XL

At 10-7 to 10-9Torr, 90% or more is moisture, at 10-12Torr or below, 98% or more is hydrogen. The other main residual gases have mass numbers of 28 and 35.

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

(mm) One-touch fitting 4 tube 6 tube 8 tubing 34 35 10 to 16 38 39 20 to 32 134 136 40, 50 Weight by Stroke (g) Pad dia.

Vacuum Pad: Ball Joint Type

One-touch fitting 4 tube 6 tube 8 tube 10 to 16 20 to 32 40, 50 34 35 38 39 134 136 Weight by Stroke (g) ZP3 Pad dia.

HRX-OM-M090

Fig 9.4-8 Cooling capacity (HRS024-A-20-G) 9.4 Cooling capacity HRS Series 9-10 HRX-OM-M090 Chapter 9 Documents 9.5 Heating capacity 9.5.1 HRS012--10,HRS018--10 800 800 Ambient Ambient temperature temperature 5 5 600 600 Heating capacity [W] 20 25 32 40 20 25 Heating capacity [W] 32 40 400 400 200 200 0 0 5 15 25 35 45 5 15 25 35 45 Circulating fluid temperature [] Circulating fluid temperature

VCA

+ 33, L2 = n x 35 + 44 Front ported: L1 = n x 35 + 69, L2 = n x 35 + 80 VV2CA4 Side ported: L1 = n x 41 + 35, L2 = n x 41 + 46 Front ported: L1 = n x 41 + 79, L2 = n x 41 + 90 n (stations) IN port direction Model Dimension 9 348 359 384 395 404 415 448 459 7 278 289 314 325 322 333 366 377 8 313 324 349 360 363 374 407 418 10 383 394 419 430 445 456 489 500 6 243 254 279 290 281 292 325

MK

/Flange Rod end width across flats 10 10 21 21 46 46 Data Part no.

LG1H

4-M8 x 1.25 thread depth 10 20 8H10 depth 10 Encoder signal line Bending radius 80 Motor power line Bending radius 80 8H10 depth 8 35 85 210 78.5 78.5 Stroke + 229 (table movement range) 107 10 95 Work piece mounting reference plane 55 Body mounting reference plane 52.5 Stroke + 386 1 125 8(4)-M6 x 1 thread depth 10 3(2)-8H10 depth 10 30 The body mounting reference plane and work piece

Title not found

9/16 21/32 21/32 11/32 11/32 9/32 9/32 10-FB3 10-FB2 10-FB4 10-FB1 10-FLB1 (Short) 10-FLB2 10-FLB2 (Short) 10-FLB1 21 Page 5 Distributed by Power Aire, Inc.

IDUS/IDFS

(C) 30 35 40 45 50 15 15 15 15 15 10 10 10 10 10 5 5 5 5 5 1.71 1.37 1.09 0.89 0.75 1.31 1.05 0.84 0.68 0.58 0.92 0.74 0.59 0.48 0.40 30 1.63 1.30 1.04 0.85 0.72 1.25 1.00 0.83 0.65 0.55 0.88 0.70 0.46 0.46 0.39 32 1.56 1.25 1.00 0.81 0.69 1.20 0.96 0.77 0.62 0.53 0.84 0.67 0.37 0.44 0.37 35 1.46 1.17 0.94 0.76 0.64 1.13 0.90 0.72 0.59 0.50 0.79 0.63 0.28 0.41 0.35 40 Data C: Correction Factor

Stainless Steel Heat

(C) 30 35 40 45 50 15 15 15 15 15 10 10 10 10 10 5 5 5 5 5 1.71 1.37 1.09 0.89 0.75 1.31 1.05 0.84 0.68 0.58 0.92 0.74 0.59 0.48 0.40 30 1.63 1.30 1.04 0.85 0.72 1.25 1.00 0.83 0.65 0.55 0.88 0.70 0.46 0.46 0.39 32 1.56 1.25 1.00 0.81 0.69 1.20 0.96 0.77 0.62 0.53 0.84 0.67 0.37 0.44 0.37 35 1.46 1.17 0.94 0.76 0.64 1.13 0.90 0.72 0.59 0.50 0.79 0.63 0.28 0.41 0.35 40 Data C Correction factor

Digital Flow Switches Series PF2A

How to Order Integrated Display Type M PF2A7 10 01 27 Flow rate range 1 to 10 l/min 5 to 50 l/min 10 to 100 l/min 20 to 200 l/min 50 to 500 l/min 10 50 11 21 51 Thread type Unit specification Nil M With unit switching function Fixed SI unit Note) Nil N F Lead wire (Refer to page 35.)

