Air Cylinder Series CM2 Volume GR-L-005 5 g GR-L-010 10 g GR-L-150 150 g 3. Do not wipe off grease from the sliding part of the air cylinder.
9 q r !5 y i !8 o !6 e u @0 @1 @2 w !4 !2 !0!1 !3 !
Q 50 R 88 S 3.2 AM 1 2 3 4 , 9 36 205 19 100 106 3 106 10 AMF450 212 22 107 106 3 106 10 36 221 21 10 14 9 90 55 110 50 88 3.2 1 Misc. , , , 1 1 4.5 4.5 6 3 4 257 314 406 30 40 30 10 15 15 16 20 24 9 11 13 100 150 180 65 85 120 130 180 220 60 76 110 102 136 184 44 66 96 239 291 403 22 32 42 128 167 235 122 160 220 3 122 160 220 10 10 10 AMF550 AMF650 AMF850 1 2 1 2 1 2 1 14-20-47 7 Series
across flat 14 (Hexagon) E 11 E 11 D E 11 3 3 3 3 3 3 M10 x 1 M10 x 1 M10 x 1 Q Q Q D D (F) (F) (F) P P P Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) S S S 31 8 31 8 31 14.9 14.9 14.9 R R R 6 6 6 M5 x 0.8 M5 x 0.8 M5 x 0.8 8 Y Y Y A A A C a a a C C b B 20 30 21 31 Dimensions Model Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8
N.O. q e w r Drain Thread type/Rc,G: 10 One-touch fitting Thread type/NPT: 3/8" One-touch fitting Thread type/Rc,G: 10 One-touch fitting Thread type/NPT: 3/8" One-touch fitting Component Parts No. Description Material Model Color AFM20-A to AFM40-06-A AFD20-A to AFD40-06-A White Body 1 Aluminum die-cast Replacement Parts Part no. No.
-10 (FKM) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Nil A B C Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.
(mm) Q1 = M C1 = C Q2 Y L2 max Size (mm) L2-(3 x P) 10 X L1 max Q1 Size 3 5.5 to 8 Y-1 Y= 10 15 7.5 to 14 X-3 3, 4 7.5 to 9 Y-1.5 3 L2= 15 C2 = C 20 10 to 18 X-4 3, 4, 5 9 to 10 Y-1.5 L1-(3 x P) 3, 4 X = 20 30 12 to 20 X-4.5 3, 4, 5, 6 11 to 13 Y-2 3, 4, 5 L1 = Q2 = M 30 40 14 to 22 X-5 3, 4, 5, 6, 8 14 to 15 Y-4.5 3, 4, 5, 6 21 Series CRB2 Axial: Top (Long shaft side) Axial: Bottom (Short
for EX510-DX1) Mounting example 1 Mounting example 2 60 35.1 2 x M4 2 x M4 30.8 1707 Series EX510 Parts Description EX510-DX2 EX510-DX1 w r w u r i 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 CN0 CN1 CN2 CN3 CN4 CN5 CN6 CN7 i 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 CN0 CN2 CN4 CN6 CN8 CN10 CN12 CN14 0 1 2 3 0 1 2 3 CN1 CN3 CN5 CN7 CN9 CN11 CN13 CN15 1 q 4 5 6 7 4 5 6 7 3 q 5 8 9 10 11 8 9 10 11
Torr (mmHg) 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 3. Mount a valve with its coil position upward, not downward. 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 101 102 103 104 105 106 107 108 109 Pa Vacuum piping direction: if the system uses a vacuum pump, we ask that you install the vacuum pump on the secondary side.
6 @4 @1 @8 $0 #9 #3 @2 #0 #1 $1 w @9 i #2 !1 o q u r y e @6 @5 @3 @7 CY1L10 to 40 @2 $0 #9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !5 @8 #7 #6 $1 F G Area G (10) Enlarged view F 10, 15 #0 @7 #1 w u i o !1 #2 q !3 r y e @6 @5 @3 $1 10 Component Parts Material No. Description Note No.
