Electric Actuator

Compared with SMC LJ1 series (Work load: 10 kg) 80 40 40 90 Equipped with seal bands as standard 40 40 Covers the guide, ball screw and belt. Prevents grease from splashing and external foreign matter from entering.

CEx-OML0058

I s i t p o s s i b l e f o r c a b l e o f I s t h e a n y i n f l u e n c e s t r o k e re a d i n g c y l i n d e r t o o f n o i s e ? b e w i r e d s e p a r a t e l y f r o m t h e p o w e r l i n e ? t h e p o w e r l i n e ?

Regulator

AR-OMX0055-B PRODUCT NAME Regulator MODEL / Series / Product Number AR20(K)-(F,N)01(F,N)02(B,E,E1,E2,E3,E4,G,H,J,M)(-1,N,R,Y,Z,ZA)-D AR30(K)-(F,N)02(F,N)03(B,E,E1,E2,E3,E4,G,H,J,M)(-1,N,R,Y,Z,ZA)-D AR40(K)-(F,N)02(F,N)04(B,E,E1,E2,E3,E4,G,H,J,M)(-1,N,R,Y,Z,ZA)-D AR40(K)-(F,N)06(B,E,E1,E2,E3,E4,G,H,J,M)(-1,N,R,Y,Z,ZA)-D AR50(K)-(F,N)06(F,N)10(B,E,E1,E2,E3,E4,G,M)(-1,N,R,Y,Z,ZA)-D AR60(K)-(

Mist Separator Regulator

AW-OMZ0061 PRODUCT NAME Mist Separator Regulator MODEL / Series / Product Number AWM20-(F,N)01(F,N)02(B,C,E,E1,E2,E3,E4,G,H,M)(-1,2,6,C,J,N,R,Z,ZA)-D AWM30-(F,N)02(F,N)03(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D AWM40-(F,N)02(F,N)04(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D Contents Page 1. Safety Instructions 2-8 2. Application 9 3. Standard Specifications 9 4.

Ｍ icro Mist Separator Regulator

AW-OMZ0062 PRODUCT NAME icro Mist Separator Regulator MODEL / Series / Product Number AWD20-(F,N)01(F,N)02(B,C,E,E1,E2,E3,E4,G,H,M)(-1,2,6,C,J,N,R,Z,ZA)-D AWD30-(F,N)02(F,N)03(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D AWD40-(F,N)02(F,N)04(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D Contents Page 1. Safety Instructions 2-8 2. Application 9 3.

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

tubing 6/4 P2 (Pressure gauge port size) R F J M D J U Bracket (Option) T N S Optional specifications Standard specifications Model Round type pressure gauge Bracket mounting size Panel mount Q R S T U V W Y Z F J K AA BB H J M N P1 P2 A B Note 1) C D 10-/21-AR20K-B 2 Note 2) 1/8, 1/4 20.5 30 1/8 11 34 40 43.9 44 67.4 5.4 65.5 26.5 15.4 28.5 55 M28 x 1 2.3 28.5 24.7 28.5 14 6 10-/21-AR25K-B

ZSE F/ISE

ZSM PF2 IF Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Data Special fitting types are used in semiconductor production equipment (Metal gasket seal fittings) Leak rate: 1 x 10 10 Pa.m3/s ZSE/ISE60(F)-A2 ZSE/ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (Metal gasket seal fittings

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

40 18 to 30 4.5 to 30 18 to 30 3 to 30 Y = Size: 10 to 30 Size: 40 Symbol: A57 Shorten both long and short shafts.

LFE-OMZ0011

1 Setting of OUT1 28 F 2 Setting of OUT2 36 F 3 Response Time 40 F10 Sub screen display 41 F20 External input 45 F22 Analogue Output in free range 46 F30 Accumulated flow value hold 47 F32 Flow direction / reverse flow detection 48 F33 Close proximity setting 50 F34 Zero-reset 51 F80 Power saving mode 52 F81 Security Code Request 53 F82 Input of line names 54 F90 Setting of all functions

MLGP

100 5 50 10 20 30 40 50 Transfer speed: (m/min) Features 14 Low Profile Guide Cylinder with Lock Series MLGP 20, 25, 32, 40, 50, 63, 80, 100 How to Order M F 32 50 Z73 MLGP Number of auto switches 2 pcs. 1 pc.

MLGP

100 5 50 10 20 30 40 50 Transfer speed: (m/min) Features 14 Low Profile Guide Cylinder with Lock Series MLGP 20, 25, 32, 40, 50, 63, 80, 100 How to Order M F 32 50 Z73 MLGP Number of auto switches 2 pcs. 1 pc.

