2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

4 2 0 0 2 4 6 8 10 12 14 30 25 20 15 10 5 0 0 2 4 6 8 10 12 14 6 5 150 kPa 350 kPa 150 kPa 150 kPa Flow [L/min] Flow [L/min] Flow [L/min] 4 3 350 kPa 350 kPa 2 750 kPa 750 kPa 750 kPa 1 0 0 2 4 6 8 10 12 14 Number of needle rotations Number of needle rotations Number of needle rotations PF2M711(-L) PF2M721(-L) 100 L/min 200 L/min PF2M750(-L) 50 L/min 120 100 80 60 40 20 0 0 2 4 6 8 10 12

CA2

BAF-08 BAF-10 BA-04 BA-05 BA-06 BA-08 BA-10 CS1 CS2 Note 1) Auto switch brackets are included in the D-A3lC/A44C/G39C/K39C types.

Electro-Pneumatic Proportional Valve

Base mounted Body ported Base mounted Voltage 5 6 24VDC 12VDC Port size Nil M5 01 01F 01N 01T Without sub-plate (PVQ13, 33) With sub-plate (PVQ13 only) Rc 1/8 G 1/8 NPT1/8 NPTF 1/8 Electrical entry Orifice size L type plug connector, with lead wire (PVQ13 only) M type plug connector, with lead wire (PVQ13 only) Grommet (PVQ31, 33) L 03 04 06 08 16 23 40 0.3mm ( for PVQ13) 0.4mm ( for PVQ13

IR1000/2000/3000

Supply pressure: 0.7 MPa Set pressure: 0.2 MPa Flow rate: 0 /min (ANR) Back pressure: 0.5 MPa Supply pressure: 0.5 MPa IR2000-02 IR2000-02 IR2000-02 0.204 0.5 0.2 Set pressure P2 (MPa) Set pressure (MPa) Set pressure (MPa) 0.4 0.202 F.R.L.

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

Without lead wire: (with connector and 2 of sockets only) SY100-30-A Rated voltage Lead wire length 5 6 V S R 1 2 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz [115 VAC 50/60 Hz] Nil 6 10 15 20 25 30 50 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm Electrical entry G H L LN LO M MN MO W0 Grommet, 300 mm lead wire Grommet, 600 mm lead wire

NAIV

N Body 2Yq 3-3/s s-Y4 6 1 A 1 y 2 9-2 B Brackel D Threaded draln poft (Female) except 220. Port slzo o2% o3-% 04-'/z 06 % to1 741'/z 20-2 Thread 1 Male 2fumale. ,NAMC220, 32O,520 only HowTo Select Flow Characteristics Supply prossure: 71 PSI Supply pressurei 71 tl 12 10.5 I 6 ! e E , q 1.5 8 1 2 1 6 2 0 Cylinder speed (in/sec.)

VQC

Connector wiring diagram (mixed wiring) Connector type manifold 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing

Pad Diameter: 02 (ø2), Pad Styles: U (Flat Style), Material: GS (Conductive Silicon Rubber), Vacuum Entry: 06 (One-touch Fitting Ø6), Mounting Thread: A5 (M5X0.8)

Pad Diameter: 02 (ø2, Flat Style), Pad Styles: U (Flat Style), Material: N (NBR), Vacuum Entry: 06 (One-touch Fitting Ø6), Mounting Thread: A5 (M5X0.8)

Pad Diameter: 02 (ø2, Flat Style), Pad Styles: U (Flat Style), Material: S (Silicon Rubber), Vacuum Entry: 06 (One-touch Fitting Ø6), Mounting Thread: A5 (M5X0.8)

Pad Diameter: 02 (ø2, Flat Style), Pad Styles: U (Flat Style), Material: N (NBR), Vacuum Entry: 06 (One-touch Fitting Ø6), Mounting Thread: B4 (Female Thread M4X0.7)

Pad Diameter: 02 (Flat Style), Pad Styles: U (Flat Style), Material: N (NBR), Rotating or Non-rotating: K (Non-rotating), Stroke: 6mm, Vacuum Entry: 06 (One-touch Fitting Ø6), Mounting Thread: A8 (M8X1)

Pad Diameter: 02 (Flat Style), Pad Styles: U (Flat Style), Material: S (Silicon Rubber), Rotating or Non-rotating: K (Non-rotating), Stroke: 6mm, Vacuum Entry: 06 (One-touch Fitting Ø6), Mounting Thread: A8 (M8X1)

Pad Diameter: 02 (Flat Style), Pad Styles: U (Flat Style), Material: S (Silicon Rubber), Rotating or Non-rotating: K (Non-rotating), Stroke: 15mm, Vacuum Entry: 06 (One-touch Fitting Ø6), Mounting Thread: A8 (M8X1)

Pad Diameter: 02 (Flat Style), Pad Styles: U (Flat Style), Material: U (Urethane Rubber), Rotating or Non-rotating: K (Non-rotating), Stroke: 25mm, Vacuum Entry: 06 (One-touch Fitting Ø6), Mounting Thread: A8 (M8X1)

Body Size: 2 (1/8, 14), Type: 2 (Elbow), Control Type: 0 (Meter-out), Model: 1FS, Thread: N (NPT), Port Size: 02 (1/4), Width Across Flats: 9 mm (or None: Sizes 2/3/4), Applicable Tubing: 06 (ø6), Seal: S (with Sealant)

Laterial vacuum entry without buffer series, Pad diameter: 02, 04, 06, 08, 10, 13, 16, 20, 25, 32, 40, 50 (mm), Pad style: flat, flat w/ribs, deep, bellows, Material: NBR, silicon rubber, urethane rubber, flourine rubber, EPR, Rotating or non-rotating, Multiple vacuum entry/mounting thread diameters VACUUM PAD, ZP, ZP2, ZP3. VACUUM PAD WITH BUFFER. 24.70000 lb. M30.

Body Size/Type: 22 (Elbow Size 01, 02 Standard), Control Type: 1 (Meter-in), 1: 1, Thread Type: G (G), Port Size: 01 (1/8), Applicable Tubing O.D: 06 (ø6)

Stations: 02 (2 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: Rc, Supply Unit Components: P (w/o Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 40 (5 to 40 L/min), Return Unit Components: S (w/Flow Adj.

Laterial vacuum entry without buffer series, Pad diameter: 02, 04, 06, 08, 10, 13, 16, 20, 25, 32, 40, 50 (mm), Pad style: flat, flat w/ribs, deep, bellows, Material: NBR, silicon rubber, urethane rubber, flourine rubber, EPR, Rotating or non-rotating, Multiple vacuum entry/mounting thread diameters VACUUM PAD, ZP, ZP2, ZP3. VACUUM PAD W/O BUFFER. 25.50000 lb. M30.