Series: 25A-ISE20, Rated Pressure Range: -0.1 TO 1 Mpa, Output Specification: PNP Open Collector 2 Outputs + Copy Function, Unit Specification: SI Unit Only, Piping Specification: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: -

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Con t e nl~s___ __-+;;-:::-:::-:-~D~;S~~S~~ o ~n,-:-:cc_ ; I i Tensile strength greater than that will cause Set data is changed by some Influence Push the RESET key to set troubte.

Air Catch Sensor

Gap too small Green 2 a Place the gap gauge on the detection nozzle for precise adjustment. s Confirm applied air pressure.

NAIV

N Body 2Yq 3-3/s s-Y4 6 1 A 1 y 2 9-2 B Brackel D Threaded draln poft (Female) except 220. Port slzo o2% o3-% 04-'/z 06 % to1 741'/z 20-2 Thread 1 Male 2fumale. ,NAMC220, 32O,520 only HowTo Select Flow Characteristics Supply prossure: 71 PSI Supply pressurei 71 tl 12 10.5 I 6 ! e E , q 1.5 8 1 2 1 6 2 0 Cylinder speed (in/sec.)

Series 12-REA Sine rodless cylinder

+ Stroke F F NA R ZZ + Stroke 43 35 29 22 20.5 27.8 D Model Port size K NN B L MM x J N NA H 16 15 10 I 46 36 30 NB 19 17 17 T S 11 9 8 G ZZ 10 8 8 R 60 50 50 W 16 16 13 F 40 40 30 X 12-REA40 12-REA32 12-REA25 Rc, NPT, G 1/8 Rc, NPT, G 1/8 Rc, NPT, G 1/4 70 60 46 M26 x 1.5 M26 x 1.5 M32 x 2.0 21 17 15 50 40 34 19 15 13 150 124 111 182 156 137 92 80 70 M5 x 0.8 x 8 M6 x 1.0 x8 M6 x 1.0 x10

VXA21/22

OUT Standard specification Option Note) Water (Standard, up to 40C) Air (Standard, Dry) Turbine oil Vacuum (up to 1.3 x102 Pa) Carbon dioxide (CO2), Nitrogen gas (N2) Vacuum (up to 1.3 x101 Pa) (V, M) Non-leak (106 Pa m3/s or less) (V, M) IN N.O.

Slit Valve

O-ring: Kalrez 6.5 x 10 9 6.5 x 10 8 Internal leak Note 2) (Pam3/s) at reversed pressure [Reversed pressure: 0.1 MPa (abs) or less] O-ring: FKM O-ring: Kalrez 6.5 x 10 7 6.5 x 10 11 External leak Note 2) (Pam3/s) Gate part 5 to 150 Operation temperature Note 3) (C) Actuator part 5 to 60 Inert gas Fluid 0.6 to 1 Operating time Note 4) (s) FKM, Kalrez 4079 (Option) Seal material Bellows AM350

High Vacuum L Type Valve

H4 S y m b o l Initial power / Power consumption (W) 100 VAC 200/40 200/50 400/100 600/150 200 VAC 800/40 800/50 1600/100 2400/150 Heater assembly number XL1A25-60S-1 XL1A25-60S-2 XL1A25-60S-2 XL1A25-60S-3 XL1A25-60S-2 No. of heater assemblies 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs.

Silencers NAN, NAMC Series Compact Mufflers, Exhaust Cleaners

N Body 2Yq 3-3/s s-Y4 6 1 A 1 y 2 9-2 B Brackel D Threaded draln poft (Female) except 220. Port slzo o2% o3-% 04-'/z 06 % to1 741'/z 20-2 Thread 1 Male 2fumale. ,NAMC220, 32O,520 only HowTo Select Flow Characteristics Supply prossure: 71 PSI Supply pressurei 71 tl 12 10.5 I 6 ! e E , q 1.5 8 1 2 1 6 2 0 Cylinder speed (in/sec.)

