ISO Cylinder

2 x Eh8 KV (Nut) TW 4 x TC H + Stroke FA AM AL 1.5 K Air cushion: Cl75WE l Bore size Stroke C Cushion needle (Width across flats 1.5) (XB + Stroke) (XB) G WA WA 45 Port 2 x EE D NB TD H S + Stroke ZZ + 2 x Stroke H + Stroke KV (Nut) (Wh) With rod boot 8 l 8 KK C e (JH) Width across flats KA K AL AM h f (JW) [mm] Dimensions Bore size AL AM BE C D E EE FA FM G H K KA KK KV KW NB 32 17 20 M30

PFxx-OMX0002

L3: Analogue output: 1 to 5 V or 0 to 10 V Output impedance: 1 k L4: Analogue output: 4 to 20 mA Max. load impedance: 600 Min. load impedance: 50 PNP + Analogue output type PF3A7##H-##-L3/L4#-## Maximum load current: 80 mA Internal voltage drop 1.5 V max.

Angular Style Air Gripper Series MHC2/MHCA2/MHCM2

8 e q y !3 w !1 !6 !7 !2 t !9 !5 !4 u Component Parts No. Description No.

Angular Air Gripper Series MHC2/MHCA2/MHCM2

8 e q y !3 w !1 !6 !7 !2 t !9 !5 !4 u Parts list No. Description Parts list No.

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

1 q y e t !7 !3 w !9 i u 125 80 to 125 (No flat washer for 125) 80 to 125 !5 !4 i o Replacement Parts/Seal Kit (Single rod) Component Parts Bore size (mm) Kit no. Contents No.

Air Cylinder

7 @0 e r y @1 q i !6 !3 !0 !2 Component Parts Replacement Parts/Seal Kit No. Description Material Note Bore size (mm) Kit no.

Series LVM is a compact, direct acting, 2/3 port solenoid valve for chemicals. The unique construction reduces residual liquid to a minimum. Superior resistance to chemicals requires less maintenance. Service life (based on SMC test conditions) is 10 million cycles or more.Orifice diameter: 1.1mm, Available with power-saving circuit, 2 port N.C. or N.O. types; 3 port Universal type, Diaphragm

VXD21/22/23

59 59 60 P Port size Rc VXD2140 Q R a b c d e f M L K J H F E D C B A N 69 (76) 77 (84) 87 (97) Q N 61 69 79 Q N 61 (68) 69 (76) 79 (89) N 61 (68) 69 (76) 79 (89) Normally open Normally closed VXD2142 , 30 30 35 59 59 62 57 74 81 34 51 58 29 37 43 34 43 47 20 20 23 92 92 95 104 (116) 26 44 59 66 28 35 40 3 8 8 14 23 39 47 47 48 39 65 78 86 42 46 56 52 56 66 63 80 90 3 8 1 2 32.5 118 (136)

7.4

For mixed single and double wirings, enter -K to the order code options.

Plug-in Unit

(arrangement as seen from lead wire side) 2-M2.6 x 0.45 D-sub Connector Cable Assembly Terminal No. q !5 !4 @4 !3 !2 @3 @2 !1 !0 o i !6 !7 w e r !8 Lead wire color Dot marking Terminal no. @1 @6 @5 Black None q !9 Brown None w y t @0 u Red None e Orange None r Yellow None t Pink None y Circular Connector Cable Assembly Terminal No.

