Rated Flow Range: 11 (1 to 100 L/min), Flow Adjustment Valve: None (Straight), Port Size: N2 (NPT1/4), Output Specification: D (Out 1: NPN; Out 2: Analog 4 to 20 mA), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: M (SI Unit Only), Bracket/Panel Mount Adapter: R (Bracket, w/o Flow Adjustment Valve)
Rated Flow Range: 21 (2 to 200 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: N2 (NPT1/4), Output Specification: B (Out 1: PNP; Out 2: PNP), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector)
Rated Flow Range: 11 (1 to 100 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: N2 (NPT1/4), Output Specification: F (Out 1: PNP; Out 2: Analog 4 to 20 mA), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: S (Bracket, w/Flow Adjustment Valve)
Rated Flow Range: 11 (1 to 100 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: N2 (NPT1/4), Output Specification: L4 (Out 1: IO-Link or NPN/PNP, Out 2: Analog 4 to 20 mA), Lead Wire: Q (w/M12 Conversion Lead Wire and Connector, 0.1m), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: V (Panel Mount Adapter, w/Flow Adjustment Valve
Stepless control of air pressure proportional to an electrical signal Maximum supply pressure: 5.0 MPa Set pressure range: 0.01 to 3.0 MPa Maximum flow rate: 3000 L/min[ANR] Fluid: Air, N2, O2, Ar Wetted parts: Fluorine grease
The check valve provides reverse flow protection for N2 purge gas introduction and other applications.
The SRF30 series is designed to regulate DI water and N2 gas in the clean room. Fluoro resin material is used in the fluid contact area. The fluid contact area is washed with freon ultra sonic and DI water. Clean regulator series; One piece structure w/LQ fitting; Tube porting available; Tube sizes (inch): 1/4, 3/8; Tube sizes (mm): 6, 8, 10
The SRF30 series is designed to regulate DI water and N2 gas in the clean room. Fluoro resin material is used in the fluid contact area. The fluid contact area is washed with freon ultra sonic and DI water. Clean regulator, fluoro resin type; Body sizes: 1/4 (10), 3/8 (30), 3/4 (50); LQ1 or LQ2 fittings available; Fitting sizes: 1/4, 3/8, 1/2, 3/4
PFCA7 is a flow controller for clean, dry compressed air, N2, Ar, or CO2. The design integrates a flow sensor, valve, and control mechanism for automatic adjustment in response to an analog voltage or current signal. Control is linear and stepless within the rated flow ranges offered.
Stepless control of air pressure proportional to an electrical signal Maximum supply pressure: 5.0 MPa Set pressure range: 0.01 to 3.0 MPa Maximum flow rate: 3000 L/min[ANR] Fluid: Air, N2, O2, Ar Wetted parts: Fluorine grease