Information

Bore size Stroke range head cap screw for CW CT CL CX CD M CZ R CN mounting pivot bracket (Accessory) Without auto switch With auto switch CQ-C032 32 5 to 50 50 60 60 20 5 30 18 10 34 45 80 6.6 M6 x 12 L 75, 100 5 to 50 58.5 68.5 66.5 76.5 CQ-C040 40 68.5 22 6 32 18 10 40 52 80 6.6 M6 x 14 L 75, 100 10 to 50 CQ-C050 50 76.5 28 7 42 22 14 50 64 80 9 M8 x 16 L 75, 100 CQ2 10 to 50 74 84 CQ-C063

PFxx-OMS0001CN

[cm] -70No.PF-OMS0001CN-A PFMC7501/7102/7202 2x A B D E F H K L N PFMC7501/7102 Rc1/2NPT1/2 70 30 60.6 41.2 15 14 26 18 13.6 PFMC7202 Rc3/4NPT3/4G3/4 90 35 66.1 46.7 17.5 24 31 28 16.8 PFMC7501/7102 G1/2 76 30 60.6 41.2 15 14 26 18 13.6 S T U V W PFMC7501/7102 24 22 32 40 50 PFMC7202 30 30 42 48 58 -71No.PF-OMS0001CN-A M8 (ZS-40-A) -72No.PF-OMS0001CN-A Revision history A [September 2016]

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

Hole diameter 5 9 Features 1 3 Port Direct Operated Poppet 3 Port Direct Operated Poppet Solenoid Valve Series VKF300 How to Order Valves Electrical entry Rated voltage 100VAC 50/60 Hz 200VAC 50/60 Hz 110VAC 50/60 Hz 220VAC 50/60 Hz 24VDC 12VDC 240VAC 50/60 Hz Other DO-DIN terminal (without connector) 1 2 3 G-grommet (lead wire length: 300mm) H-grommet (lead wire length: 600mm) D-DIN type

Ejector Valve Unit, Series ZYY/ZYX

Nil 0.6m 30 3m 50 5m Example) ZSE1-00-15CN-X129 1pc. ZS-20-5A-50 1pc. 5 Ejector Valve Unit Series ZYY/ZYX How to Set the Pressure How to Use the Connector Internal Circuits and Wiring Examples 1. Installation and removal of connector ZSE1-14, -15 The ON pressure is set with the pressure setting trimmer. High vacuum settings are obtained by turning it clockwise.

PSxx-OMR0001CN

] ISA3-H[ 50] F 1(oUt1) OUT1 48 ISA3-F[ 3] ISA3-G[ 20] ISA3-H[ 20] [ SoG] ON OFF F 2(oUt2) () [ ---] 50 F 6( FSt) [ 0.0] 0.0 51 F10( SUb) [ LEvEL] 52 F80( dSP) OFF [ on] () 53 F81( Pin) [ oFF] 54 F90( ALL) [ oFF] 55 F98(tESt) [normAL] 56 F99( ini) [ oFF] 57 -46No.PS-OMR0001CN-J 4 [F 0] M 2 [F 0] [Unit][] kPa Bar PSI 2 -47No.PS-OMR0001CN-J 4 [F 1] P_1 H_1 ISA3

MHL2

MHL2-10D MHL2-16D MHL2-16D MHL2-10D 2 1 2 1 60 60 25 25 0.6MPa 0.6MPa Holding force (N) Holding force (N) Holding force (N) Holding force (N) 50 50 20 20 0.5MPa 0.6MPa 0.5MPa 0.6MPa 40 40 15 15 0.4MPa 0.5MPa 0.4MPa 0.5MPa 0.4MPa 0.4MPa 30 30 10 10 0.3MPa 20 20 0.3MPa 0.3MPa 0.3MPa 0.2MPa 5 5 10 10 0.2MPa 0.2MPa 0.2MPa 10 20 30 40 50 60 70 20 40 60 80 100 120 20 40 60 80 100 120 0 0 0 10 20

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

26.9 24.9 6 11.6 5/32" 9.3 10.9 18 NPT 1/8 AS231FG-01-08 AS231FG-N01-05 35.2 30.2 27.1 32.1 28.2 40.8 18.5 16.2 23.9 30.9 26.8 14 8 15.2 3/16" 11.4 12.9 21 14 10.9 16.5 12.7 AS231FG-02-04 AS231FG-N01-07 21.9 39.6 36.3 16 16.2 25.6 30.6 29.9 4 10.4 1/4" 13.2 10.9 32 18.5 19 16.2 12.9 AS231FG-02-06 AS231FG-N01-09 25.2 42.1 40.8 17 18.4 28.2 34 30.9 6 12.8 5/16" 15.2 33 21 21 R 1/4 18.5 34.9

E-P HYREG

sub-plate ITVH 02 14 03 38 04 12 4 ITVX A M5 M5 (3) (3) 1 01 18 (3) (3) 02 14 PVQ 3 02 14 03 38 04 12 VY1 VY1 VBA VBAT Body ported 5 04 12 VY1B0-X39 (5) 06 34 10 1 AP100 7 10 1 1 14 12 1 14 9 14 1 12 2 20 2 Note 3) Only bracket or foot may be mounted.

