Information

Bore size Stroke range head cap screw for CW CT CL CX CD M CZ R CN mounting pivot bracket (Accessory) Without auto switch With auto switch CQ-C032 32 5 to 50 50 60 60 20 5 30 18 10 34 45 80 6.6 M6 x 12 L 75, 100 5 to 50 58.5 68.5 66.5 76.5 CQ-C040 40 68.5 22 6 32 18 10 40 52 80 6.6 M6 x 14 L 75, 100 10 to 50 CQ-C050 50 76.5 28 7 42 22 14 50 64 80 9 M8 x 16 L 75, 100 CQ2 10 to 50 74 84 CQ-C063

VVX31/32/33

AC, DC C.O. 7.5 55 6 45 50 42 18 60 37 12 AC Cv converted Av x 10 6 (m 2 ) VX32 AC (Full wave rectification) 50/60 10 8.5 60 1 3 5 0.08 1.5 1.0 0.6 220 1.9 VX311 -00 DC 8.5 60 11 60 9.5 50 1 3 5 0.16 0.5 0.3 220 3.8 VX312 -00 50 55 22 60 47 18 AC 0.6 370 VX3225-00 2.2 0.19 4.6 VX33 1.0 530 VX3325-00 AC (Full wave rectification) 50/60 14 11.5 60 1 3 5 0.24 DC 11.5 60 0.3 0.2 5.8 220 1.0

CEx-OMQ0013

CE*-OMQ0013-F / / 1 7 1-1 1-2 1-3 1-4 8 2-1 2-2 2-3 13 3-1 3-2 3-3 15 4-1 4-2 4-3 17 5-1 5-2 5-3 21 6-1 6-2 22 7-1 7-1-1 7-1-2 7-2 7-2-1 7-2-2 7-3 7-3-1 7-3-2 7-3-3 INPUT 7-3-4 OUTPUT 7-3-5 7-3-6 28 36 9-1 9-1-1 9-1-2 9-1-3 9-2 9-2-1 9-2-2 9-3 9-3-1 45 10-1 10-2 46 11-1 11-2 50 12-1 CE2/CEU2 / *1) (ISO/IEC)(JIS) *2) *1) ISO 4414: Pneumatic fluid power

LECA6_C

LE C A 6 N A (DC24V) (LE ) LESH16RAJ-50BS-R16N1D 6 64 LESH16RAJ-50 I/O N NPN DIN P PNP 1 1.5m D DIN 3 3m 5 5m <> NPNPNP LESH16RAJ-50 NPN NPN 7 - 2.3 1 I/O LEC-CN5-* PLC 1 3 DC24V CN5 CN3 CN4 2 1 () LE-CA-* CN2 120.3 120.3 mm mm 200 200 mm/s mm/s 100 500 100 500 1 1 200 1000 200 1000 2 2 3 50 200 50 200 3 3 CN1 DC24V <> AWG20 (0.5mm 2) USB A-miniB type USB LEC-W2

MHL2

MHL2-10D MHL2-16D MHL2-16D MHL2-10D 2 1 2 1 60 60 25 25 0.6MPa 0.6MPa Holding force (N) Holding force (N) Holding force (N) Holding force (N) 50 50 20 20 0.5MPa 0.6MPa 0.5MPa 0.6MPa 40 40 15 15 0.4MPa 0.5MPa 0.4MPa 0.5MPa 0.4MPa 0.4MPa 30 30 10 10 0.3MPa 20 20 0.3MPa 0.3MPa 0.3MPa 0.2MPa 5 5 10 10 0.2MPa 0.2MPa 0.2MPa 10 20 30 40 50 60 70 20 40 60 80 100 120 20 40 60 80 100 120 0 0 0 10 20

Precision Cylinder Series MTS

241 181 377 283 0.7 35 26 79 59 141 105 220 165 343 251 563 422 879 659 0.6 30 22 68 50 121 90 188 141 294 215 482 362 754 565 0.5 25 19 57 42 101 75 157 118 245 179 402 302 628 471 8 5, 10, 15, 20, 25, 30 OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN 50 37 113 84 201 150 314 235 490 358 804 603 1,256 942 8 12, 16 25, 50, 75, 100 25, 50, 75, 100, 125, 150, 175, 200 12 20, 25, 32, 40 16

VCC

(C) Ambient temperature 5 to 50 Lubrication Not possible (Initial lubricant: White vaseline is used.)

80

Use a fluid with a kinematic viscosity of 50 mm2/s or less.

AZ1000

Diaphragm Nozzle Seat 316L SS Electropolish + Passivation 0 5 10 15 20 25 30 35 40 45 50 55 60 65 70 75 0.00 0.03 0.07 0.10 0.14 0.17 0.21 0.24 0.28 0.31 0.34 0.38 0.41 0.45 0.48 0.52 316L SS 316L SS Hastelloy C-22 Hastelloy C-22 Delivery pressure (MPa) Delivery pressure (psig) 316L SS PCTFE (Option: Vespel, PTFE) PCTFE (Option: PTFE) Dimensions inch (mm) AZ1000 2.12 (53.8) Max. 5.0 (127.0

VK300

[Option] Electrical entry D: DIN terminal DO : DIN terminal (Without connector) G: Grommet (Lead wire length: 300 mm) H: Grommet (Lead wire length: 600 mm) Rated voltage Valve option Rated voltage Nil V Y W E DC AC CE-compliant 1 2 3 4 5 6 7 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz 24 VDC 12 VDC 240 VAC, 50/60 Hz For the connector part number, refer to page

