MXW

For details, refer to page 8-30-31. 8-7-22

4/5 Port Air Operated Valve Series SYJA3000

7 36 (2) VA 7 (13.5) 28.5 15 A 1 (Bleed port) 21 R2 P R1 13 VM 4 8.2 15 10 10 10 M5 x 0.8 (Piping port) 11 14 14 15 (Bracket) VR VH 2 position double: SYJA3220-M3(-F) 2 position double: SYJA3240-M5 VHS 10 9 36 7.1 2-M3 x 0.5 (Pilot port) 10 1.8 4 A B (For mounting) 2-3.2 1.5 1.5 22 7 8.2 2.5 (For manifold mounting) 2-1.8 2-M3 x 0.5 (Pilot port) A B 11 1.5 17.5 (For mounting) 2-3.2 equivalent

SMC Pneumatic Clean Series

7 6 6 LD 4 4 4 4 LC 3 3 3 3 LT 30 25 22 20 LH 51 53 53 53 LS Z 135 125.5 123.5 118 ZZ 16.5 16 15 15 X 8.5 8 7 7 Y 4 3.5 3.5 3 M B 54 44 36 32 LX 10 10 10 10 W 71 58 49 44 LZ Bore size 63.5 53 52 47 54.5 45 38.5 34 40 32 25 20 50 63 80 100 4.5 4.5 4.5 6 17.5 17.5 20 20 75.5 75.5 95 95 157.5 157.5 188.5 192 55 55 60 60 10 12 11 14 5 5 6 6 40 45 55 65 22 22 28.5 30 11 13 14 16 5 5 5 7 66 82

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

7 Component Parts Description Material Description Material No. !1 !2 !3 !4 !5 !6 !7 No. q w e r t y u i o !

Plug-in Unit

PW 0 0 0 1 1 1 9 9 9 PW LRUN 2 2 2 8 8 8 3 3 3 7 7 7 4 4 4 6 6 6 SD RD LERR. 5 5 5 L RUN SD RD x10 x1 24V 0V +24V 24G DA DB FG DG L ERR.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

7 Component Parts Description Material Description Material No. !1 !2 !3 !4 !5 !6 !7 No. q w e r t y u i o !

ARM10/11

Torque recommended: (R 1/8: 7 to 14 Nm).

MNB

4 @3 #3 #5 t @7 $5 !5 @4 !8 @0 !7 !9 i @2 q r y #0 $0 $2 w A C B A section $1 !2 !2 $6 !0 u @5 !6 @1 !1 $7 o $8 #4 @6 #9 @8 #6 #7 e $4 B section C section #1 #2 !

Series AP500

Please contact SMC. 3) 14 to 194F (10 to 90C) for Vespel seat. 4) Tested with Helium gas inlet pressure 1500 psig (10.5 MPa). 5) Tested with Helium gas inlet pressure 1000 psig (7 MPa). 6) On panel mount option, bonnet port is not threaded. 7) Mass, including individual boxed weight, may vary depending on connections or options.

HEC_W-E

PREPARATION FOR OPERATION -7-1 7.1 PIPING -7-1 7.1.1 PREPARATION FOR RADIATING WATER -7-1 7.1.2 PREPARATION FOR RECIRCULATING FLUID -7-2 7.2 WIRING -7-3 7.2.1 POWER SUPPLY -7-3 7.2.2 CIRCUIT BREAKER -7-3 7.2.3 GROUNDING -7-3 7.2.4 AVOIDANCE OF PARALLEL WIRING -7-3 7.2.5 CONNECTION OF VARIOUS CONNECTORS AND POWER SUPPLU CABLE -7-3 7.3 SUPPLY OF RECIRCULATING FLUID -7-4 7.4 CHECK REPAIR -7-

10

7 !9 !1 !4 !0 !3!8 !6 !5 12-2 12-1 7-2 7-1 1-2 1-1 1-1 Width across flats Rod view 32 (2:1) Component Parts No.

MNB

4 @3 #3 #5 t @7 $5 !5 @4 !8 @0 !7 !9 i @2 q r y #0 $0 $2 w A C B A section $1 !2 !2 $6 !0 u @5 !6 @1 !1 $7 o $8 #4 @6 #9 @8 #6 #7 e $4 B section C section #1 #2 !2 100 80 63 50 40 32 80, 100 80, 100 Description Material Note Component Parts No. Description Material Note No.

MGP

7 7 7 8 8 6 7 8.5 9 11 11 14 16 MGPL (ball bushing)/Dimensions A, E, HT (mm) A E HT Bore size (mm) Over 100st to 200st 114 114.5 Over 100st to 200st 51 51 Over 30st to 100st 90 95.5 Over 30st to 100st 27 32 Over 200st 132 132 30st or less 73 79.5 30st or less 10 16 Over 200st 69 68.5 80 93 20 25 By-pass port size for guide rod with bottom mount A E HT MGPM (slide bearing)/Dimensions A, E

Pin Clamp Cylinder Series CKQ/CLKQ

7 @5 #8 #6 #4 @6 @7 @8 @4 Auto switch $1 #5 #9 #8 #2 @3 !9 $0 $2 !1 !8 !6 #7 !0 @9 A @0 !5 A !

ARM10/11

Torque recommended: (R 1/8: 7 to 14 Nm).

CEx-OMI0064

CE*OMI0064-C CEU5 1 . 1 2 . 4 2-1 . 4 2-2 . 4 3 . 5 4 . 7 5 . 9 6 . 10 6-1 . 10 6-2 . 10 6-3 . 11 6-4 . 11 6-5 RS-232C . 11 6-6 . 12 7 . 13 7-1 . 13 7-1-1 . 13 7-1-2 . 13 7-1-3 . 14 7-1-4 . 15 7-2 . 16 7-3 . 20 7-3-1 . 20 7-3-2 . 20 7-3-3 . 20 7-3-4 No. . 20 7-3-5 . 21 7-3-6 . 22 7-3-7 . 23 7-4 (E2ROM) . 25 8 RS-232C . 26 8-1 . 26 8-2 . 26 9 BCD .

JXCx-OMT0005CN

11 RESET 12 SETUP SVRE ON SETUP () SETUP BUSY ONSETONINP ON JOG ON OFF FLGTHJOG /ON JOG-OFFON JOG /INP OUT05 OFFJOG INP OUT05 ON 13 JOG(-) 14 JOG(+) JOG-JOG+JOG / ON ON OFF JOG [] 15 FLGTH 38 - Byte2,3/ Byte Bit 0 1 2 2 3 4 5 6 7 0 1 ON 2 3 3 4 5 1 6 2 7 Byte4,5/ Byte Bit 4 0 OFF ON *1 1-7 () 5 0-1 1ABS() 2INC() *2 2-7 () *1 ON ON OFF PLC *2 [1ABS][2INC

CG5-S

0 w Parts list Material No. 1 2 3 4 5 6 7 Description Material No.

CQS

47 52 3.5 3.5 5.4 5.4 6.5 6.5 9 9 6 8 10 12 5 6 8 10 7.5 7.5 9 11 25 29 36 40 7 7 10 10 4 4 7 7 0.5 0.5 1 1 5, 10 Note) For the following bore/stroke sizes, through-hole is threaded over the entire length.

Modular F.R.L. Unit

Note 6) Separate interfaces are required for modular unit. 7 F.R.L.