Cylinder with Lock

H A K ZZ + l + 2 strokes S + Stroke ZZ + 2 strokes H + Stroke With bellows on both sides ZZ + 2 l + 2 strokes (mm) Bore size (mm) Stroke range (mm) 40 50 63 80 100 H A AL B B1 BN BP BQ C D E F GA GB GC GD GL GL1 GR H1 J K Up to 500 Up to 600 Up to 600 Up to 750 Up to 750 30 35 35 40 40 27 32 32 37 37 60 70 86 102 116 22 27 27 32 41 96 108 115 139 160 1/8 1/4 1/4 1/4 1/4 1/8 1/8 1/4 1/4 1/

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

flange) (CF flange) A B K S M J H G A (mm) Model A 123 170 183 217 256 B 48 66 79 100 117 C 1 2 2 3 3 D 40 55 75 87 114 Fn 95 110 Fd 70 114 Fc 26 41 52 70 83 G 41 63 68 72 98 H J K P.C.D L1 6-6.6 8-8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type G Fd C (K flange) J K H B S M 45 A Fn (KF flange

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

1u @7 @6 q!7 $1 y#6 #5 @0 $3 @5 @4 @9 #3 #7 @1 @3 #2!6 #0!4!3 !2 !9 #9 #8!5 $2$0 r w#1 @8 @2 t Air-hydro type #6 $5 $4 $6 Component Parts No.

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Model Z ARP20(K) H J H J M N Q R S T U V W Y 27.8 1021 1021 1021 44 40 69 30 34 47 5.4 15.4 55 2.3 28 28.5 14 6 ARP30(K) 27.8 44 41 70 41 40 44 6.5 8 53 2.3 31 38.5 19 7 ARP40(K) 27.8 44 45 74 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 Note 1) The total length of B direction is the length when the filter regulator knob is unlocked.

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Model Z ARP20(K) H J H J M N Q R S T U V W Y 27.8 1021 1021 1021 44 40 69 30 34 47 5.4 15.4 55 2.3 28 28.5 14 6 ARP30(K) 27.8 44 41 70 41 40 44 6.5 8 53 2.3 31 38.5 19 7 ARP40(K) 27.8 44 45 74 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 Note 1) The total length of B direction is the length when the filter regulator knob is unlocked.

Speed Controller with Uni One-touch Fitting Series AS Elbow Type/Universal Type 1

JIS Symbol 15-9-19 2 Series AS How to Order 2 2 1 U02 06 K AS 1F Nil Option Body size 2 3 4 1/8, 1/4 standard 3/8 standard 1/2 standard None Hexagonal lock nut Electroless nickel plated K N If more than one option is required, write option part numbers in the order of K, N. Applicable tubing O.D.

PF2D

1 q t i 10 FKM O-ring PF2D540 o !0 u !0 !2ywr e 11 Stainless steel 304 Thread 12 PVC Lead wire !

KR

1 Flame Resistant (Equivalent to UL-94 Standard V-0) FR One-touch Fittings Series KR K Cover (Option) Guide Prevention of tube releasing unconformity due to inside intrusions or adhesion of the spatter. For cover, refer to page 15-3-5. M Collet Chuck H Release button (Green) Accepts FR soft nylon. Large retaining force. Chuck bites tube and collet increases retaining force.

HAW

) Q R Cooling water outlet 87 G (H) K J Cooling water inlet S T 2 x 2 x U Mounting holes D N Drain C (A) B (M) W Rc (mm) B C D E F G H J K L M N P Q R S T U V W Y Z 473 ZA HAW2-04 HAW7-06 HAW22-14 HAW37-14 HAW55-20 HAW75-20 HAW110-30 Model A 360 570 948 1354 1612 2112 1724 1 2 3 4 1 2 1 2 3 4 3 4 3 4 3 4 1 2 1 2 3 4 395 10 10 12 18 18 18 18 4.5 4.5 4.5 6.0 6.0 6.0 8.0 94 94 150 139 139 139

Programless controller Step motor (servo 24 VDC)

Pushing speed is fixed at 20 mm/s for LESH**J and at 10 mm/s for LESH**K. LES8 / LESH8 LES16 / LESH16 LES25 / LESH25 J K J K J K Low 4 6 15 23.5 43 77 Pushing force [N] Middle 7 10.5 25 39 71.5 128.5 High 10 15 35 55 100 180 Pushing force accuracy is 20%F.S. Refer to the operation manual of the electric actuator for details.