SMC Corporation of America
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Piping Threads with Sealant Caution Mounting Caution AS-F AS-F 1. This product has a stopper for fully close in rotating direction. Excess torque may break the stopper. Table below shows the maximum allowable torque of the knob. 1. If the fitting is tightened with excessive torque, a large amount of sealant will seep out. Remove the excess sealant. TMH ASD 2.

6, 10, 15, 20, 25, 32 Dual Rod Cylinder Series CXS 10-/11-/1221-/22Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Directional Control Valves Air Grippers Modular F. R.

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 60

Description Material Note 1 Body Aluminum alloy Anodized 2 Branch passage PPS 3 Gasket HNBR 4 Sensor base PPS 5 Gasket HNBR 6 Sensor Au, Pt, Al2O3 Dimensions A B 70 H F E D 1.5 OUT IN 4 x P L K 2 x Port size N Symbol Model Port size A B D E F H K L N P PF3A703H Rc1, NPT1, G1 130 45 79.1 55.3 22.5 25 35 60 30 M4 x 0.7 depth 7 PF3A706H Rc1 1/2, NPT1 1/2, G1 1/2 170 60 94.1 70.3 30 68 45

Bellows seal O-ring seal Standard 468 Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series How to Order XLAQ M9N 16 A q w e r t y w Indicator/Actuator port direction q Flange size Size 16 25 40 50 Symbol Nil A F G J K L M Indicator Without indicator Actuator port direction Rear flange surface Flange side Flange side Left flange surface

Nil N F Rc NPT G Nil C The cable and connector are shipped unassembled.

50 75 125 Purge air flow rate (L/min (ANR)) Note 3) Inlet air pressure (MPa) 0.7 Inlet air temperature (C) Inlet air saturation temperature (C) Ambient temperature (C) Dew point indicator purge air flow rate Port size (Nominal size B) 25 25 25 1 L/min (ANR) Note 1) No freezing Note 2) ANR represents the flow rate converted to the value under 20C at atmospheric pressure.

= F x L M3 = F x L M1 = F x L Note) Deflection: Displacement of point A when force acts on point F Point A: Indicates a measurement point CYV15 (M1) CYV15 (M2) CYV15 (M3) 0.05 0.05 0.05 0.04 0.04 0.04 Deflection (mm) Deflection (mm) Deflection (mm) 0.03 0.03 0.03 0.02 0.02 0.02 0.01 0.01 0.01 0.1 0.2 0.3 0 0.1 0.2 0.3 0 0.1 0.2 0.3 0 Moment (Nm) Moment (Nm) Moment (Nm) CYV32 (M1) CYV32 (M2

= F x L M3 = F x L M1 = F x L Note) Deflection: Displacement of point A when force acts on point F Point A: Indicates a measurement point CYV15 (M1) CYV15 (M2) CYV15 (M3) 0.05 0.05 0.05 0.04 0.04 0.04 Deflection (mm) Deflection (mm) Deflection (mm) 0.03 0.03 0.03 0.02 0.02 0.02 0.01 0.01 0.01 0.1 0.2 0.3 0 0.1 0.2 0.3 0 0.1 0.2 0.3 0 Moment (Nm) Moment (Nm) Moment (Nm) CYV32 (M1) CYV32 (

D I M E N S I O N S S E R I E S (N)AS1000-M5 D I M E N S I O N S S E R I E S (N)AS2000, 3000 Port Size G H I K A B C D E F Model 1/8 50 54.5 16 4.5 40 30 5 17 10 15.5 (N)AS2000-01 3/4 51.5 56 20 4.5 40 30 5 23 11.5 17 (N)AS2000-02 1/4, 3/8 61 68 26 5.5 56 45.5 5.25 25 13.2 20.6 (N)AS3000-02, 03 Courtesy of Steven Engineering, Inc. !

C D A B (mm) D-A9, D-A9V (mm) D-F9, D-F9V (mm) D-F9W, D-F9WV A B A B A B Bore size 16 25 32 Operating range Bore size 16 25 40 Operating range Bore size 16 25 40 Operating range 54 106 58 102 57 103 54 156 58 152 57 153 11 8.5 8.5 85 245 89 241 88 242 (mm) (mm) (mm) C D C D C D Bore size 16 25 32 Operating range Bore size 16 25 32 Operating range Bore size 16 25 32 Operating range 27 133

16 25 40 Operating range Bore size 16 25 40 Operating range 58 102 3.0 58 102 3.5 58 102 3.5 58 152 8.0 58 152 9.0 58 152 11.0 89 241 6.5 89 241 7.0 89 241 7.5 (mm) (mm) (mm) C C C D D D Bore size 16 25 40 Operating range Bore size 16 25 40 Operating range Bore size 16 25 40 Operating range 31 129 3.4 31 129 3.5 31 129 4.0 3.5 3.5 61 149 61 149 61 149 4.0 5.0 3.0 94.2 235.8 94.2 235.8 94.2

Auto switches are shipped together, (but not assembled). 2010, 15, 20, 25, 30, 35, 40, 45, 50, 60, 70, 75, 80, 90, 100 15, 20 25, 32 Data Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

MU-C02 MU-C03 MU-C04 MU-C05 MU-C06 Bore (mm) 25 32 40 50 63 Part no.

CN1: . 21 6.1 . 21 6.2 . 21 6.3 . 22 (1) (C24V,M24V,0V) . 22 (2) (EMG) . 22 1 - (3) (BL RLS) . 22 6.4 . 23 1 . 23 2 . 24 3() . 25 7. CN5: . 26 7.1 . 26 7.2 . 26 7.3 . 27 8.

selection RX(n 3)0 RY(n 2)B Absolute value/incremental value to Reserved RY(n 2)C RX(n 3)9 to Reserved RX(n 3)A Problem ALM 15 RY(n 2)F RX(n 3)B Remote station communication ready CRD RY(n 3)0 to Reserved RX(n 3)C RY(n 3)9 to Reserved RY(n 3)A Reset RES RX(n 3)F Note.

selection RX(n 3)0 RY(n 2)B Absolute value/incremental value to Reserved RY(n 2)C RX(n 3)9 to Reserved RX(n 3)A Problem ALM 15 RY(n 2)F RX(n 3)B Remote station communication ready CRD RY(n 3)0 to Reserved RX(n 3)C RY(n 3)9 to Reserved RY(n 3)A Reset RES RX(n 3)F Note.

MU-C02 MU-C03 MU-C04 MU-C05 MU-C06 Bore (mm) 25 32 40 50 63 Part no.