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

Pad diameter/form Silicone rubber Urethane rubber FKM ZHP63BM 2.9 0 20.3 ZHP80BM 5.0 0 35.1 ZHP63UM 1.5 0 10.6 ZHP80UM 2.1 0 15.5 255 ZHP Series Exhaust Characteristics/Flow Rate Characteristics (Representative Value) Flow Rate Characteristics Exhaust Characteristics ZHP-07 ZHP-07 (Supply pressure: 0.35 MPa) 50 45 40 35 30 25 20 15 10 5 0 0 0.1 0.2 0.3 0.4 0.5 0.6 100 90 80 70 60 50 40 30

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

H 28 30 36 44 54 E 22 21 26 F 45 55 58 65 76 G 33 42 44 50 61 D 34 46 63 67 78 A 59 78 107 110 134 B 20 29 39 42 53 C 40 53 70 75 90 I 45 55 63 69 81 Model Piping port VHS20 VHS30 VHS40 VHS40-06 VHS50 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1938 Series VHS20/30/40/50 Specific Product Precautions Be sure to read before handling.

PFxx-OMP0001CN

36 [1000] 1000 L/min(PFMB7202) [ 25] 25 L/min(PFMB7501) 2 [H_2] OUT2 [ 50] 50 L/min(PFMB7102) [100] 100 L/min(PFMB7202) [F 3][rES] [rES] [1.00] 1 41 [F10][FLo] [FLo] [inS] 42 [F13][rEv] [rEv] [oFF] 43 [F20][inP] [inP] 3 [rAC] 44 [F22][FrE] [FrE] 4 [oFF] OFF 45 [F30][SAv] [SAv] [oFF] 46 [PoS] [Hor] 47 [F31][PoS] [PrS] [Mid] 0.4 MPa0.6 MPa [F80][dSP] [dSP] OFF [ on] ON 48 [F81

AC Servo Motor Driver (Pulse input type/Positioning type)

Target position Rotation speed Dwell Auxiliary time constant time constant [10STMm] [r/min] [ms] function [ms] [ms] 1 5.00 3000 100 150 100 1 2 -6.00 2000 100 100 0 3 3 3.00 3000 50 50 0 0 (Note) Note.

CEx-OMG0106

ML2B / W1 ML2B / M1 0 0 0 0 Momentum Nm 0 0 Load N 0 Piston Speed m/s Piston Speed m/s ML2B / W2 ML2B / M2 Momentum Nm Load N Piston Speed m/s Piston Speed m/s ML2B / W3 ML2B / M3 20 10 Momentum Nm 5 Load N 3 2 1 Piston Speed m/s Piston Speed m/s ML2B / W4 Allowable Kinetic Energy 00 H or izontal M ounting 100 5 00 Ver tical M ounting 50 Load N 0 0 1 00 Load N 0 50 5 Piston Speed

MHL2

50 70 Note 1) J dimension is at fully closed.

Direct Solenoid

Voltage to Operaie (on 60 cycles) DC 8090 B70h 13.2 13.2 OIRECT SOLEI{OIO OPERA'ED: The solenoid operates tho spool directly, and a spring returns the spool and solenoid plunger when the solenoid is de-enrgized RESFO SE Time to Energizq (Sconds) 0.018 0.017 o.ga 0.025 0.012 0.012 0.018 0.018 0.015 0.015 0.025 0.025 0.0r7 0.016 0.023 0.023 1r5/50 1n/@ 1 15/50 120r'@ The sOool has no seals,

With Factory Installed

~ ( 0 '" co; Port size 1/8' 1/4 Gauge '" U'" ~N Drain 45 40 M5 X O .8 With differential pressure type auto drain Optional Specification yJ Metal bowl 45 IN-OUT reversal mounting (-R) specification 9 Filter I Regulator Series AW it (mm) AW3001 .

modular-press-e

Y200 AKM2000-01 (02) IS1000M-20 Y210-01 (02) AD17 Y100 AD48 AD47 AD38 AD37 Y300 AKM3000-(01) 02 IS1000M-30 Y310-(01) 02 AD38 AD48 auto drain AD17 AD27 AD37 AD47 Spacer Y100 Y200 Y300 Y400 Y500 Y600 Y400 AKM4000-(02) 03 IS1000M-40 Y410-(02) 03 02 VHS40-03 04 02 E400-03 04 06 02 IS1000E-4003 04 06 Y44-02 03 Y600 Y500 Check valve Note 6) Note 7) Pressure switch Note 7) IS1000M-60 IS1000M-50

Modular F.R.L. Pressure Control Equipment

Y200 AKM2000-01 (02) IS1000M-20 Y210-01 (02) AD17 Y100 AD48 AD47 AD38 AD37 Y300 AKM3000-(01) 02 IS1000M-30 Y310-(01) 02 AD38 AD48 auto drain AD17 AD27 AD37 AD47 Spacer Y100 Y200 Y300 Y400 Y500 Y600 Y400 AKM4000-(02) 03 IS1000M-40 Y410-(02) 03 02 VHS40-03 04 02 E400-03 04 06 02 IS1000E-4003 04 06 Y44-02 03 Y600 Y500 Check valve Note 6) Note 7) Pressure switch Note 7) IS1000M-60 IS1000M-50