (Fn) (n=1,2,3) Determination of allowable load weight & pressure F1 = x (W + WB) x 9.8 Horizontal F2 = (W + WB) x 9.8 x (COS + SIN) Inclined (Refer to page 5 for vertical operation.)

Cylinder with Lock Series MNB

14 296 M8 x 1.25 80 61.5 38 3/8 245 10.5 12 55 305 4.5 72 106 100 10 M22 x 1.5 61 72 33 14 30 14 361 M10 x 1.5 100 69.5 38 1/2 265 10.5 14 65 329 4.5 89 123 120 10 68 72 37.5 15 32 16 385 M26 x 1.5 M10 x 1.5 6 Series MNB Dimensions Front flange type (F)/MNBF Rc(PT)1/8 BC element GA Rc(PT)BP unlocking port Unlocked when pressurized Rc(PT)P Front cylinder port GD GC GR GL W GL 1 GE ??

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

R ports) Applicable tube O.D.: 8 13.3 (Pitch) P= 10.5 13.3 24 24 16.2 17.8 36.7 16.2 17 34 B 2 B 2 B 2 B 2 B 2 R 3 B 2 B 2 B 2 B 2 PE R 3 B 2 R 3 R 3 A 4 A 4 A 4 A 4 A 4 P 1 P 1 A 4 A 4 A 4 A 4 X P 1 P 1 A 4 2n2-One-touch fitting 2-One-touch fitting 2n1-M5 x 0.8 (A, B ports) (A, B ports) Applicable tube O.D.: 4 6 (X, PE ports) Applicable tube O.D.: 6 (L4) L3 Applicable connector: D-SUB equivalent

VK300

A port) n1 x Rc 1/8 300 Pg7 4 x Rc 1/8 (P, R port) (Lead wire length) 2 x 4.5 4 x Rc1/8 8 (P, R port) (Mounting hole) 2A 2A 2A 34 2.3 20 7 (Pitch) 7 44.5 (Station 1) (Station n) 4 x M3 x 0.5 depth 6 (Bracket mounting screw) L Dimension n L n: Stations 1 35 27 20 396 388 13 32 51 70 89 108 127 146 165 184 203 222 241 260 279 298 317 336 355 374 2 54 46 3 73 65 4 92 84 5 111 103 6 130 122 7

air-filter-e

NBR JIS B 2401.P12 q Seal 10 x t1 Fluororesin NBR Fluororesin Nylon Fluororesin Fluororesin (Antistatic specifications) Nylon Fluororesin Nylon Fluororesin 101 x t2 98 x t5 w Gasket e Seal Note 3) 23 x t1 r Seal 10 x t1 t Seal 20 x t1 Note 1) The quantity used for 1 filter is 1 each for the following seals, gaskets and O-rings.

Air Preparation Equipment

NBR JIS B 2401.P12 q Seal 10 x t1 Fluororesin NBR Fluororesin Nylon Fluororesin Fluororesin (Antistatic specifications) Nylon Fluororesin Nylon Fluororesin 101 x t2 98 x t5 w Gasket e Seal Note 3) 23 x t1 r Seal 10 x t1 t Seal 20 x t1 Note 1) The quantity used for 1 filter is 1 each for the following seals, gaskets and O-rings.

Modular F.R.L. Unit

e Drain cock with barb fitting: 6 x 4 nylon tube W AC25 to 60 q w Note 3) Name plate, caution plate for bowl, and pressure gauge in imperial units (PSI, F) q w Z AC10 to 60 w q e When more than one specification is required, indicate in ascending alphanumeric order.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

For connector cable of M8 connector, refer to page 90. 49 Series SYJ7000 Construction (A) 4 (B) 2 (A) 4 (B) 2 2 position single 2 position double 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) y e q t r q t r w w (B) 2 (A) 4 (A) 4 (B) 2 i i 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 (R2) 1 (P) u 3 position closed center/Exhaust center/Pressure center 3 position closed center (A) 4 (B) 2 t q r w 5 (R1) 3 (R2)

Sine Cylinder Series REC

MM N NA NN P Z ZZ S TD TT TX TY TZ Bore (mm) 20 30 M20 x 1.5 36 1/8 200 52 146 8 10 32 32 M8 x 1.25 20 25 34.5 M26 x 1.5 40 1/8 204 60 146 9 10 40 40 M10 x 1.25 20 32 42.5 M26 x 1.5 40 1/8 217 60 159 9 10 40 40 M10 x 1.25 22 40 51 M32 x 2 44.5 1/4 247 77 181 10 11 53 53 M14 x 1.5 26.5 Head side trunnion style: RECT (Rc, NPT, G) 2 x P -0.025 -0.061 TDe9 G G 2 x NN H1 Plugged (M5 x 0.8) Width

