Thermo-chiller

9 Water-cooled refrigeration . p. 11 Cooling Capacity. p. 13 Pump Capacity. p. 13 Dimensions. . p. 14 Parts Description. p. 14 Recommended External Piping Flow. . p. 16 Cable Specifications. p. 16 Operation Display Panel. . p. 17 Alarm. p. 17 Communication Functions. p. 18 Options. p. 19 Optional Accessories. . p. 20 VCooling Capacity Calculation Required Cooling Capacity Calculation. p.

2–4

B dimension: 108 mm.

Low Profile Guide Type

m P 0.1 x m + m P D 1.6 x D 5.0 x D 5.0 x m m mv P Pv m > mv P > Pv Determination of allowable load mass & pressure Inclined operation (Refer to page 1548

PSE100

Two separate outputs, OUT1 and OUT2, can be set per channel and two channels, A and B can be selected from outside. CH.A CH.B CH.A CH.B and can be selected by external signal. OUT1 OUT1 OUT2 OUT2 Refer to p.3.1-8 "Channel selection" for further information. ON YES PHysteresis mode OFF P-1 P-2 > = P Pressure/Vacuum Up H H H (fixed hysteresis) =2% F.S.

MLGC

A B B A B A B 16 (24) A B Hs Hs Hs 21.5 (29.5) 20.5 (28.5) 15 (22.5) 17.5 (25.5) 19.5 (27.5) 20 4.5 8 6 10 9 3 24.5 27 27.5 21.5 (29.5) 20.5 (28.5) 15 (22.5) 17.5 (25.5) 19.5 (27.5) 16 (24) 25 4.5 8 6 10 9 3 27 29.5 30 22.5 (30.5) 21.5 (29.5) 15.5 (23.5) 18.5 (26.5) 20.5 (28.5) 17 (25) 32 5.5 9 7 11 10 4 30.5 33 33.5 25 (34) 24 (33) 20 (27) 21 (30) 23 (32) 19.5 (28.5) 40 10 13.5 35 37.5 38

MLGC

A B B A B A B 16 (24) A B Hs Hs Hs 21.5 (29.5) 20.5 (28.5) 15 (22.5) 17.5 (25.5) 19.5 (27.5) 20 4.5 8 6 10 9 3 24.5 27 27.5 21.5 (29.5) 20.5 (28.5) 15 (22.5) 17.5 (25.5) 19.5 (27.5) 16 (24) 25 4.5 8 6 10 9 3 27 29.5 30 22.5 (30.5) 21.5 (29.5) 15.5 (23.5) 18.5 (26.5) 20.5 (28.5) 17 (25) 32 5.5 9 7 11 10 4 30.5 33 33.5 25 (34) 24 (33) 20 (27) 21 (30) 23 (32) 19.5 (28.5) 40 10 13.5 35 37.5 38

VXD21/22/23

Then the pressure in the pressure action chamber B falls to open the main valve C. When the coil o is not energized, the pilot valve A is closed and the pressure in the pressure action chamber B rises and the main valve C closes.

Compact Guide Cylinder End Lock Type SeriesMGP

P P P Lock position Z80 P P H R Rear lock Front lock Y59A Y69A P p P Manual release Y7PV Y7P P P p N L Non-locking type Locking type Y59B Y69B P p P Solid state switch Y7NW Y7NWV P P p Y7PW Y7PWV P P p Y7BW Y7BWV P P p Y7BA P p Lead wire symbols 0.5m . Nil (Example) Y69B 3m . L Y69BL 5m . Z Y69BZ Solid state switches marked with a "p" are produced upon receipt of order.

PFA/PFW

Table 1 Table 2 Output type ON YES Hysteresis mode For air OFF P-1 P-2 Display Instantaneous flow rate l/min Cumulative flow rate l Large flow rate "P" H H H (fixed hysteresis) = 3 digits CFM x 10-2 ft3 x 10-1 ON CFM = ft3/min Window comparator mode NO OFF P-1 P-2 For water Large flow rate OUT1 Output mode Display Instantaneous flow rate l/min Cumulative flow rate l ON YES OUT2 is the

4-channel Flow Monitor ( compatible)

Used as IO-Link device 18 to 30 VDC, including ripple (p-p) 10% 1 Electric spec.

