4-channel Flow Monitor ( compatible)

. 0: 0.1 1: 1 2: 10 3: 100 UAC (Accumulated minimum unit for connection product [USEr]) Y U8 0x01 12 R/W (1) Set the accumulated volume per pulse when the user's additional range is selected. 0: 0.1 1: 1 2: 10 3: 100 UPLS (Accumulated volume per pulse for connection product [USEr]) Y U8 0x02 13 R/W (2) 0: L 1: oC 2: Ft 3: GAL 4: F 5: oFF 14 R/W Unit setting (USEr is selected) Y U8 0x00 (0

e-Rodless Actuator

IC circuit, Relay, PLC Applicable load 24 V AC/DC or less Load voltage 48 V AC/DC or less 100 V AC/DC or less Maximum load current 50 mA 40 mA 20 mA Contact protection circuit None 1 or less (including lead wire length of 3 m) Internal resistance D-A93/D-A93V/D-A96/D-A96V (with indicator light) D-A93/D-A93V D-A96/D-A96V Auto switch part no.

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

Note 7) In case of an external pilot "R", indicate external pilot specification "R" for the applicable valve also. B3 Stations B4 D side B6 B5 LM Note) Stations are counted starting from station 1 on the D side. Note 1) Indicate CM and LM in the specification table. Note 2) Inch sizes use the following symbols.

Compact Cylinder with Solenoid Valve/

CE marking D-A93, D-A93V, D-A96, D-A96V (With indicator light) Precautions Caution D-A96, D-A96V D-A93, D-A93V Auto switch model Applicable load IC circuit Relay, PLC 24 VDC Load voltage 100 VAC 4 to 8 VDC Fix the auto switch with the existing screw installed on the auto switch body.

SMC Pneumatic Clean Series

to 25 6 to 25 10/16 15/32 Bore size 610 6 D-C7/C8 D-C73C/C80C D-B5/B6 D-B59W D-A3/A4 D-A3A/A44A D-A3C/A44C D-A7/A8 D-A7H/A80H D-A73C/A80C D-A79W D-A5/A6 D-A59W D-A9 D-A9V D-Z7/Z8 D-H7 D-H7C D-H7BAL D-H7F D-H7W D-G5/K5 D-G5BAL D-G59F D-G5NTL D-G5W/K59W D-G39/K39 D-G39A/K39A D-F7/J7 D-J79C D-F7F D-F7BAL D-F7BAVL D-F7V D-F7NTL D-F7W (V) D-F5/J5 D-F5BAL D-F5W/J59W D-F5F D-F5NTL D-G39C/K39C D-M9

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

VZ (A) 2 (A) 2 VS 1 (P) 3 (R) 1 (P) 3 (R) q r w e q r w e N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts No.

VXD21/22/23

Cable 6 to 12 Model Grommet Electrical entry Bracket Conduit Conduit terminal DIN terminal R Q 59 59 60 P Port size Rc VXD2140 Q R a b c d e f M L K J H F E D C B A N 69 (76) 77 (84) 87 (97) Q N 61 69 79 Q N 61 (68) 69 (76) 79 (89) N 61 (68) 69 (76) 79 (89) Normally open Normally closed VXD2142 , 30 30 35 59 59 62 57 74 81 34 51 58 29 37 43 34 43 47 20 20 23 92 92 95 104 (116) 26 44 59 66

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

width across flats 12 Applicable tubing O.D.Q Applicable tubing O.D.Q H R R H F F Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com E E D C D C Y Y 2.5 2.5 A B A B With a stroke of 10 mm Stroke 20 to 50 mm Dimensions: 10 mm Stroke (mm) Q: 6 Q: 8 A B C D E F H I J Y

ZPT/ZPX

of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 8 10 40 40 C C A A B D B D Dimensions Dimensions (mm) (mm) Model Model B A B C D E F G Y A C D E F G Y ZPT100HB-A16 ZPT100HB-B12 M12 x 1.75 100 103 68.5 107 47.5 60.5 90.5 35.5 100 103.1 68.6 106.7 47.5 60.5 35.5 ZPT125HB-A16

AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel (SUS304) M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel

AMD

Nil Rc Thread type F G N NPT Accessory/Option Combinations Available Not available Depends on model Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Accessory Optional specification C C D J R D J T AMD150 R AMD250 AMD350 AMD450 Applicable model Accessory (Option)

VDW

1 e w r e Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com u r u t t y y q q Component Parts Description Material No. Option Standard Stainless steel Body C37 q w e r t y u i o !0 !

Pin Clamp Cylinder Series CKQ/CLKQ

mounting type Applicable auto switch: D-A79W D-A7 D-A80 D-A7H D-A80H D-A73C D-A80C D-F7WV D-F7BAL D-F7BAVL D-F7W D-J79W D-F7NTL D-F79F D-F7V D-J79C D-F7 D-J79 [For CLKQ] [For CKQ] B A B A U U Direct mounting type Applicable auto switch: D-A9 D-A9V D-F9WV D-F9BAL D-M9V D-F9W [For CKQ] D-A9, D-F9W D-A9V, D-M9V D-F9WV D-F9BA U U B A [For CLKQ] D-A9, D-F9W D-A9V, D-M9V

VG342

DIN terminal Terminal 1 2 + + Pilot Valve Assembly Specifications Grommet (G), Grommet terminal (E), Conduit terminal (T), DIN terminal (D) Electrical entry How to Change Passage State Enclosure Dusttight Lead wire color 100 VAC: Blue, 200 VAC: Red, 24 VDC: Red/Black AC (50/60 Hz) 100, 200, 24, 48, 110, 220, 240 Coil rated voltage (V) 24, 6, 12, 48, 100 DC Allowable voltage fluctuation

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Reduced outgassing Resin materials eliminated Laser marking is employed for the model designation. o u d t g e 2 a c s u s d i Reduction of outgassing due to surface treatment e n o u d t g R e g a 1 c s u s d i e n R g All the external parts (made of aluminum alloy) such as the body and slide table are electroless nickel plated.

NVZseies

A A afll-'h s-zl;lh P R P R (external pilot type) A A , A;Tt-Zb gzt;]ri! , P R P R Model Specifications Air and inert 20-100 PSI (1.5"7kgf/cm,) VAC-1 10Torr 20-1OoPS|(15-7ksflcm'?) N,lax. 120'F (50'C) 20 ms or less (7OPS|) 600 cpm , Slotted Knob locking type Individual, Common Not (Use turbine oil # 1 (lSO VG32) if lubrication is Drovided.)

Vacuum Filter AFJ Series

drop [kPa] 8 8 AFJ40-04-80-T 6 6 4 4 2 2 Water drop removal type Nominal filtration rating: 80 m Large flow type Nominal filtration rating: 80 m 0 0 0 100 200 300 400 500 600 800 700 900 Flow rate [L/min(ANR)] 0 100 200 300 400 500 600 800 700 900 Flow rate [L/min (ANR)] 783 AFJ20 to AFJ40 Series Construction AFJ20 AFJ30, AFJ40 OUT IN OUT IN q q r r w w (y) e (y) t e t Component Parts No

CJ2X/CUX/CQSX/CQ2X/CM2X

Nil C M 40 50 63 80 100 40 mm 50 mm 63 mm 80 mm 100 mm Standard stroke Refer to Standard Stroke on page 10-3-13. D Double acting Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.

CJ2X/CUX/CQSX/CQ2X/CM2X

Nil C M 40 50 63 80 100 40 mm 50 mm 63 mm 80 mm 100 mm Standard stroke Refer to Standard Stroke on page 10-3-13. D Double acting Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.

CNG

CNG L N 32 100 D Standard Type With Auto Switch CDNG L N 32 100 D B53 Number of auto switches With auto switch (with magnet) 2 pcs.