Compact

VDC) Step Motor (Servo/24 VDC) LEF LEJ LEL LEM LEM LEY LES LEPY LEPS LER LEH LEY -X5 11LEFS 11LEJS 25ALinear Guide Single Axis Type LEMH Series Linear Guide Double Axis Type LEMHT Series LEC Step Motor (Servo/24 VDC) Step Motor (Servo/24 VDC) LEC S LEC SS-T LEC Y Motorless LAT LZ LC3F2 169 Step Motor (Servo/24 VDC) Electric Actuator/Low Profile Slider Type LEM Series Model Selection LEMB

Slider Type Ball Screw Drive/11-LEFS Series

VDC) Servo motor (24 VDC) Step motor (Servo/24 VDC) Max. number of step data 64 points 14 points Power supply voltage 24 VDC Reference page Page 560 Page 560 Page 600 Page 576 Page 590 515 11-LEFS Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specication Specifications Step Motor (Servo/24 VDC) Model 11-LEFS16 11-LEFS25 11-LEFS32 11-LEFS40 Stroke [mm] Note 1) 50 to 500

EXxx-OMN0035CN

DYNE 1325 24 V 1~814~21 DC24 V DC24 V 1325 24 V 1~814~21 FE FE -37No.EX-OMN0035CN-A OFF ON SI (3)EX600-DYF EX600-DYPF EX600-DYNF 1 0 V() 24 V() 2 0 0 3 0 V() 24 V() 4 1 1 0 V() 24 V() 2 2 1 3 0 V() 24 V() 4 3 1 0 V() 24 V() 2 4 2 3 0 V() 24 V() 4 5 1 0 V() 24 V() 2 6 3 3 0 V() 24 V() 4 7 1 0 V() 24 V() 2 8 4 3 0 V() 24 V() 4 9 1 0 V() 24 V() 2 10 5 3 0 V() 24 V() 4 11 1 0 V() 24 V

1

52 174 198 42 54 92 80 14.5 25.5 74 28 156 180 140 17.5 M12 x 1.75 32 40 50 63 117 117 12 16 20 25 24 24 24 28 33 34 36 38 200 121 122 124 124 48 48 48 52 45 46 48 50 300 171 172 174 174 83 84 86 88 124 200 200 300 300 105 105 167 167 15 17 29 29 25 27 39 39 77 77 20 24 24 24 40 44 44 44 120 120 200 200 200 300 300 300 124 124 128 124 20 72 320 90 74 148 220 121 171 28 64 210 236 35

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

25.5 28.5 32.5 MU DL1 + Stroke A1 + 2 (Stroke) -X Foot Style Bore size (mm) Stroke range (mm) 12 16 20 25 Y X LZ LY LX LT LS LH LG LD L B A 205 to 30 4.5 8 44 29.5 34 2 20.4 17 2.8 4.5 13.5 32.4 59.4 5 to 30 5 8 48 33.5 38 2 24 19 2.8 4.5 13.5 36 63 Data 5 to 50 5.8 9.2 62 42 48 3.2 26 24 4 6.6 14.5 38 67 5 to 50 5.8 10.7 66 46 52 3.2 24 26 4 6.6 15 39 69 Foot bracket material: Carbon steel

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

LEF Auto switch model D-M9NV D-M9N D-M9B D-M9BV D-M9PV D-M9P Electrical entry direction In-line Perpendicular In-line Perpendicular In-line Perpendicular LEJ Wiring type 2-wire 3-wire NPN PNP Output type LEL Applicable load IC circuit, Relay, PLC 24 VDC relay, PLC Power supply voltage 5, 12, 24 VDC (4.5 to 28 V) LEM Current consumption 10 mA or less Load voltage 24 VDC (10 to 28 VDC) 28

Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) 1

at 24 VDC Operating positionRed LED lights when ON.

Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) 1

current 100 A or less at 24 VDC 0.8 mA or less at 24 VDC MHC Indicator light Red LED lights when ON.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

, 15/60 Hz Refer to pages 3-3-24 to 3-3-27 for manifold use.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Model L M N W H E W 12 19 10 12 6 8 10 4 6 LQ2U22 LQ2U21 19 18 19.9 16 55 1/4 (M) LQ2U52 LQ2U51 LQ2U42 LQ2U41 LQ2U33 LQ2U32 LQ2U31 SMC 65 22 24 26.2 24 H 77 64 (E) (E) L 28 30 33.1 30 21 Class 2, 3 88 75 32 36 40 36 26 86 (M) N Inch sizes Applicable tubing O.D.