1dig (at 25C)Approx. 4 times/s?0.12%F.S./CDisplayed on pressure indication LED0 to 50C?20 to 60C0 to 85%R.H.10 to 55 Hz 1.5 mm amplitude X, Y, Z directions for 2 hrs. each100 m/s2 (approx. 10 G) X, Y, Z directionOnly display unit with cover is equivalent to IP65.

1dig (at 25C)Approx. 4 times/s?0.12%F.S./CDisplayed on pressure indication LED0 to 50C?20 to 60C0 to 85%R.H.10 to 55 Hz 1.5 mm amplitude X, Y, Z directions for 2 hrs. each100 m/s2 (approx. 10 G) X, Y, Z directionOnly display unit with cover is equivalent to IP65.

1dig (at 25C)Approx. 4 times/s?0.12%F.S./CDisplayed on pressure indication LED0 to 50C?20 to 60C0 to 85%R.H.10 to 55 Hz 1.5 mm amplitude X, Y, Z directions for 2 hrs. each100 m/s2 (approx. 10 G) X, Y, Z directionOnly display unit with cover is equivalent to IP65.

1dig (at 25C)Approx. 4 times/s?0.12%F.S./CDisplayed on pressure indication LED0 to 50C?20 to 60C0 to 85%R.H.10 to 55 Hz 1.5 mm amplitude X, Y, Z directions for 2 hrs. each100 m/s2 (approx. 10 G) X, Y, Z directionOnly display unit with cover is equivalent to IP65.

1dig (at 25C)Approx. 4 times/s?0.12%F.S./CDisplayed on pressure indication LED0 to 50C?20 to 60C0 to 85%R.H.10 to 55 Hz 1.5 mm amplitude X, Y, Z directions for 2 hrs. each100 m/s2 (approx. 10 G) X, Y, Z directionOnly display unit with cover is equivalent to IP65.

1dig (at 25C)Approx. 4 times/s?0.12%F.S./CDisplayed on pressure indication LED0 to 50C?20 to 60C0 to 85%R.H.10 to 55 Hz 1.5 mm amplitude X, Y, Z directions for 2 hrs. each100 m/s2 (approx. 10 G) X, Y, Z directionOnly display unit with cover is equivalent to IP65.

1dig (at 25C)Approx. 4 times/s?0.12%F.S./CDisplayed on pressure indication LED0 to 50C?20 to 60C0 to 85%R.H.10 to 55 Hz 1.5 mm amplitude X, Y, Z directions for 2 hrs. each100 m/s2 (approx. 10 G) X, Y, Z directionOnly display unit with cover is equivalent to IP65.

1dig (at 25C)Approx. 4 times/s?0.12%F.S./CDisplayed on pressure indication LED0 to 50C?20 to 60C0 to 85%R.H.10 to 55 Hz 1.5 mm amplitude X, Y, Z directions for 2 hrs. each100 m/s2 (approx. 10 G) X, Y, Z directionOnly display unit with cover is equivalent to IP65.

1dig (at 25C)Approx. 4 times/s?0.12%F.S./CDisplayed on pressure indication LED0 to 50C?20 to 60C0 to 85%R.H.10 to 55 Hz 1.5 mm amplitude X, Y, Z directions for 2 hrs. each100 m/s2 (approx. 10 G) X, Y, Z directionOnly display unit with cover is equivalent to IP65.

1dig (at 25C)Approx. 4 times/s?0.12%F.S./CDisplayed on pressure indication LED0 to 50C?20 to 60C0 to 85%R.H.10 to 55 Hz 1.5 mm amplitude X, Y, Z directions for 2 hrs. each100 m/s2 (approx. 10 G) X, Y, Z directionOnly display unit with cover is equivalent to IP65.

1dig (at 25C)Approx. 4 times/s?0.12%F.S./CDisplayed on pressure indication LED0 to 50C?20 to 60C0 to 85%R.H.10 to 55 Hz 1.5 mm amplitude X, Y, Z directions for 2 hrs. each100 m/s2 (approx. 10 G) X, Y, Z directionOnly display unit with cover is equivalent to IP65.