VQ5000

Indicate 10 to 12 stations on the manifold specification sheet.) One station is used for serial unit mounting.

Miniature Fittings M3, R(PT) 1/8, M5 Series M

KFV-04 KFV-06 KFN-04 KFN-06 KFW-04 KFW-06 KFS-04 KFS-06 4/2.5 6/4 KFV-08U 8/5 KFV-08N 8/6 KFV-10U 10/6.5 KFV-10N 10/7.5 KFV-12U 12/8 KFV-12N 12/9 4 6 KFN-08 8 KFN-10 10 KFN-12 12 4/2.5 6/4 KFW-08U 8/5 KFW-08N 8/6 KFW-10U 10/6.5 KFW-10N 10/7.5 KFW-12U 12/8 KFW-12N 12/9 4 6 KFS-08 8 KFS-10 10 KFS-12 12 Precautions Be sure to read before handling.

INFORMATION Step Motor Controller 5 types of communication protocols New New

Sequence 1 Sequence 2 Sequence 3 Sequence 4 0 10 100 4 JXCE1/91/P1/D1/L1 Series Dimensions JXCE1 JXC91 JXCE1/JXC91 35 4.5 For body mounting (Screw mounting) 35 (11.5) 67 32.5 4.5 32.5 1.2 84.2 64.2 35 193.2 (When removing DIN rail) 193.2 (When removing DIN rail) 187.3 (When locking DIN rail) 187.3 (When locking DIN rail) 152.5 152.5 170 161 170 161 Mountable on DIN rail (35 mm) 77 17.5 17.5

25

A 13 15 22 06 08 10 340 400 460 580 640 820 1120 1300 1600 1900 2320 2500 End bracket/IZS40-BE 35 22 4.5 30 44 2 x 5.4 18 105 33 L 33 Intermediate bracket/IZS40-BM 55 35 22 4.5 36 30 18 2 x 5.4 A 105 33 A A-A section 432 Ionizer IZS40/41/42 Series Dimensions Feedback sensor/IZS31-DF 2 x 3.4 Amplifier 2 x 3.4 Head 1500 3500 IZS IZS 9 16.6 13 SMC IZN 4.8 10.2 25 58 4.8 69 23 87.5 IZF 78 ZVB

C95Series

10 !

One-touch fitting manifold series KM has 6 different model options available. Male thread and female thread options available on certain models. Tube material includes nylon, soft nylon and polyurethane.One-touch fittings manifold, Models: 11, 12, 13, 15, 16, Variety of tube sizes available, Inch and metric sizes available, FITTING, CONNECTORS, KM FITTING MANIFOLD, GX, KM 1/4,

Short Stroke Electric Actuator Series LX

(5) 2-M2.5 x 0.45 depth 2 5 Stroke + 113 10.5 2.5 2-M4 x 0.7 thread depth 9 31 G 28 58 5H9 +0.030 0 depth 5 (5.5) 10 D-M4 x 0.7 (for work piece mounting) 10.5 12 2-M3 thread depth 5 (3.5) 6 4-8 50 18.5 10 20 17.5 22 25 35 (5) 62 72 12 (6) 8 (15) 1 0.2 31 5H9 +0.030 0 depth 5 Photo micro sensor wire (300mm) 10 13 1.5 [5.5] 6 25 (4) 30.5 10 (39.5) E Motor wire (300mm) Stroke + 135 The dimension

VCA

+ 33, L2 = n x 35 + 44 Front ported: L1 = n x 35 + 69, L2 = n x 35 + 80 VV2CA4 Side ported: L1 = n x 41 + 35, L2 = n x 41 + 46 Front ported: L1 = n x 41 + 79, L2 = n x 41 + 90 n (stations) PB IN port direction Model Dimensions 9 348 359 384 395 404 415 448 459 8 313 324 349 360 363 374 407 418 10 383 394 419 430 445 456 489 500 6 243 254 279 290 281 292 325 336 7 278 289 314 325 322 333

MXW

15 15 K A 35 20 26.5 A 3 Z N-M5 x 0.8 thread depth 10 (N 1) x H G H 6 Bottom through-hole 4.2 M5 x 0.8 thread depth 10 GG 5H9 +0.030 depth 4.5 Bottom through-hole 4.2 0 F E 5H9 +0.030 depth 4.5 0 (mm) E F G Model GG H J K L N Z MXW12-100 91 123 82.5 30 35 114 35 51 5 280 MXW12-125 111 158 102.5 32.5 35 137 60 76 6 330 MXW12-150 136 182 127.5 47.5 40 164 85 101 6 380 8-7-13 14 Series MXW