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

override 34.7 [41.7] M5 x 0.8 (A, B port) 2-1.8 (For manifold mounting) (Light/Surge voltage suppressor) 28 [35] + 22.1 54.4 [56.6] 2 13.5 12.6 15 R P R (Bracket) 15 11 10 1.2 (PE port) 22.1 7 7 15 M5 x 0.8 (P, R port) M8 connector (WO): SYJ3120-WO-M3 (-F) L plug connector (L) : SYJ3120-L-M3 (-F) M plug connector (M): SYJ3120-M-M3 (-F) (2) Approx. 300 (Lead wire length) 28 [35] 12.6 32.5

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

2-1.8 (For monifold mounting) (Light/surge voltage suppressor) Bracket 2-3.2 equivalent (For mounting) (18.5) 28 [35] + (18.5) 22.1 13.5 12.6 15 (11.5) 0.5 10 R P R 1.2 (PE port) 14 M5 x 0.8 (P, R port) L plug connector (L): SYJ3220-L-M3 (-F) M plug connector (M): SYJ3220-M-M3 (-F) M8 connector (W0): SYJ3220-W0-M3 (-F) Approx. 300 (Lead wire length) 28 [35] 12.6 M8 x 1 32.5 15 39.1 [46.1]

AIR FILTER

AF-OMQ0004-C PRODUCT NAME AIR FILTER MODEL / Series / Product Number AF10-M5(C)(-2,6,R,Z)-A AF20-(F,N)01(F,N)02(B,C)(-2,6,C,J,R,Z)-A AF30-(F,N)02(F,N)03(B,C,D)(-2,6,8,J,R,W,Z)-A AF40-(F,N)02(F,N)04(B,C,D)(-2,6,8,J,R,W,Z)-A AF40-(F,N)06(B,C,D)(-2,6,8,J,R,W,Z)-A AF50-(F,N)06(F,N)10(B)(-2,6,8,J,R,W,Z)-A AF60-(F,N)10(B)(-2,6,8,J,R,W,Z)-A Contents Page 1. SAFETY INSTRUCTIONS 1-5 2.

Air Cylinder Series MB

E1 L1 R1 E1 L1 MM NDH10 NX U1 NDH10 NZ A A1 R1 U1 MM NX 32 40 50, 63 80 100 125 32 40 50, 63 80 100 125 20 22 28 40 40 46 30 40 50 65 65 I-03M I-04M I-05M I-08M I-10M I-12M Y-03M Y-04M Y-05M Y-08M Y-10M Y-12M +0.058 0 +0.058 0 +0.070 0 +0.084 0 +0.084 0 +0.084 0 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 0.10 0.30

F

~ 140F Ambient and Fluid Temperature 8 ~ 10Turns No Of Needle Rotations AS1000 Not Applicable Panel Cut Out Dimensions AS2000 16.5 AS3000 16.5 AS4000 25 D I M E N S I O N S S E R I E S (N)AS1000-M5 D I M E N S I O N S S E R I E S (N)AS2000, 3000 Port Size G H I K A B C D E F Model 1/8 50 54.5 16 4.5 40 30 5 17 10 15.5 (N)AS2000-01 3/4 51.5 56 20 4.5 40 30 5 23 11.5 17 (N)AS2000-02 1/4, 3

Sine Rodless Cylinder Series REBR Direct Mount Type

M1 = F x L A M2 = F x L M3 = F x L Note) Deflection: Displacement of section A when force acts on section F REBH15, 25 REBH15, 25 REBH15, 25 REBH15 REBH15 REBH25 REBH15 REBH25 0.08 0.03 REBH25 0.02 Deflection (mm) Deflection (mm) Deflection (mm) 0.06 0.02 0.04 0.01 0.01 0.02 5 10 15 20 0 25 25 5 10 15 20 0 5 10 15 20 0 25 Moment (Nm) Moment (Nm) Moment (Nm) REBHT25, 32 REBHT25, 32 REBHT25

CJ2X/CUX/CQSX/CQ2X/CM2X

, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 10, 16, 20 25, 32 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air cushion

Series 10-, 21- AW-B Filter Regulator

K F 10 AW B 30 03 BG JN K F 21 AW B 30 03 BG JN Copper, fluorine and silicone-free + Low particle generation q r t y w e Filter regulator Option/Semi-standard: Select one each for a to g.

Slider Type Ball Screw Drive/11-LEFS Series

16 20 24 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] L6 [mm] 600 600 600 600 Z 400 400 400 400 200 200 200 200 0 0 4 8 12 16 20 24 0 0 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load