PF2D

SN E 21 LQ1 Nut type fittings without a nut (including insert bushings) in one place Fitting type Union elbow T E Union tee Class Applicable tubing size Reducing Reducing Class Applicable tubing size (inch) No. 3 No. 3 Applicable tubing size (mm) 1 A 10 x 8 3/8" x 1/4" SMC SMC SMC 3 2 3 B 8 x 6 1/4" x 5/32" 3 3 4 A 6 x 4 1/2" x 3/8" P Panel mount union U 4 1 4 B 12 x 10 3/8" x 1/4" Union

VK300

Flow characteristics Weight (g) Operating pressure range (MPa) 1 2 (P A) 2 3 (A R) Port size Valve model C [dm3/ (sbar)] b Cv C [dm3/ (sbar)] b Cv C [dm3/ (sbar)] b Cv C [dm3/ (sbar)] b Cv Grommet 0.44 0.40 0.40 0.44 0.40 0.41 0.63 0.63 0.41 0.63 0.13 0.10 0.10 0.13 0.10 0.20 0.14 0.14 0.20 0.14 VK332 0.47 0.41 0.41 0.47 0.41 0.85 0.65 0.65 0.85 0.65 0.47 0.38 0.38 0.47 0.38 0.76 0.41

VY511, VYU5

P 500 150 144 400 104 100 300 P 66 43 26 16 90 200 50 56 34 22 14 8 5 100 0 0 20 30 40 50 60 70 80 90 100 10 20 30 40 50 60 70 80 90 100 10 Bore size (mm) Bore size (mm) 1.15-33 Series VY511/VYU5 Precautions Be sure to read before handling. Refer to p.0-26 and 0-27 for Safety Instruction and common precautions on the products mentioned in this catalog.

VFR3000-OMY0001

N.O.3 3 1) 0.9MPa 2) 3) 50 4) 2 5) P ARBF3000,ARBF4000 ARBF3000,ARBF4000 ,P AB ARBF3050ARBF4050 A B P 1.0MPa 1) B A 0.10.83MPa 2) -560 () 3) N.C. N.O.

VHK

(mm) 2(A) Port size R(PT) 2(A) Port size R(PT) 1(P) 1(P) 1(P) 4 6 8 10 12 M5 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 4 6 8 10 12 1(P) M5 M5 4 M5 4 Tube O.D. (mm) Tube O.D.

Vacuum Equipment

Selection Procedure Max. adsorption flow from selection graph (4) Response time on (P . 13-1-13) Leakage volume /min (ANR) (P . 13-1-13) (2) B if there is leakage when adsorbing up a workpiece Ejector Select an ejector having a greater maximum suction flow rate than that of Qmax. given above.

VSA4

1 4/5 Port Air Operated Valve Series VSA420 Model Flow characteristics P A/B A/B EA/EB Valve model Port size Rc Note) Weight (kg) Body size Pilot port size Function SA C [dm3/(sbar)] 4.2 5.1 5.6 4.2 5.1 5.6 4.1 5.0 5.4 4.3 4.7 5.1 C [dm3/(sbar)] 4.1 5.9 6.5 4.1 5.9 6.5 4.0 6.0 6.6 4.0 5.8 6.4 Cv 0.95 1.3 1.5 0.95 1.3 1.5 0.95 1.4 1.5 0.96 1.3 1.5 b 0.30 0.30 0.33 0.30 0.30 0.33 0.31 0.28

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

6 29.5 16 12.8 28 5 47 63 6 30.5 18 12.8 29 5 50 63 6 30.5 18 12.8 29 5 50 78 8 39 23 13.7 35 7 61 78 8 39 23 13.7 35 7 61 B C D E F G H (Mounting hole) ZH05BS-06-01 ZH05BL-06-01 ZH07BS-06-01 ZH07BL-06-01 ZH10BS-06-01 ZH10BL-06-01 ZH13BS-08-02 ZH13BL-08-02 I J K L M N O P Model 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 ZH05BS-06-01 ZH05BL-06-01 ZH07BS-06-01 ZH07BL-06-01 ZH10BS

VHK

(mm) Port size R 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 4 6 8 10 12 1(P) 1(P) M5 4 6 8 10 12 1(P) 1(P) M5 Applicable tubing O.D. (mm) Applicable tube O.D. (mm) Applicable tubing O.D.

RB/RBL/RBQ

C J G5-S Material: Carbon steel Material: Polyurethane (mm) (mm) (mm) CV MM A B M16 x 1.5 M20 x 1.5 M25 x 1.5 M30 x 1.5 M32 x 1.5 B 3.5 4.5 5 6 6.6 C 22 27 32 41 41 h1 25.4 31.2 37 47.3 47.3 C 4 8 8.3 11.3 13.1 C 22 27 32 41 41 B 6 6 6 6 6 h M16 x 1.5 M20 x 1.5 M25 x 1.5 M30 x 1.5 M32 x 1.5 MM Part no. Part no. Part no.