3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

override 34 41 3.5 (Lead wire) 38.5 300 Cover diameter 1.6 Cross section 0.34mm2 SMC 35.5 A port PE 16 12 14.5 7 7.5 7.5 7.5 3-Rc(PT)1/8 P/A/R port M5 X 0.8 PE port L plug connector (L): VQZ115(R)-lLl-01 M plug connector (M): VQZ115(R)-lMl-01 60.5(65.5) 300 (Lead wire) Cover diameter 1.5 51.5(52.5) 300 (Lead wire) Cross section 0.23mm2 55.5(59) Indicator light Indicator light Cover dia 1.5

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

VQZ3000 VFS VS 0.7 0.9 VS7 Bore size (mm) Cylinder speed (mm/s) Base mounted (With sub-plate) Cv Series CJ2 Series CM2 Series CA1 6 10 16 20 25 32 40 40 50 63 80 100 150 300 VQZ1000 Body width 10 450 0.3 V V V 600 750 150 300 VQZ2000 Body width 15 0.6 450 V 600 V V 750 150 300 VQZ3000 Body width 18 0.9 450 V V V V V 600 750 Cylinder speed marked with can be controlled by speed controller

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Made to Order How to Order 2 1 F 06 200 AS S Lubricant: Vaseline -X12 Example) AS2002FS-04-X12 Made to Order Body size Grease-free (Seal: Fluorine-coated) + Restrictor (Without check valve) -X21 100 M5 standard 200 1/8 standard 205 1/4 standard 300 3/8 standard 400 1/2 standard Applicable tubing O.D.1 Example) AS2002FS-04-X21 * Not particle-free Metric size Inch size 23 3.22 04 4 06 6 08

High Speed Pilot Operated

Ex. 1) Cable length: 300 mm DXT1215T-5W1U-01m(-X1) Symbol for electrical entry MNon-locking push type Push the manual override button all the way down. 2.

99

2 m 4 m 6 m 13 m Filtration efficiency 99% FQ1 HEPO 2 FGH100 to 300 FN The membrane element cannot be selected for FGH100.

Return Filter FH100 Series

N.C. 0.003 View port G1/2 0.001 30 50 100 300 500 Flow rate (L/min) Conditions Fluid: Turbine oil Class 2 VG56 Measured pressure: 1 MPa Viscosity: 45 mm2/s Filter material: Micromesh Nominal filtration: 74 m Refer to page 529 for Microswitch for differential pressure indication switch. 519 FH100 Series Dimensions Differential pressure indication switch 62 F Differential pressure indicator

Mist Separator Series AM Model Series AM can separate and Model AM850 AM250 AM350 AM450 AM550 AM650 AM150 remove oil mist in compressed air Rated flow 750 1500 2200 3500 6000 12000 300 (1) (l/min (ANR)) which is difficult to remove by Port size ordin

AM X6 AM X15 Body size Body size Options Options (Not available with element service indicator "T") Thread Accessories Thread Accessories Port size Port size Dimensions Dimensions HAl AT IDl Model Port size A 239 252 258 284 B 80 1 8 1 4 3 8 , , AM150 AMG 1 4 3 8 , Model Connection A 240 260 300 380 B 256 300 349 496.5 AM250 80 1 2 AM450 AM550 AM650 AM850 3/4B/FF/10K 1B/FF/10K AFF 3 8 1 2

AMG

How to Order X15 AMG Body size Optional specifications Accessories Thread Port size Dimensions Model Connection A 240 260 300 380 B 256 300 349 496.5 B, FF, 10K 1B, FF, 10K AMG450 AMG550 AMG650 AMG850 3/4 1 1/2 B, FF, 10K 2B, FF, 10K 4.4-6

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

mm/s (Refer to page 19.) 150 cm3/min or less 200 cm3/min or less 300 cm3/min or less 400 cm3/min or less Supply pressure 0.1 MPa Total allowable leakage 800 cm3/min or less 1000 cm3/min or less 1200 cm3/min or less 1600 cm3/min or less Supply pressure 0.3 MPa 1500 cm3/min or less 2000 cm3/min or less 3000 cm3/min or less 4000 cm3/min or less Supply pressure 0.5 MPa Note 1) Value when horizontal

For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

Indicator light and surge voltage suppressor Coil voltage None With surge voltage suppressor With indicator light and surge voltage suppressor S Z 100V AC(50/60 Hz) 200V AC 110V AC 24V DC 12V DC Others voltages 1 2 3 5 6 Note) Coil voltage 100V AC: With surge voltage suppressor. Note) "YOZ" is not available. 9(1) Note 1) Contact SMC for other voltages.

Series: LEFG (Guide), Size: 25, Mounting Pitch: BS (Belt Drive, AC Servo Motor), Stroke, mm: 1200

Series: LEFG (Guide), Size: 25, Mounting Pitch: BT [Belt Drive, Step Motor/Servo Motor (24VDC)], Stroke, mm: 1800

Series: LEFG (Guide), Size: 25, Mounting Pitch: BS (Belt Drive, AC Servo Motor), Stroke, mm: 1000

Series: LEFG (Guide), Size: 25, Mounting Pitch: BT [Belt Drive, Step Motor/Servo Motor (24VDC)], Stroke, mm: 1000

Series: LEFG (Guide), Size: 25, Mounting Pitch: BS (Belt Drive, AC Servo Motor), Stroke, mm: 1500

Series: LEFG (Guide), Size: 25, Mounting Pitch: BS (Belt Drive, AC Servo Motor), Stroke, mm: 1800

Series: LEFG (Guide), Size: 25, Mounting Pitch: BS (Belt Drive, AC Servo Motor), Stroke, mm: 500

Series: LEFG (Guide), Size: 25, Mounting Pitch: BT [Belt Drive, Step Motor/Servo Motor (24VDC)], Stroke, mm: 800

Series: LEFG (Guide), Size: 25, Mounting Pitch: BT [Belt Drive, Step Motor/Servo Motor (24VDC)], Stroke, mm: 700

Series: LEFG (Guide), Size: 25, Mounting Pitch: BT [Belt Drive, Step Motor/Servo Motor (24VDC)], Stroke, mm: 1200