Ejector Valve Unit Series ZYY/ZYX 1

3 i w u o y q Section B-B' (Solenoid valve) Component Parts Replacement Parts Note Description Material Description Part no. No. No. SY114Urban white Resin Manifold block 3 port solenoid valve q o ZSE1-00--X130 Urban white Zinc die-casted Body Vacuum switch w !0 Urban white Resin Silencer cover P44027A End plate assembly e !1 Aluminum Nozzle AN203-KM8 Silencer r !

Speed Controller: Standard Type Series AS In-line Type 1

Description Material Note Body Cap Chromated Zinc chromated 4 x 0.7 x 8 JIS B 2805 Nominal 6 Aluminum alloy Rolled steel Steel wire Stainless steel Zinc alloy Steel wire Zinc alloy Aluminum alloy NBR q w e r t y u i !2 Cross-recessed head cap screw E type snap ring Handle Ring Lock nut Needle O-ring Black zinc chromate plated Zinc chromated 143112 Replacement Parts No.

CRB1/Size: 10, 15, 20, 30

Q (Depth) 90 100 R P E(g6) A F(h9) B C D G1 G2 J K L M N Model RQ1 M3 (10) RQ2 3.4 (6) (Q3 M3 (5) CRB1BW15-lD CRB1BW15-lDE CRB1BW20-lD CRB1BW20-lDE CRB1BW30-lD CRB1BW30-lDE 5 11 9 14 10 15.5 25 10 25 13 25 14 0.004 0.012 0 0.043 29 5 34 12 20 9 18 4 1.5 6 10 0.5 M3 M4 (13.5) 4.5 (11) M4 (7.5) 0.004 0.012 0 0.043 36 6 42 14 29 10 20 4.5 1.5 7 10 0.5 M5 M5 (18) M5 (10) 5.5 (16.5) 0.005 0.014

Free-Mounting Cylinder with Air Cushion Series CU

light 4.3 DC() Blue [Black] 2 Indicator light 20 2.7 2.8 4.6 3.8 3.1 4 6.2 6 Most sensitive position 11

Multistage Ejector Series ZL112/212 1

6 !5 ZP ZCU AMJ Misc. !3 !2 Description Part no. Part no. Note Comonent Parts Replacement Parts Description Material Sound absorbing material B No. No. PVF Suction cover q o ZL112-SP01 Sound absorbing material A Without valve PVF Front cover w !0 (Set no. for 9, 10 & 11) Suction filter PE End cover e !

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

S A 3H9 effective depth 2 3H9 effective depth 2 TD TB TC D (g6) DD (h9) Rotation A AU B BA BB BC BD BU H Size 42 (8.5) 29 8.5 17 53 (9.5) 31 9 26.4 6.7 10.6 2.2 16.7 23.1 18 20 12 14 5 6 10 15 90, 180 90, 180 W Q S US UW ab M TC TD TA Size Rotation 4.5 17 56 69 65 82 90 180 90 180 10 35 44 6 9 8 15.4 15.5 15 5.5 20 40 50 7 10 9 17.6 16 Dimension AU does not indicate the dimension when shipped

,,: ,.

KQ2C Caps P Plugs Q Cartridge KR Fitting Boot . . . . . . . .6 .7 .7 .7 P .8 .8 .9 .9 o 't0 1 0 1 0 1 1 1 1 1 1 1 2 Spucial [nnlhunilions Page 14 IIU lrlylon lltliltg Page 15 Bmss Phe tittittg$ pase N i p p l e s . . . . . . . . . 1 7 Cdinlinars -. -14 Bushings Aalaolers 1 8 '18 1 q Ts6s .20 .20 Pftr^q 21 SAE 45" Flares . -..22-23 .24 General Assembly..,.. lmoortant Oo's and Dont's Chemical

90

, HNBR 9 Body Aluminum die-casted 799 IR1000-A/2000-A/3000-A Series Construction Basic type (Knob): IR10l0-A r r r r q w e OUT side passage IN side passage y u t OUT IN i o Basic type (Knob): IR30l0-A e e r q r w e OUT side passage IN side passage t u OUT IN o i Basic type (Knob): IR30l1 2-A e e r q r w e OUT side passage IN side passage t u OUT IN o i 800 Precision Regulator IR1000-A/2000

Drain Separator for Vacuum Series AMJ 1

q OUT IN IN OUT t w r w e r e Component Parts No.

