Body Class: ø22 Orifice, Valve Type: N.C., Tube Size: 1" or ø25, Pilot Port Thread: LQ1 Integral Fitting, 1/8" (3mm), Pilot Port Direction: Direction 1, Option 1: High Back Pressure, 0.42 MPa, Option 2: High Flow Spec, LVQ6* Only

Body Class: 20, Fitting Type: LQ1, Tube Size: Inch: 1/8" O.D.; Metric: 3 x 2, Thread Type: -

Body Class: 20, Fitting Type: LQ1, Tube Size: Inch: 1/8" O.D.; Metric: 3 x 2, Thread Type: NPT

Body Class: 20, Fitting Type: LQ1, Tube Size: 1/4" O.D., Thread Type: -

Body Class: 20, Fitting Type: LQ1, Tube Size: 1/4" O.D., Thread Type: NPT

Body Class: 40, Fitting Type: LQ1, Tube Size: 3/8" O.D., Thread Type: -

Body Class: 40, Fitting Type: LQ1, Tube Size: 3/8" O.D., Thread Type: NPT

Body Class: 40, Fitting Type: LQ1, Tube Size: 1/2" O.D., Thread Type: -

Body Class: 40, Fitting Type: LQ1, Tube Size: 1/2" O.D., Thread Type: NPT

Body Class: 40, Fitting Type: LQ1, Tube Size: 12 x 10, Thread Type: NPT

Body Class: ø4 Orifice, Valve Type: N.C., Fitting Type: LQ2, Body Class: 2, 3, 4, 5, Tube Size: 1/4", Output Tube Size: None, Pilot Port Thread: LQ1 Integral Fitting, 1/8" (3mm), Pilot Port Direction: Direction 1, Option 1: Flow Rate Adjustment, Option 2: -

Function (Relief): No, Supply Side Connection Type: [One-Touch] Straight Fitting, Supply Side, Connection Diameter: Ø2, Operating Pressure Range(MPa): null～0.5, Control Side Connection Type: [One-Touch] Straight Fitting, Control Side, Connection Diameter: Ø2, Pressure Gauge: [Not Provided] No, Size of Body: 1, Custom-made Specifications: Standard, Pilot Port Screw Type: Rc 1/8, Fitting Type: LQ1

The LVD valves have PFA body materials and integral fittings (Hyper Fitting series LQ1 and clean series KP). High purity, compact type with integral fittings; Mounting base dimensions conform to SEMI standard F65-1101 (Except for LVD10); New PFA body; Piping from 4 directions are possible; Variety of tubing sizes available  

The LVD valves have PFA body materials and integral fittings (Hyper Fitting series LQ1 and clean series KP). High purity, compact type with tube extensions; New PFA body; Piping from 4 directions are possible; Variety of tubing sizes available; Dimension across inlet/outlet ports: Reduced by up to 29% compared to the LVC series

The LVD valves have PFA body materials and integral fittings (Hyper Fitting series LQ1 and clean series KP). High purity, suck back type with integral fittings ; Tubing O.D. available in metric and inch sizes  ; Orifice diameter: ø2  ; Cv: 0.09  ; Operating pressure: 0 to 0.2MPa  

FLUOROPOLYMER FITTING, LQ1, LQ2, LQ3. NUT INSERT BUSHING. 11.40000 lb. A74.

FLUOROPOLYMER FITTING, LQ1, LQ2, LQ3. FITTING, HIGH PURITY SPL. 81.20000 lb. A74.

Body Class: ø4 Orifice, Valve Type: N.C., Fitting Type: LQ2, Body Class: 2, 3, 4, 5, Tube Size: 1/8" or ø3, Output Tube Size: None, Pilot Connection: LQ1 Integral Fitting, 5/32" (4mm, Pilot Port Direction: Direction 1, Option 1: Flow Rate Adjustment, Option 2: -

Body Class: ø4 Orifice, Valve Type: N.C., Fitting Type: LQ2, Body Class: 2, 3, 4, 5, Tube Size: 1/4", Output Tube Size: None, Pilot Connection: LQ1 Integral Fitting, 1/8" (3mm), Pilot Port Direction: Direction 1, Option 1: By-pass, Option 2: -

Body Class: ø4 Orifice, Valve Type: N.C., Fitting Type: LQ2, Body Class: 2, 3, 4, 5, Tube Size: 1/4", Output Tube Size: None, Pilot Connection: LQ1 Integral Fitting, 1/8" (3mm), Pilot Port Direction: Direction 1, Option 1: Flow Rate Adjustment & By-pass, Option 2: -