JXCx-OMT0032CN

JXC-OMT0032CN TM) (GW)(DeviceNet / LEC-GDN1 . 4 2. . 6 2.1 . 6 2.2 . 6 2.3 . 7 2.4() . 8 (1) . 8 (2) . 8 (3)(LEC) . 8 (4) . 8 (5) . 8 (6) . 9 (7) . 9 3. . 10 3.1 . 10 3.2 . 12 3.3 . 13 (1)(LECGDN1) . 13 (2)DIN(LECGDN1D) . 13 3.4 . 14 (1) . 14 (2) . 14 4. . 15 4.1 (NODE ADDRESS,B RATE) . 15 4.2(CN2SW) . 15 4.3(LEC) . 16 5. . 18 5.2 CN3 . 18 5.3 CN1CONT . 18 5.4 CN2PC/TB . 19 .CN4 . 20

VK3000

Port size (P, A and B port) Rated voltage M5 M5 x 0.8 01 Rc 1 8 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz R1, R2: M5 4 Option 5 6 24 VDC 12 VDC Nil None With bracket (Not assembled) 7 240 VAC, 50/60 Hz 9 Other Option F Option Part No. Description Part no.

PFxx-OMP0001CN

No.PF-OMP0001CN-F // PFMB7501 PFMB7102 PFMB7202 2 10 11 12 14 14 16 17 [] 21 OU1OUT2 {3 ] 22 22 [] 24 25 F0 26 F1 OUT1 28 F2 OUT2 36 F3 41 F10 42 F13 43 F20 44 F22 45 F30 46 F31 47 F80 OFF 48 F81 49 F90 50 F98 52 F99 53 54 58 59 61 62 62 65 67 -1No.PF-OMP0001CN-F (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems

Air cylinder (Series compatible with secondary batteries)

Table 7 Auto Switch Mounting Height Auto switch model D-A9-900 D-M9V-900 D-M9-900 D-M9WV-900 D-M9W-900 Bore size(mm) Hs Ht Hs Ht 40 30 30 34 30 50 34 34 38 34 63 41 41 44 41 80 49.5 49 52.5 49 100 56.5 56 61 56 14 Table 8 Minimum Stroke for Auto Switch Mounting n:Number of auto switches(mm) brackets other Center trunnion Number of Auto switch model than autoswitches 40 50 63 80 100 center

Electric Slide Table / High Precision Type 《 AC servo motor 》

Product weight [kg] Model Stroke Additional weight Size Motor type 50 100 150 with lock 16 T6 2.02 2.41 0.30 25 T7 3.77 4.37 5.77 0.40 -6- 1.2 LECY series driver 1.2.1 How to order L E S Y H 16 D V6 A 50 S 3 M2 (1) (2) (3) (4) (5) (6) (7) (8) (9) (10) (3)Motor type (2)Motor mouting position (1) Size Symbol type Output D In-line 16 25 Size Compatible driver [W] R Right side parallel LECYM2

CYPSeries

Dynamic moment Me3 We W L2 = 1/3 14.7 (50 + 27) 103 Review Me3. = 0.38 [Nm] 3 = Me3/Me3 max = 0.38/3 = 0.13 Guide central axis A Me1 W We Me1 = 1/3 We (L1 + B) 103 = 1/3 14.7 (50 + 48) 103 L1 B = 0.48 [Nm] 4 = Me1 /Me1 max = 0.48/3 = 0.16 Review Me1.

CYPSeries

Dynamic moment Me3 We W L2 = 1/3 14.7 (50 + 27) 103 Review Me3. = 0.38 [Nm] 3 = Me3/Me3 max = 0.38/3 = 0.13 Guide central axis A Me1 W We Me1 = 1/3 We (L1 + B) 103 = 1/3 14.7 (50 + 48) 103 L1 B = 0.48 [Nm] 4 = Me1 /Me1 max = 0.48/3 = 0.16 Review Me1.

HEC-OM-S008

HECR 5-14 MODBUS communication function 5.10.3 Control operation mode The control operation mode is assigned as follows.

JXCx-OMT0034CN

JXC-OMT0034CN (GW)(CC-Link) / LEC-GMJ2 1. . 4 2. . 6 2.1 . 6 2.2 . 6 2.3 . 7 2.4 () . 8 (1) . 8 (2). 8 (3)(LEC) . 8 (4). 8 (5) . 8 (6) . 9 (7) . 9 3. . 10 3.1 . 10 3.2 . 12 3.3 . 13 (1)(LECGMJ2) . 13 (2)DIN (LECGMJ2D) . 13 3.4 . 14 (1) . 14 (2) . 14 4. . 15 4.1 (STATION NO.,B RATE) . 15 4.2 (CN2SW) . 16 4.3 (LEC) . 17 5. . 19 5.1 CN4 . 19 5.2 CN3 . 19 5.3 CN1CONT . 19 5.4 CN2PC

Digital pressure switch for energy-saving control ejector

No.TQ0010298-OM003-B PRODUCT NAME Digital pressure switch for energy-saving control ejector MODEL / Series / Product Number ZME-ZSE***-A Table of Contents Safety Instructions 2 Model indication and How to order 9 Summary of Product parts 10 Definition and terminology 11 Mounting and Installation 14 Installation 14 Wiring 15 Wiring 15 Internal circuit and wiring example 16 Easy Setting 17

Digital pressure switch for energy-saving control ejector

Pin No. of the Connector (Power supply and output cable for the digital pressure switch and pilot valve) Connector Lever Housing Socket Concave 14 - NO.

I

D 00 Without subplate 1% 0.5% + -0.5% M5 M5 0.007 00 Without subplate B M5 M5 0.28 01 18 0.41 2.5% 1% + -1% Base Mounted Type 00 Without subplate 2 01 18 0.9 02 14 1.4 00 Without subplate 02 14 2.0 3% 1.5% + -1% 4 03 38 3.3 04 12 3.9 A M5 M5 0.28 1 01 18 0.9 02 14 1.4 2.5% 1% + -1% Wiring: The use of three-core screened cable is strongly recommended with the screen earthed at the end away