XLAQ/XLDQ

Atmospheric pressure to 1 x 10-6 XLDQ Prevents turbulence of particulates. Prevents a pump from running overloaded.

MR Unit (Regulator with Mist Separator) AMR3000 to 6000 Series

AP100 (13) Working principle When the MR units OUT side pressure is applied to piston q , piston q moves until it balances with the force of pressure adjustment spring w . The movement of piston q is detected by switch assembly e and outputs ON and OFF signals.

Rotary Actuator NCRB1BW Series Single Vane / Double Shaft

t{cRBl0w20 NCRBl0W30 * c it E F .E lE 6 IE 1 2 3 4 5 6 7 8 X 10.61.21.8 2.4 3.0 3.6 5.2 4.4 XlO-41 o.a 1.2 1.6 2.O 2.4 2.4 Moment ol Inertie (ln-lbs-s2) | | : tndica's nomenl ot jrertja $,hen usiDg an intrnsl rubtr bumpr : No inlernel rubbr bumper ... : llse of an intemal rubber bumper (llsing al end ot rolation) (Wth auto switch) Nole: No ifitrnal bumpr is usd on NCRA1BWTo.

Booster Regulator Series VBA1110 to 4200 1

Q [l/min(ANR)] = x D2 x W x (P2 + 0.101) x 60 x C 6 4 x 10 0. 101 VBAT10, VBAT20, VBAT38 Q [l/min(ANR)] = x 1002 x 200 x (0.8 + 0.101) x 60 x 1 = 841 4 x 106 0. 101 Select booster regulator size from flow characteristics table. Refer to page 14-9-3 for flow characteristics.

NCRBIBwserbs

t{cRBl0w20 NCRBl0W30 * c it E F .E lE 6 IE 1 2 3 4 5 6 7 8 X 10.61.21.8 2.4 3.0 3.6 5.2 4.4 XlO-41 o.a 1.2 1.6 2.O 2.4 2.4 Moment ol Inertie (ln-lbs-s2) | | : tndica's nomenl ot jrertja $,hen usiDg an intrnsl rubtr bumpr : No inlernel rubbr bumper ... : llse of an intemal rubber bumper (llsing al end ot rolation) (Wth auto switch) Nole: No ifitrnal bumpr is usd on NCRA1BWTo.

Compatible Fluid: Air / Water / Chemical, Operating Environment: Standard, Type: Electromagnetic Type, Switching Type: Universal, Body Material: Resin, Connection Type: Others, Plumbing Thread Nominal: -, Tube Diameter: -, Operating Temperature Range(°C): 0～50, Driving Type: Linear Motion Type, Orifice Diameter(Ø): 1.4, Insulation Class: B, Pipe opening type (details): Base Mounted Type,

Symbol: 105R (Base Mounted, 3 Port, Universal), Function: Y (Power-saving Circuit), Voltage: 5 (24 VDC), Wetted Part Material: G (Plate: PFA; Diaphragm: Kalrez®), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: 2U (PFA, 1/4-28UNF), Option: 1 (Bracket), Lead Wire Length: 6 (600mm)

Table of Contents

6 Seal kit includes !4, !5, !6.

2 Phase Stepper Motor/Without Motor Brake Series LXP

(A contact) 1 2 1 pc. 2 pcs. 6 6 pcs.

CG5-S

3 y o q u e !0 w Parts list Material No. 1 2 3 4 5 6 7 Description Material No.

Series AP3500

q e r q e r q e r q e r w w w w 125 Process Gas Equipment / Diaphragm Valve Specific Product Precautions Be sure to read before handling.