Sine Cylinder Series REC

MM N NA NN P Z ZZ S TD TT TX TY TZ Bore (mm) 20 30 M20 x 1.5 36 1/8 200 52 146 8 10 32 32 M8 x 1.25 20 25 34.5 M26 x 1.5 40 1/8 204 60 146 9 10 40 40 M10 x 1.25 20 32 42.5 M26 x 1.5 40 1/8 217 60 159 9 10 40 40 M10 x 1.25 22 40 51 M32 x 2 44.5 1/4 247 77 181 10 11 53 53 M14 x 1.5 26.5 Head side trunnion style: RECT (Rc, NPT, G) 2 x P -0.025 -0.061 TDe9 G G 2 x NN H1 Plugged (M5 x 0.8) Width

MGP

XAH7 (mm) XL T-slot dimensions Bore size (mm) 50 80 a 11 13.3 b 17.8 20.3 c 10 12 d 6 8 e 17.5 22.5 Section XX detail 8-RR depth RL Section XX WB Z QA WA QB Section XX 4-OA through 4-OB depth of counter bore OL 4-MM depth ML 4-NN depth NL Section XX Z WA L HA T-slot for hexagon bolt X 0.02 X 0.02 DA VB VA X X T H U PW DB PB GC XAH7 depth XL 2-P (plug) XAH7 depth XL Q J K GA GB S G FB 2-P

Auto Switch Guide

2.5 Auto switch Hexagon socket head cap screw (M3 x 16 l) RZQ Switch mounting screw Round head Phillips screw with spring washer M3 x 0.5 x 16 l MI W S 1.

10

Cushion valve G 2 x Rc P W V Port G E Width across flats KA TX D E B C H1 AL MM MB MA N 2 x 4 x J N TY B C Width across flats B1 A H K F TT ZZ + Stroke S + Stroke With rod boot d e 10.2 10.2 f h l [mm] Bore size [mm] A AL B B1 C D E F G H H1 J K KA MA MB MM N P S TT TX TY V W ZZ 32 22 19.5 46 17 32.5 12 30 13 13 47 6 M6 x 1 6 10 16 4 M10 x 1.25 27 1/8 84 17 48 49 4 6.5 135 40 30 27 52 22

3 Port Air Operated Valve

SYJA 2(A) 2(A) Standard VZA (P)1 3(R) (P)1 3(R) i VFA 2(A) 2(A) 2(A) 3(R) VFRA o For vacuum (P)1 3(R) (P)1 3(R) VPA4 SYJA X VZA 1(P) VTA For vacuum u y t r e w q VGA VPA VPA VPA3 i 2(A) 3(R) o X Component Parts No.

Peltier-type Chiller Thermo-con/ Compact Type

Cooling capacity = Considering a safety factor of 20%, 93.3 W x 1.2 = 112 W Circulating Fluid Typical Physical Property Values Ethylene Glycol Solution 20% Temperature [C] Density [kg/m3] Specific heat C [J/(kgK)] 10 1.03 x 103 3.93 x 103 20 1.03 x 103 3.95 x 103 30 1.02 x 103 3.97 x 103 40 1.02 x 103 3.98 x 103 50 1.01 x 103 4.00 x 103 60 1.01 x 103 4.02 x 103 Water Density : 1 x 10 3

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

/4 P(SUP) port 2-M5 X 0.8 External pilot port 20 20 37.4 66.5 20 16 20 (38) VQ4 The broken line indicate DIN rail mounted style [-D].

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

40 A B Insulation: Red (+) Manual override 2 x 3.2 (Mounting holes for manifold) 16.2 36 2 x 1/8" A (4), B (2) port (2 x 3.2 Mounting holes) (37) 44 (For E type) 0.3 mm2 (40.2) (36.7) 40 32.5 20.5 14.7 1.55 111.8 (1.2) (32.3) 109.1 L (11.7) (Lead wire length) 3 x 1/8" {P (1), EA (5), EB (3) port} 32.3 0.8 15 1.6 (20) EB P EA 32.5 10.5 2 x 2.2 (Positioning for manifold gasket) 27.2 (45) L