New

) 48 VAC 2G 2H 2V 2J 220 VAC 240 VAC 24 VAC 12 VDC 24 VDC 2K 2L 100 VAC 110 VAC 200 VAC 230 VAC 2M 2N 2P 2Q 2R 2S Conduit terminal (With surge voltage suppressor) 48 VAC 220 VAC 240 VAC 2W 24 VAC 12 VDC 24 VDC 2T 3A 3B 3C 3D 3E 3F 100 VAC 110 VAC 200 VAC 230 VAC DIN terminal (With surge voltage suppressor) 48 VAC 3G 3H 3V 3J 220 VAC 240 VAC 24 VAC 12 VDC 18 Series VX2 Construction VXN Construction

CM2

Since there are other applicable auto switches than listed above, refer to page 6-4-24 for details.

MGP

24 24 24 24 28 4.5 4.5 6 6 48 48 48 52 3 3 4 4 6 6 8 8 32 40 50 63 124 124 124 128 300 300 300 300 171 172 174 174 M8 x 1.25 M10 x 1.5 M10 x 1.5 MGPM (slide bearing)/Dimensions A, DB, E MGPL (ball bushing)/Dimensions A, DB, E (mm) (mm) A E DB A E DB Over 200st Over 50st to 100st Over 50st to 100st Bore size (mm) Bore size (mm) Over 200st Over 100st to 200st Over 100st to 200st Over 50st

High Purity Fluoropolymer

Model L M N W H E W 4 6 19 LQ2U22 LQ2U21 19.9 55 18 16 1/4 (M) 10 LQ2U52 LQ2U51 LQ2U42 LQ2U41 LQ2U33 LQ2U32 LQ2U31 SMC 65 6 8 26.2 22 24 24 H 77 64 (E) (E) 12 19 10 12 L 33.1 21 28 30 30 Class 2, 3 88 75 40 26 32 36 36 86 (M) N Inch sizes Applicable tubing O.D.

Vacuum System Peripherals:

24 e Valve Model Fill in the blanks below with symbols of necessary specifications.

C85

8 5 10 14 5.5 17 38 22 6 12 9 16 14 9.5 16 19.7 6H9 16 M5 x 0.8 M16 x 1.5 M6 x 1 18.3 6.2 24 8 5 10 13 5.5 17 38 22 6 12 9 16 14 9.5 16 19.7 20 M22 x 1.5 G 1/8 M8 x 1.25 24 8.2 32 11 62 126 6 13 115 11 8.5 95 20 44 24 8 16 12 22 17 8 8 11.5(13) 15(17) 15(17) 20 28 8 25 M22 x 1.5 G 1/8 M10 x 1.25 30 32 11 65 137 8 126 17 11 104 22 50 28 10 16 12 22 20 8 8 11.5(13) 15(17) 15(17) 10.5 10.2

Environment

VDC) Servo motor (24 VDC) Step motor (Servo/24 VDC) Maximum number of step data 64 points 14 points Power supply voltage 24 VDC Reference page Page 560 Page 560 Page 600 Page 576 Page 590 487 A LEY-X5 Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Dust-tight/Water-jet-proof (IP65 Equivalent) Specifications Step Motor (Servo/24 VDC) Model LEY25 LEY32 Stroke [mm] Note 1) 30, 50, 100

SMC Pneumatic Clean Series

Application Relay, PLC 24 VDC relay, PLC IC circuit, Relay, PLC Load current range Indicator light Type Reed switch 2-wire 3-wire Solid state switch Load voltage 24 VDC, 100 VAC 24 VDC (10 to 28 VDC) 28 VDC or less Auto switch part no.

Table of Contents

23 24 23 24 22 23 30 31 39 41 47 49 61 63 69 74 73 78 95 100 6 8 6 8 8 10 8 10 8 10 10 12 10 12 10 12 10 R 1/8 23.4 27.4 39.8 45.8 17.6 14 R 1/4 25.4 31.4 39.8 45.8 17.6 12 R 1/8 26.7 30.7 45.3 52.8 24 14 R 1/4 28.7 34.7 45.3 52.8 24 17 R 3/8 30.4 36.7 45.3 52.8 24 17 R 1/4 33.8 39.8 49.6 55.6 30 17 R 3/8 35.5 41.8 49.6 55.6 30 22 R 1/2 37.6 45.8 49.6 55.6 30 Dimension with cover Reference

CQ2

2.8 19 24 2 38 33.5 48 8 5 5 to 50 67 38 14.5 6.6 4 24 26 3.2 48 42 62 9.2 5.8 CQ2 5 to 50 69 39 15 6.6 4 26 24 3.2 52 46 66 10.7 5.8 Flange/CDQ2WF MU Rod end male thread (mm) Bore (mm) A1 L4 L3 12 16 20 25 70.4 77 85 94 24 25.5 28.5 32.5 14 15.5 18.5 22.5 Flange (mm) Bore (mm) Stroke range (mm) A L2 B FD FT FV FX FZ L1 5 to 30 12 16 20 25 13.5 3.5 49.4 32.4 4.5 5.5 25 45 55 5 to 30 13.5