Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1 Q 140 185 290 QQ 16.4 20.4 25.5 QW 66 98 110 NV 4.5 6.6 9 NX 7.3 10.5 14 PP 5.3 8 16 Model MY2HT16G MY2HT25G MY2HT40G U 5 6 8 UU 3 4.4 2 VV 10.5 15.3 29 X 7 9 12 XX 12 14 23 Y 5 8 12 Z 160 210 330 Model MY2HT16G MY2HT25G MY2HT40G P indicates cylinder supply ports.
6.2 6.2 3.8 6.2 6.2 1.8 6.2 6.2 5.8 6.2 6.2 3.8 16 6.7 6.7 3.3 6.7 6.7 1.3 6.7 6.7 5.3 6.7 6.7 3.3 20 7.5 10 7.5 10 7.5 10 2 7.5 10 25 8 12 8 12 8 12 8 12 Auto Switch Mounting Height U [mm] Auto switch model Bore size D-M9V, D-M9WV, D-M9AV U 12 19.5 16 21 20 23 25 24.5 W A B A Operating Range [mm] Auto switch model Applicable bore size 12 16 20 25 D-M9m(V)/M9mW(V)/M9mA(V) 3 3 4.5
N T, F, N are order made specifications.
5 Port Air Operated Valve Series VFA3000 How to Order Thread type (Including pilot port) Nil Rc G NPT NPTF Port size (P, A, B port) F N T 01 02 1 8 1 4 R1, R2 port are 1/8. Option F Foot bracket Mounting bracket are supplied, but unattached.
Positioning complete signal 19 OZ+ Z Z 10 20 COIN OZ+ 14 GND VDC 12 to 24V 13 4.7k COM Torque monitor: Zout 4.7k 12 + IM VDD 30V max. 15mA max. 11 Speed monitor: Zout 4.7k 4.7k SP + 21 CZ Z (Pin 14 is GND.) 26 FG CN I/F 205 Non-standard Motor Compatible Drivers Mitsubishi Electric Corporation Drivers for LJ1, LG1, LX Dimensions (RS-232C without optional unit) Driver 5 100 40 1-5 hole 5
Time Accumulated pulse output mode 50 msec Time -35No.LV50***-OMQ0002-G [F 2] Setting of OUT2 Set the output mode of OUT2.
110 R 5 8 12 RR 5.3 8.5 11 NV 4.5 6.6 9 NW 85.2 124.8 150.1 NX 7.3 10.5 14 PP 5.3 8 16 Q 140 185 290 QQ 16.4 20.4 25.5 Model MY2HT16G MY2HT25G MY2HT40G U 5 6 8 UU 3 4.4 2 VV 10.5 15.3 29 X 7 9 12 XX 12 14 23 Y 5 8 12 Z 160 210 330 "P" indicates cylinder supply ports.
) 12 16 20 25 (mm) C1 9 10 12 15 H1 M5 x 0.8 M6 x 1.0 L1 14 15.5 18.5 22.5 X 10.5 12 14 17.5 M8 x 1.25 M10 x 1.25 Standard Bore size (mm) Stroke range (mm) A 25.5 25.5 29 32.5 (mm) Without auto switch With auto switch C D E F H I K L M N OA OB Q RA RB T B 22 22 24.5 27.5 A 30.5 30.5 39 42.5 B 27 27 34.5 37.5 12 16 20 25 5 to 30 5 to 30 5 to 50 5 to 50 6 8 7 12 6 8 10 12 25 29 36 40 5 5 5.5
Control Valves Air Grippers Modular F.