3 Port Solenoid Valve Base Mounted and Body Ported VQZ Series Choice of Rubber or Metal Seal Compact Design With Large Flow Long Life Interchangeable One-Touch Fittings P R O D U C T S Q Q Q Table of Contents Q Q Q Product Features .pages 4-5 Preferred Options Guide.page 7 Q Q Base Mounted Valves and Manifolds.page 9 Specifications.pages 10-11 How To Order .pages 12-15 Options
to 125)(UM/BM)lJB (10/30/50) q Stopper Form/Diameter Part no.
8 y q w t !7 r e i u !3 @3 !4 D 25 32 In-line motor type/LEY !6 u @3 #4 #3 When rod end male thread selected !0 #0 #1 #2 #1 @9 Component Parts No. Description Material Note No.
Critical pressure 0.6 0.5 Sonic 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 JSXD30 Port size 1/4 JSXD30 Port sizes 3/8, 1/2 JSXD40 Port size 3/8 JSXD40 Port size 1/2 JSXD50 Port size 3/4 JSXD60 Port size 1 10 1000 2000 3000 10 1000 2000 3000 4000 15 2000 4000 6000 8000 15 2500 5000 7500 10 20 5000 10 15000 25 5000 10 15000 20 Flow rate Q [L/min (ANR)] For Air (Orifice diameter: 35 mm, 40 mm, 50 mm
7 6 9 8 11 10 3 Connector B terminal no.
4 1-7/8 2 2-1/8 2-1/4 2-3/8 2-1/2 2-3/4 3 3-1/4 3-1/2 4 4-1/2 5 5-1/2 #6-32UNC1-3/4 1-7/8 2 2-1/8 2-1/4 2-3/8 2-1/2 2-3/4 3 3-1/4 3-1/2 4 4 1/2 5 5-1/2 #6-32UNC2-1/8 2-1/4 2-3/8 2-1/2 2-5/8 2-3/4 2-7/8 3-1/8 3-3/8 3-5/8 3-7/8 4-3/8 4-7/8 5-3/8 5-7/8 #10-24UNC2-1/8 2-1/4 2-3/8 2-1/2 2-5/8 2-3/4 2-7/8 3-1/8 3-3/8 3-5/8 3-7/8 4-3/8 4-7/8 5-3/8 5-7/8 #10-24UNC2-1/4 2-3/8 2-1/2 2-5/8 2-3/4 2-7
to 1.0 MPa) Operating Parameters Delivery pressure Gas Source pressure Proof pressure (Inlet) Burst pressure Ambient and operating temperature Cv Vacuum to 3500 psig (24.1 MPa) 1) Vacuum to 300 psig (2.1MPa) 5000 psig (34.5 MPa) 10 psig (69 MPa) 40 to 160F (40 to 71C) (No freezing) 2) 0.09 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 3) 4 x 10-9 Pam3/sec 4) Ra max 15 in. (0.4 m) Option: 10 in.
6 @7 @8 @9 #0 #1 #2 #3 #4 #5 #6 #7 No. q w e r t y u i o !
Basic Style A Without auto switch B P A B P Q Q With auto switch Bore size (mm) 5 st 10 st 20 st 5 st 10 st 5 st 10 st 5 st 10 st 20 st 5 st 10 st 20 st 20 st 20 st 20 st 5 st 10 st 32 40 50 Rc 1/8 40 46.5 M5 x 0.8 11.5 11 50 56.5 28 34.5 38 44.5 Rc 1/8 Rc 1/8 Rc 1/4 10.5 11 10.5 50 56.5 68.5 10.5 11 10.5 60 66.5 68.5 43 49.5 50.5 33 39.5 40.5 78.5 10.5 88.5 60.5 50.5 Rc 1/8
I 5 D C 5 D C K H F K H F Width across flats 7 Width across flats 7 Hexagon width across flats 12 M8 x 1.25 Hexagon width across flats 12 M8 x 1.25 Hexagon width across flats 12 Hexagon width across flats 3 3 Y 2.5 2 A B A B Stroke 20 to 50 mm Stroke 20 to 50 mm Dimensions: 10 mm Stroke Dimensions: 10 mm Stroke (mm) (mm) Model A B C D F H I J K P Q: 6 Q: 8 Model A B C D F H I J K P Q: 6