4 port) 74.5 66.5 8.5 PE port 23 13.5 SMC 16 16 M5-2 ports 12, 14 port 1/8-2 ports 2, 4 port 1/8 1 port 1/8-2 ports 3, 5 port EVS1-02-FG-D-M0 EVS1-02-F G-D-M0 H J I 136 149 68 21.5 (14 port) 68 21.5 (12 port) 21.5 (14 port) 21.5 (12 port) 8.5 (4 port) 8.5 (2 port) 8.5 (4 port) 8.5 (2 port) 14 4 2 12 14 4 2 12 12 12 25 34 34 18 18 25 14 14 Indicator light Indicator light 5 1 3 5 1 3 32.5 29.5
4 port) 74.5 66.5 8.5 PE port 23 13.5 SMC 16 16 M5-2 ports 12, 14 port 1/8-2 ports 2, 4 port 1/8 1 port 1/8-2 ports 3, 5 port EVS1-02-FG-D-M0 EVS1-02-F G-D-M0 H J I 136 149 68 21.5 (14 port) 68 21.5 (12 port) 21.5 (14 port) 21.5 (12 port) 8.5 (4 port) 8.5 (2 port) 8.5 (4 port) 8.5 (2 port) 14 4 2 12 14 4 2 12 12 12 25 34 34 18 18 25 14 14 Indicator light Indicator light 5 1 3 5 1 3 32.5
4 port) 74.5 66.5 8.5 PE port 23 13.5 SMC 16 16 M5-2 ports 12, 14 port 1/8-2 ports 2, 4 port 1/8 1 port 1/8-2 ports 3, 5 port EVS1-02-FG-D-M0 EVS1-02-F G-D-M0 H J I 136 149 68 21.5 (14 port) 68 21.5 (12 port) 21.5 (14 port) 21.5 (12 port) 8.5 (4 port) 8.5 (2 port) 8.5 (4 port) 8.5 (2 port) 14 4 2 12 14 4 2 12 12 12 25 34 34 18 18 25 14 14 Indicator light Indicator light 5 1 3 5 1 3 32.5 29.5
P Dimensions (mm) DIN flange 80 A B C D E F G K L M N P Model IDFA150F Port size 950 1290 1332 268 720 1432 475 20 990 217 935 1030 100 IDFAE/F Series Options 1 For How to Order optional models, refer to pages 92, 95 and 98.
type Temperature rise 12 (P1) 12 (P1) 10 (P2) PB Power consumption DC Holding Inrush Apparent power AC Air operated 2 (B) 1 (A) 2 (B) 1 (A) 2 (B) 1 (A) 10 (P2) Manual override VNA11 VNA12 12 (P1) 12 (P1) External pilot solenoid 1 (A) 2 (B) 2 (B) 1 (A) 17-4-7 4 Series VNA Port size 6A, 8A, 10A Applicable cable O.D. 6 to 8 (D.T) 125 (Conduit terminal: T DIN terminal: D) 108.2 (Grommet terminal
Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations
circuits How to Order MQR F 4 M5 Connection diameter Low torque Rotary joint (Metal seal type) M5 M5 x 0.8 Number of circuits 1 circuit 2 circuits 4 circuits 8 circuits 12 circuits 1 2 4 8 12 Options N/A Standard type FNote) Flange type Note: No flange type in 1 circuit system Options / Mounting bracket Number of circuits Flange part number 2 circuits MQR2-F 4 circuits MQR4-F 8 circuits
bracket type With bracket which can be mounted to the back of the previous type With bracket which can be mounted to the foot at the back of the previous type Symbol Type Rc NPT G Nil N F With bracket which can be mounted to the back of the previous type: C With bracket which can be mounted to the foot at the back of the previous type: F 56 2 x M4 x 0.7 2 x 4.5 84 72 45 7 48.5 41 5 Process
Description Size 090 050 Note 1 Filter Rc1 (5 F) V The value in ( ) shows the nominal filtration accuracy. Rc1/2 (5 F) V The value in ( ) shows the nominal filtration accuracy. 2 Filter Rc1/2 (5 F) V V 8 Y-strainer Rc1/2 #40 V V Install either the strainer or filter. If foreign matter with a size of 20 m or more are likely to enter, select the particle filter, and then prepare it.
to 24 VDC ZNR ZNR 12 to 24 VDC SOL DC () 100 to 200 VAC SOL 2 DC () ZSE ISE 2 ( ) PNP open collector output Conduit terminal DIN type connector With indicator light AC Circuit Conduit terminal With indicator light DC circuit PSE DC (+) 1 ( ) 1 DC (+) MAX 80 mA Rectifying device Z I SE3 OUT Load 12 to 24 VDC ZNR ZNR 100 to 200 VAC 12 to 24 VDC SOL SOL DC () PS 2 ( ) LED 2 DC () indicator